JPS62251648A - Carbon monoxide detecting element - Google Patents
Carbon monoxide detecting elementInfo
- Publication number
- JPS62251648A JPS62251648A JP9573786A JP9573786A JPS62251648A JP S62251648 A JPS62251648 A JP S62251648A JP 9573786 A JP9573786 A JP 9573786A JP 9573786 A JP9573786 A JP 9573786A JP S62251648 A JPS62251648 A JP S62251648A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gaseous
- sensitive body
- oxidation catalyst
- carbon monoxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 title claims description 19
- 229910002091 carbon monoxide Inorganic materials 0.000 title claims description 19
- 239000003054 catalyst Substances 0.000 claims abstract description 38
- 230000003647 oxidation Effects 0.000 claims abstract description 30
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 30
- 238000001514 detection method Methods 0.000 claims description 18
- 229910044991 metal oxide Inorganic materials 0.000 claims description 13
- 150000004706 metal oxides Chemical class 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000007789 gas Substances 0.000 abstract description 63
- 230000035945 sensitivity Effects 0.000 abstract description 14
- 238000001179 sorption measurement Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 241000609240 Ambelania acida Species 0.000 description 5
- 239000010905 bagasse Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910002090 carbon oxide Inorganic materials 0.000 description 2
- 238000007084 catalytic combustion reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- -1 Sin Inorganic materials 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 230000006208 butylation Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
未発Ｉｊｌは、−酸化炭素検出素子に関し、Ｈ２及びＣ
Ｏに選択的感度を有する感応体と、Ｈ２を吸着する酸化
触媒とを組合せることにより、微徴のＣＯを、還元性ガ
スやｉｉｆ燃性ガスから区別して、単一のセンサで検出
できるようにしたものである。DETAILED DESCRIPTION OF THE INVENTION The industrial field of application Ijl relates to carbon oxide detection elements, H2 and C
By combining a sensitive body that is selectively sensitive to O and an oxidation catalyst that adsorbs H2, it is possible to detect minute signs of CO with a single sensor, distinguishing it from reducing gases and IIF combustible gases. This is what I did.
従来の技術
従来のガスセンサとしては、半導体式のものや接触燃焼
式のものが知られている。を導体式ガスセンサは、金属
酸化物半導体でなる感応体部とヒータ部とからなり、金
属酸化物半導体に還元性ガスが触れたときに、金属酸化
物半導体の電気伝導度が変化するこを利用したものであ
る。接触燃焼式ガスセンサは、白金フィラメントと、貴
金属触媒を相持したアルミナ担体とからなり、ｉｆ燃性
ガスが貴金属触媒上で燃焼する際の白金フィラメントの
抵抗値上昇によって、可燃性ガスを検知するものである
。2. Description of the Related Art As conventional gas sensors, semiconductor type and catalytic combustion type are known. A conductive gas sensor consists of a sensing body made of a metal oxide semiconductor and a heater part, and utilizes the fact that the electrical conductivity of the metal oxide semiconductor changes when a reducing gas comes into contact with the metal oxide semiconductor. This is what I did. A catalytic combustion gas sensor consists of a platinum filament and an alumina carrier with a precious metal catalyst, and detects combustible gas by the increase in resistance of the platinum filament when the flammable gas burns on the precious metal catalyst. be.
発明が解決しようとする問題点
しかしながら、Ｅ述した従来のガスセンサは、還元性ガ
スやＩＴｆ燃性ガスの検知を目的としたものであって、
例えば数１・ｐｐｍ程度の′ｅ闇のＣＯを、他の還元性
ガスや、可燃性ガスから区別して検出することができな
かった。Problems to be Solved by the Invention However, the conventional gas sensor described above is aimed at detecting reducing gases and ITf flammable gases.
For example, it has not been possible to detect CO at a low level of about 1 ppm, distinguishing it from other reducing gases and combustible gases.
問題点を解決するための手段
上述する従来の問題点を解決するため、本発明に係る一
酸化炭素検出素子は、 Ｈ２及びＣＯに選択的感度を有
する金属酸化物半導体でなる感応体と、Ｈ７を吸ノ１さ
せる酸化触媒との組合せを特徴とする。Means for Solving the Problems In order to solve the above-mentioned conventional problems, the carbon monoxide detection element according to the present invention includes a sensitive body made of a metal oxide semiconductor having selective sensitivity to H2 and CO; It is characterized by its combination with an oxidation catalyst that causes the inhalation of
信用
本発明に係る一酸化炭素検出素子−においては、まず、
酪化触媒によりＨ２を吸着する。感応体はＨ２とＧＯと
に選択的感度を有するが、前述したように、■２は酸化
触媒によって吸着されるので、感応体に接触するのはＣ
Ｏガスだけである。従って、還元性ガスやＩｉ（燃性ガ
スから区別して、ＣＯガスだけを選択的に検知すること
ができる。In the carbon monoxide detection element according to the present invention, first,
H2 is adsorbed by a butylation catalyst. The reactor has selective sensitivity to H2 and GO, but as mentioned above, (2) is adsorbed by the oxidation catalyst, so the only thing that comes into contact with the reactor is C.
Only O gas. Therefore, it is possible to selectively detect only CO gas, distinguishing it from reducing gas and Ii (combustible gas).
前記感応体としては例えば５ｎ０２またはＺｎ０７３の
金属酸化物半導体が′ａ当である。これらの金属酸化物
半導体は、Ｃ０１Ｈ２、炭化水素の吸着によって電気抵
抗ｆ１が太きく変化する。特に、１１０００ｐｐ以゛ド
のＣ度のＣ０１Ｈ２に対して敏感に感応する。また、に
述の金属酸化物半導体にＰｔを含有させると、１００℃
以ドの温度でＣＯに対する感度が向ヒする。感応体はＣ
Ｏガスとの接触領域を大きくするため、多孔質焼結体と
して形成するのが望ましい。The sensitive material is, for example, a metal oxide semiconductor such as 5n02 or Zn073. The electrical resistance f1 of these metal oxide semiconductors changes greatly due to the adsorption of C01H2 and hydrocarbons. In particular, it is sensitive to C01H2 of 11,000 pp or more. Furthermore, when Pt is added to the metal oxide semiconductor described in
Sensitivity to CO increases at temperatures below. The sensitive body is C
In order to increase the area of contact with O gas, it is desirable to form it as a porous sintered body.
次に、酸化触媒としては、Ｃｒ２Ｏ３，５ｎ０２、丁ｈ
ＯまたはＰｄＣｌ ２−５ ｉｏ ２から選択された少
なくとも一種のものが有効である。これらの酸化触媒は
Ｈ２の吸着作用が大きい、酸化触媒のＨ２吸着作用は３
００℃〜４００″Ｃの温度に加熱すると一層強くなる。Next, as an oxidation catalyst, Cr2O3,5n02,
At least one selected from O or PdCl2-5io2 is effective. These oxidation catalysts have a large H2 adsorption effect, and the H2 adsorption effect of the oxidation catalyst is 3
It becomes even stronger when heated to a temperature of 00°C to 400″C.
従って、酸化触媒は前述の温度範囲となるように、ヒー
タ等を用いて加熱することが望ましい、また、酸化触媒
は感応体と同様に多孔質焼結体とするのが望ましい。Therefore, it is desirable to heat the oxidation catalyst using a heater or the like so that the temperature falls within the above-mentioned temperature range, and it is also desirable that the oxidation catalyst be made of a porous sintered body like the sensitive body.
実施例
０′５１図は本発明に係る一酸化炭素検出素子の斜視図
、第２図は同じくその断面図である０図において、ｌは
絶縁基板である。この絶縁基板ｌはアルミナ等のち密質
絶縁材料でなっている。Embodiment 0'51 is a perspective view of a carbon monoxide detection element according to the present invention, and FIG. 2 is a cross-sectional view thereof. In FIG. This insulating substrate l is made of a dense insulating material such as alumina.
２は絶縁基板ｌの表面」；に積層して一体化された感応
体であり、５ｎ０２またはＺｎＯ２笠の金属酸化物半導
体を主成分とする多孔質焼結体で形成されている。感応
体２の相対向する両側面には、Ａｇ。A sensitive body 2 is laminated and integrated on the surface of the insulating substrate 1, and is formed of a porous sintered body mainly composed of a metal oxide semiconductor such as 5N02 or ZnO2. Both opposing sides of the sensitive body 2 are coated with Ag.
Ａｇ−Ｐｄ等でなる゛上極２１．２２が被着形成されて
いる。Upper electrodes 21 and 22 made of Ag--Pd or the like are deposited.
３は電気的及び熱的な絶縁層である。この絶縁層３はジ
ルコニア、Ｓｉｎ、アスベスト、に２ＴｉＣｈ。3 is an electrically and thermally insulating layer. This insulating layer 3 is made of zirconia, Sin, asbestos, and 2TiCh.
Ｓ：Ｏｐ等の比較的ポーラスな絶縁層として、感応体２
の表面を覆うように、その−面」二に一体的に積層され
ている。As a relatively porous insulating layer such as S:Op, the sensitive body 2
It is integrally laminated on the second side so as to cover the surface of the second side.
４はヒータである。この実施例では、酸化ルテニュウム
笠の抵抗発熱体を、絶縁層３の表面に一体的に積層する
ことによって形成しである。4 is a heater. In this embodiment, a resistance heating element made of ruthenium oxide cap is integrally laminated on the surface of the insulating layer 3.
４１．４２はヒータ４の両端に被着形成された電極であ
る。41 and 42 are electrodes formed on both ends of the heater 4.
５はヒータ４の表面りに層状に一体的に積層して設けら
れた酸化触媒層であり、Ｃｒ２Ｏ３，ＳｎＯハＴｈＯま
たはＰｄＣｌ２−ＳｉＯ２を主成分とする多孔質焼結体
によ６て形成されている。Reference numeral 5 denotes an oxidation catalyst layer that is integrally laminated in a layered manner on the surface of the heater 4, and is formed of a porous sintered body mainly composed of Cr2O3, SnO, ThO, or PdCl2-SiO2. ing.
１−記実施例の一酸化炭ぶ検出素子において、還元性ガ
スやｔ’＋（燃性ガス等と共に、ＣＯガスがかえられた
場合、酸化触媒５にＨ２ガスが吸着する。酸化触媒５に
よって吸着されないＨ２ガス以外のガスは１次に、感応
体２に接触する。感応体２はＨ２ガス及びＣＯガスにの
み選択的感度を有するから、これ以外の還元性ガスや０
■燃性ガスが接触しても感度を生じることがない。ここ
で、Ｈ２ガスは酸化触媒５の吸着作用によってトラップ
されている。結局、感応体２に接触するのはＣＯガスだ
けとなり、ＣＯガスが感応体２の゛心気抵抗の変化とし
て検出される。In the carbon monoxide detection element of Example 1-1, when CO gas is exchanged with reducing gas, t'+ (combustible gas, etc.), H2 gas is adsorbed on the oxidation catalyst 5. Gases other than H2 gas that are not adsorbed first come into contact with the sensitive body 2.Since the sensitive body 2 has selective sensitivity only to H2 gas and CO gas, other reducing gases and zero
■No sensitivity occurs even if flammable gas comes into contact with it. Here, the H2 gas is trapped by the adsorption action of the oxidation catalyst 5. In the end, only the CO gas comes into contact with the sensitive body 2, and the CO gas is detected as a change in the aerobic resistance of the sensitive body 2.
第１図及び第２図の実施例の場合、酸化触媒５をヒータ
４によって加熱するようにしであるので、その加熱作用
により酸化触媒５のＨ２ガス吸着作用が強くなり、高感
度のＣＯガス検出が１１■能である。In the case of the embodiments shown in FIGS. 1 and 2, the oxidation catalyst 5 is heated by the heater 4, so the heating action strengthens the H2 gas adsorption action of the oxidation catalyst 5, allowing for highly sensitive CO gas detection. is 11 ■ Noh.
感応体２は１００℃以ドの温度でＣＯガスに対する感度
が高くなる。この実施例では、感応体２とヒータ４との
間に、電気的、熱的な絶縁層３を設けであるので、感応
体２の温度を １００℃以下に抑えて高感度化できる。The sensitivity of the sensitive body 2 to CO gas increases at a temperature of 100° C. or higher. In this embodiment, an electrical and thermal insulating layer 3 is provided between the sensitive body 2 and the heater 4, so that the temperature of the sensitive body 2 can be suppressed to 100° C. or less and high sensitivity can be achieved.
また、絶縁基板ｌ、感応体２、絶縁層３、ヒータ４及び
酸化触媒５を積層して一部品化しであるので、ガスセン
サとして使用するときの取扱いが容易である。Further, since the insulating substrate 1, the sensitive body 2, the insulating layer 3, the heater 4, and the oxidation catalyst 5 are laminated into a single component, it is easy to handle when used as a gas sensor.
第３図は第１図及び第２図に示した実施例において、Ｃ
Ｏバガス度及びＨ２ガス濃度を変化させた場合の感応体
２の抵抗（ｌ１１＋変化率特性図で、横軸にＣＯガス及
びＨ２ガスのＣ度（ｐｐｓ）をとり、縦軸に感応体２の
抵抗４ｔｉ変化率（％）とっである、感応体２は５ｎ０
７を−Ｌ成分とする金属酸化物半導体でなる多孔質焼結
体とした。第３図の曲線Ａ１〜Ａ５はＣＯバガス度の抵
抗値変化率特性、曲線Ｂ＋−ＢｓはＨ２ガス濃度の抵抗
値変化率特性である０曲線ＡＩ及びＢ１は酸化触媒５と
してＣｒ２Ｏ３を用いた場合の特性、曲線Ａ２及びＢ２
は同じく５ｎ０２を用いた場合の特性、曲線Ａ３及びＢ
３は同じ＜ ＴｈＯを用いた場合の特性、曲線Ａ４及び
Ｂ４は同じくＰｄＣｌ２−５ｉ（ｈを用いた場合の特性
である６曲線Ａ５及び曲ｍＢｓは酸化触媒５を持たない
場合の特性である。各酸化触媒５はヒータ４を動作させ
て約３５０℃の温度まで加熱した。FIG. 3 shows that in the embodiment shown in FIGS. 1 and 2, C
The resistance of the sensitive body 2 when changing the O bagasse degree and the H2 gas concentration (l11 + rate of change characteristic diagram), the horizontal axis shows the C degree (pps) of the CO gas and H2 gas, and the vertical axis shows the resistance of the sensitive body 2. The resistance is 4ti change rate (%), and the sensitive body 2 is 5n0.
7 was used as a porous sintered body made of a metal oxide semiconductor containing -L component. Curves A1 to A5 in Fig. 3 are resistance change rate characteristics of CO bagasse degree, curve B+-Bs are resistance change rate characteristics of H2 gas concentration, and curves AI and B1 are when Cr2O3 is used as the oxidation catalyst 5. characteristics, curves A2 and B2
Similarly, the characteristics when using 5n02, curves A3 and B
Curves A4 and B4 are the characteristics when using PdCl2-5i (h). Curves A5 and mBs are the characteristics when the oxidation catalyst 5 is not used. Each oxidation catalyst 5 was heated to a temperature of about 350° C. by operating the heater 4.
第３図に示すように、酸化触媒５をＣＨＯ＝、５１１０
２． ＴｈＯまたはＰｄＣ：１２−５ｉＯｚで構成した
場合、曲線Ａ１〜Ａ４に示す如く、ＣＯガスＣ度が高く
なるにつれて、はぼそれに比例して、感応体２の抵抗値
変化率が大きくなって行く、これに対して、曲線Ｂ１−
８４に示す如く、Ｈ２ガス濃度が高くなっていっても、
感応体２の抵抗イ１変化率はほぼ一定である。これはＨ
２ガスが酸化触媒５によって吸着されるからであって、
これによりＣＯガスＣ度をＨ２ガス濃度から分離して検
知することができる。As shown in FIG. 3, the oxidation catalyst 5 is CHO=,5110
2. When composed of ThO or PdC: 12-5 iOz, as shown in curves A1 to A4, as the degree of CO gas C increases, the rate of change in resistance value of the sensitive body 2 increases approximately in proportion to it. On the other hand, curve B1-
As shown in 84, even if the H2 gas concentration increases,
The rate of change in resistance I1 of the sensitive body 2 is approximately constant. This is H
This is because the two gases are adsorbed by the oxidation catalyst 5,
Thereby, the CO gas C degree can be detected separately from the H2 gas concentration.
しかも、数十ｐｐｍの微４１．から人体に危険を及ぼす
とされる２００ｐｐｍのＣＯバガス度まで、直線的に変
化する特性が得られている。What's more, it's a few tens of ppm. Characteristics that vary linearly from 200 ppm to 200 ppm CO bagasse content, which is considered dangerous to the human body, have been obtained.
酸化触媒５を持たない場合には１曲線Ａ５と曲！ａ Ｂ
Ｓとの比較から明らかなように、Ｈ２ガス濃度の抵抗
値変化率特性Ｂ−が、ＣＯバガス度の抵抗値変化Ｊ４Ｉ
Ｆ性Ａ５と近似した特性となり、ＣＯバガス度に対する
感度と、 ＨｚカスＣ度に対する感度との差がＪ１常に
小さくなる。従って、酸化触媒５を持たない場合は、
Ｈ２ガスＣ度の影響を受けてしまい、ＣＯガスをＨ／ガ
スから分離して検出することができない。If you do not have oxidation catalyst 5, 1 curve A5 and the song! a B
As is clear from the comparison with S, the resistance value change rate characteristic B- of H2 gas concentration is the same as the resistance value change J4I of CO bagasse degree.
The characteristics are similar to those of F property A5, and the difference between the sensitivity to CO bagasse degree and the sensitivity to Hz gas C degree is always small. Therefore, if the oxidation catalyst 5 is not provided,
The CO gas cannot be detected separately from the H/gas because it is affected by the H2 gas C degree.
第４図は第３図に示した−・酸化炭素検出、ｈ子の時間
応答特性図である６図において、横軸に時間（分）をと
り、縦軸に感応体２の抵抗値（Ω）を取っである。酸化
触媒５はヒータ４を動作させて約３５０℃の湿度まで加
熱した。この特性図に示すように、２００ＰＰ層のＣＯ
ガスを流入させた場合、感応体２の抵抗４ｔｉが、約７
〜８分程度で、最低値まで急激に低ドする。そして、Ｃ
Ｏガスの流入を中ｌ二させると約１５分経過後１元の抵
抗値に復帰する良好な応答特性が得られる。Fig. 4 is a time response characteristic diagram of the carbon oxide detection shown in Fig. 3. In Fig. 6, the horizontal axis represents time (minutes), and the vertical axis represents the resistance value (Ω ). The oxidation catalyst 5 was heated to a humidity of about 350° C. by operating the heater 4. As shown in this characteristic diagram, the CO of the 200PP layer
When gas is allowed to flow in, the resistance 4ti of the sensitive body 2 is approximately 7
It drops rapidly to the lowest value in about 8 minutes. And C
When the inflow of O gas is reduced to 12, good response characteristics can be obtained in which the resistance value returns to 1 after about 15 minutes.
発明の効果
以！−述べたように、本発明に係る一酸化炭素検出素ｒ
は、Ｈ２及びＣＯに遠釈的感度を右する金属酸化物゛ｉ
導体でなる感応体と、Ｈ２を吸着する酸化触媒とのＭ【
合せでなるから、微諺の一酸化炭素を。More than the effects of invention! - As mentioned, the carbon monoxide detector according to the present invention r
are the metal oxides that have esodic sensitivity to H2 and CO.
M[
It's a combination of carbon monoxide and carbon monoxide.
還九性ガスやＩＩｆ燃性ガスからメ４別して、？ｉ−の
センサで検出し得る一酸化炭素検出素＝ｊ−を提供でき
る。What are the four different types of flammable gases and IIf flammable gases? It is possible to provide a carbon monoxide detection element =j- that can be detected by the sensor i-.
第１図は本発明に係る一酸化炭素検出素子の外観斜視図
、第２図は同じくその断面図、第３図は第１図及び第２
図に示した未発ＩｊＩに係る一酸化炭素検出素子と、酸
化触媒を持たない一酸化炭素検出素子のＣＯガスＣ度及
びＨ２ガスＣ度−抵抗値変化率特硅図、第４図は本発明
に係る一酸化炭素検出素子の時間応答特性図である。
２・・φ感応体 ３番・・絶縁層
４・・・ヒータ ５・・・酸化触媒
第１図
第２図
第３図
’２ ｉＬ、蝉ｃｏｉ九−１−
第４図
１閤Ｃ冴）−一―FIG. 1 is an external perspective view of a carbon monoxide detection element according to the present invention, FIG. 2 is a sectional view thereof, and FIG.
The carbon monoxide detection element related to unemitted IjI shown in the figure, and the carbon monoxide detection element without an oxidation catalyst, CO gas C degree and H2 gas C degree vs. resistance value change rate characteristic diagram, Figure 4 is the book. FIG. 3 is a time response characteristic diagram of the carbon monoxide detection element according to the invention. 2...φ sensitive body 3...Insulating layer 4...Heater 5...Oxidation catalyst -1-
Claims (6)
半導体でなる感応体と、Ｈ＿２を吸着させる酸化触媒と
の組合せを特徴とする一酸化炭素検出素子。(1) A carbon monoxide detection element characterized by a combination of a sensitive body made of a metal oxide semiconductor that is selectively sensitive to H_2 and CO, and an oxidation catalyst that adsorbs H_2.
Ｏ＿２の何れかを主成分とすることを特徴とする特許請
求の範囲第１項に記載の一酸化炭素検出素子。(2) The metal oxide semiconductor is SnO_2 or Zn
The carbon monoxide detection element according to claim 1, characterized in that the main component is one of O_2.
特徴とする特許請求の範囲第１項または第２項に記載の
一酸化炭素検出素子。(3) The carbon monoxide detection element according to claim 1 or 2, wherein the metal oxide semiconductor contains Pt.
ＴｈＯまたはＰｄＣｌ＿２−ＳｉＯ＿２から選択された
少なくとも一種でなることを特徴とする特許請求の範囲
第１項、第２項または第３項に記載の一酸化炭素検出素
子。(4) The oxidation catalyst includes Cr_2O_3, SnO_2,
The carbon monoxide detection element according to claim 1, 2, or 3, characterized in that it is made of at least one selected from ThO or PdCl_2-SiO_2.
なることを特徴とする特許請求の範囲第１項、第２項、
第３項または第４項に記載の一酸化炭素検出素子。(5) Claims 1 and 2, characterized in that the sensitive body and the oxidation catalyst are made of porous sintered bodies.
The carbon monoxide detection element according to item 3 or 4.
徴とする特許請求の範囲第１項、第２項、第３項、第４
項または第５項に記載の一酸化炭素検出素子。(6) Claims 1, 2, 3, and 4 further include a heater that heats the oxidation catalyst.
The carbon monoxide detection element according to item 5 or item 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9573786A JPS62251648A (en) | 1986-04-24 | 1986-04-24 | Carbon monoxide detecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9573786A JPS62251648A (en) | 1986-04-24 | 1986-04-24 | Carbon monoxide detecting element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62251648A true JPS62251648A (en) | 1987-11-02 |
Family
ID=14145795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9573786A Pending JPS62251648A (en) | 1986-04-24 | 1986-04-24 | Carbon monoxide detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62251648A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0466858A (en) * | 1990-07-06 | 1992-03-03 | New Cosmos Electric Corp | Carbon monoxide gas sensor |
-
1986
- 1986-04-24 JP JP9573786A patent/JPS62251648A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0466858A (en) * | 1990-07-06 | 1992-03-03 | New Cosmos Electric Corp | Carbon monoxide gas sensor |
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