JPS6223855U - - Google Patents

Info

Publication number
JPS6223855U
JPS6223855U JP11519185U JP11519185U JPS6223855U JP S6223855 U JPS6223855 U JP S6223855U JP 11519185 U JP11519185 U JP 11519185U JP 11519185 U JP11519185 U JP 11519185U JP S6223855 U JPS6223855 U JP S6223855U
Authority
JP
Japan
Prior art keywords
coil
reduced pressure
heating
vapor deposition
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11519185U
Other languages
English (en)
Other versions
JPH0213484Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11519185U priority Critical patent/JPH0213484Y2/ja
Publication of JPS6223855U publication Critical patent/JPS6223855U/ja
Application granted granted Critical
Publication of JPH0213484Y2 publication Critical patent/JPH0213484Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る減圧式化学気相成長装置
用高周波コイルの一実施例の平面図、第２図は従
来装置の断面図である。 Ａ，Ｂ，Ｃ……加熱コイル。

Claims (1)

    【実用新案登録請求の範囲】
  1. 複数本の加熱コイルを同心円状に形成し、各加
    熱コイルを並列接続したことを特徴とする減圧式
    化学気相成長装置用高周波コイル。
JP11519185U 1985-07-29 1985-07-29 Expired JPH0213484Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11519185U JPH0213484Y2 (ja) 1985-07-29 1985-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11519185U JPH0213484Y2 (ja) 1985-07-29 1985-07-29

Publications (2)

Publication Number Publication Date
JPS6223855U true JPS6223855U (ja) 1987-02-13
JPH0213484Y2 JPH0213484Y2 (ja) 1990-04-13

Family

ID=30998609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11519185U Expired JPH0213484Y2 (ja) 1985-07-29 1985-07-29

Country Status (1)

Country Link
JP (1) JPH0213484Y2 (ja)

Also Published As

Publication number Publication date
JPH0213484Y2 (ja) 1990-04-13

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