JPS62245389A - Form measuring instrument - Google Patents

Abstract

PURPOSE:To obtain only an image pickup data obtained from a spot optical path by eliminating a virtual image, by providing a detection sensor which detects the scanning direction of spot light, and a memory control part which stores the image pickup data. CONSTITUTION:Spot light 22 projected by a semiconductor laser diode 18 is converged on an object 28 to be measured by a collimator lens 24, a convergence lens 26, and a reflecting mirror 20, then a light spot 30 being formed. The scanning direction of the spot light 20 is detected by a detection sensor 40. A memory control part 42 includes a storage circuit 44 which stores a picture data from a TV camera 34, and a CPU46, and controls selectively the data readout scanning position of the TV camera 34 corresponding to the scanning direction of the spot light 22.

Description

[Detailed Description of the Invention] [Industrial Field of Application 1] The present invention is a shape measuring device, in particular, a method for measuring spora on the surface of a shiny object to be measured. ki
The present invention relates to a shape measuring device that measures the shape of an object by imaging it.

[Prior art 1] Shape measurement using a combination of a spot light and a moving image camera has been widely used in the past, and FIG. An example is shown.

That is, a spot light is forcibly irradiated onto the surface of the object from a light projection device 12 to a spora 1 that generates Rayleigh light, etc., and the reflected light is detected by a light receiving device 14 such as a TV camera, and triangulation is carried out. It uses mold theory to find the distance to a point on the surface of an object.

The information obtained from this spot light is the information of the point at the position coordinates, and by sequentially tracking this point, information such as the edge of the object can be obtained. ~It is also possible to identify the shape by creating light, projecting this slit light onto the surface of the object, and receiving the reflected light that changes depending on the surface shape.In this way, the shape can be measured by optical means. The system 6 is widely used for visual inspection of various workpieces.

[Problems to be Solved by the Invention] However, with the above-mentioned conventional shape measuring device, it is difficult to measure the object to be measured whose gloss is 1° to the right, such as a metallic shiny surface such as a press panel. Its application is difficult and rare. Because,
The shape of the object to be measured, the irradiation angle of the ray light, or the TV
Due to the image angle of the camera, the LED light reflected from one surface of the object to be measured becomes reflected light and illuminates another surface, creating a virtual image due to so-called secondary reflection, making it difficult to measure the regular shape. It is from.

Aspects of the Invention 1] This invention has been made to solve the above problems, and is a shape measurement method in which virtual image data due to reflected light is removed and only image data obtained from within the spot optical path is valid. The purpose is to provide equipment.

[Means and operations for solving the problem] This shape measuring device focuses a spot light on the surface of the object to be measured according to a predetermined scanning line, and traces the trajectory of the light spot to the irradiated spora 1. A device for measuring the shape of an object to be measured by imaging the object, comprising a detection pin 1 for detecting the scanning direction of the spot light, and a memory control section for storing image data carried by the pupil image means. be.

The measuring control section selectively controls the data readout scanning position of the image carrier by a TV camera or the like in one direction corresponding to the scanning direction of the spot light. Determine the position where the spot light spot on the object to be measured is imaged on the image carrier side according to the illumination Q-1 angle of the spot light, and judge whether the imaged light spot is due to reflected light or not. By doing so, the virtual image data is removed, and only the carried image data obtained from within the spot optical path can be read out.

Therefore, the spot light reflected on the surface of the object to be measured turns into scattered light and illuminates another surface, making it possible to accurately measure the shape of the object to be measured without being affected by virtual images caused by so-called secondary reflections. becomes possible.

[Example] A preferred example of the present invention will be described below with reference to the drawings.

FIG. 2 shows an overall external view of the shape measuring device according to the present invention. In the same figure, the spot light projection means 16 is a semi-substrate as a light source - an IJ'' diode 18 and an anti-9A diode.
The spot light (laser light) 22 including the mirror 20 and irradiated by the semiconductor laser diode 18 is directed to the collino 1 to
Lens 24. The condensing lens 26 and the anti-gFI chain 20 converge the light onto the object to be measured 28 to form a light spot 30 .

The reflecting mirror 20 is swingable, and one movement of the reflecting mirror 20 produces a spora (when the light 22 is scanned along a predetermined scanning line, a continuous light spot 30 appears on the object 28). A trajectory 32 is formed.Thus, a T''V camera 34 serving as an image carrier images the trajectory 32, and the shape of the object to be measured 28 is measured based on the image data 36.In this case, , when the object to be measured 28 has poor gloss, a virtual image 48 is generated due to the reflection of the light spot due to the secondary reflection of the spot light 22, and this virtual image 48
It becomes difficult to accurately grasp the shape of

Here, the characteristic feature of the present invention is that the shape measuring device includes a detection sensor for detecting the scanning direction of the spot light and a detection sensor for detecting the scanning direction of the spot light.
A memory control section for storing 1lffi image data of the υ image means is provided.

However, as shown in FIG. 1, the position of the light spot 30 formed by the spotlight 22 is located somewhere on the line segment AB depending on the position of the object to be measured 28.

It is clear that this line segment AB becomes a line segment A'B' on the TV camera 34, and the image 30a of the light spot 30 exists on the line segment A'B'. On the other hand, since the virtual image 48 that appears on the TV camera 34 due to the scattering of the spot light 22 exists outside the line segment A'B', it is possible to distinguish between the real image 30a and the virtual image 48a. 'Niru.

Specifically, the reflecting mirror 20 can be oscillated about an axis 38 at the minimum pitch necessary for measurement, and the optical path of the spot light 22 by this reflecting mirror 20 is between the axis 38 and the TV.
The angle O formed with the line connecting the center of the screen of the camera 34 is detected by the detection range 40 degrees. Further, the memory system a11 section 42 includes a storage circuit 4 for storing image data.
4 and a CPU 46, the CPU 46 calculates the position of the line segment A'B' of the real image 30a (F) according to the large serration of the angle O, and calculates the position of the line segment A' that should be in the spot optical path.
The light spot 30 on B' is judged to be a real object, and the above control is performed to adjust the angle θ
It is repeated every time the value changes.

The data reading scanning position of the TV camera 34 is selectively controlled by the CPU 46 in accordance with the scanning direction of the spotlight 22, and if the image data at an arbitrary point is determined to be one image, By removing this portion of data, only data obtained from within the spot optical path is always stored as image data.

According to this embodiment, the memory control unit 42 selectively controls the data readout scanning position on the image carrying means in accordance with the scanning direction of the spot light, so that the virtual image data can be read. It is possible to read out only the 1lfi image data that is removed and extracted from within the spot optical path,
It becomes possible to accurately measure the shape of the object to be measured without being affected by secondary fouling.

[Effects of the Invention] As explained above, the present invention has the following advantages: by being equipped with the detection range for detecting the scanning direction of the spot light and the control unit 11 for storing the conveyance data! ,! ! By removing the image data and obtaining only the conveyed image data obtained from within the spot optical path, it is possible to accurately measure the shape of an object to be measured, especially a glossy object.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of a schematic configuration of a shape measuring device according to the present invention, FIG. 2 is an overall external view thereof, and FIG. 3 is an explanatory diagram of the principle of observation equipment for ablated objects using a spot light projection method. 16...Spot 1~Light projection means 20...Reflector 22...Spot I~Light 28...Measurement object 30...Light spot 32...Trajectory 34...TV camera 36 ... Copying data 40 ... Detection range 42 ... Memory control section 48 ... Virtual image

Claims (1)

[Claims] Scanning the spot light, comprising: a spot light projecting means for irradiating the spot light onto the surface of the object to be measured according to a predetermined scanning line; and an imaging means for capturing an image of the locus of the light point of the spot light irradiated onto the surface of the object to be measured. A shape measuring device that measures the shape of a workpiece by using The shape is characterized in that by selectively controlling the data readout scanning position in accordance with the scanning direction of the spot light, it is possible to read out only the imaging data obtained from within the spot light path and to remove virtual image data. measuring device.