JPS6223871U - - Google Patents
Info
- Publication number
- JPS6223871U JPS6223871U JP11551485U JP11551485U JPS6223871U JP S6223871 U JPS6223871 U JP S6223871U JP 11551485 U JP11551485 U JP 11551485U JP 11551485 U JP11551485 U JP 11551485U JP S6223871 U JPS6223871 U JP S6223871U
- Authority
- JP
- Japan
- Prior art keywords
- shutter plate
- particles
- tip
- film
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims description 6
- 230000005484 gravity Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 230000001154 acute effect Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11551485U JPH057249Y2 (enrdf_load_stackoverflow) | 1985-07-27 | 1985-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11551485U JPH057249Y2 (enrdf_load_stackoverflow) | 1985-07-27 | 1985-07-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6223871U true JPS6223871U (enrdf_load_stackoverflow) | 1987-02-13 |
| JPH057249Y2 JPH057249Y2 (enrdf_load_stackoverflow) | 1993-02-24 |
Family
ID=30999236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11551485U Expired - Lifetime JPH057249Y2 (enrdf_load_stackoverflow) | 1985-07-27 | 1985-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057249Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-07-27 JP JP11551485U patent/JPH057249Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057249Y2 (enrdf_load_stackoverflow) | 1993-02-24 |
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