JPS6224940U - - Google Patents
Info
- Publication number
- JPS6224940U JPS6224940U JP11587985U JP11587985U JPS6224940U JP S6224940 U JPS6224940 U JP S6224940U JP 11587985 U JP11587985 U JP 11587985U JP 11587985 U JP11587985 U JP 11587985U JP S6224940 U JPS6224940 U JP S6224940U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- plasma generation
- microwave
- generation tube
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11587985U JPH0323303Y2 (cg-RX-API-DMAC7.html) | 1985-07-30 | 1985-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11587985U JPH0323303Y2 (cg-RX-API-DMAC7.html) | 1985-07-30 | 1985-07-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6224940U true JPS6224940U (cg-RX-API-DMAC7.html) | 1987-02-16 |
| JPH0323303Y2 JPH0323303Y2 (cg-RX-API-DMAC7.html) | 1991-05-21 |
Family
ID=30999947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11587985U Expired JPH0323303Y2 (cg-RX-API-DMAC7.html) | 1985-07-30 | 1985-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323303Y2 (cg-RX-API-DMAC7.html) |
-
1985
- 1985-07-30 JP JP11587985U patent/JPH0323303Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0323303Y2 (cg-RX-API-DMAC7.html) | 1991-05-21 |
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