JPS62238516A - Optical modulator - Google Patents

Optical modulator

Info

Publication number
JPS62238516A
JPS62238516A JP61082528A JP8252886A JPS62238516A JP S62238516 A JPS62238516 A JP S62238516A JP 61082528 A JP61082528 A JP 61082528A JP 8252886 A JP8252886 A JP 8252886A JP S62238516 A JPS62238516 A JP S62238516A
Authority
JP
Japan
Prior art keywords
diffraction grating
grating
refractive index
liquid crystal
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61082528A
Other languages
Japanese (ja)
Inventor
Chiori Mochizuki
千織 望月
Takayuki Ishii
隆之 石井
Tomoyuki Umezawa
梅沢 知幸
Kazuya Ishiwatari
和也 石渡
Yukitoshi Okubo
大久保 幸俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61082528A priority Critical patent/JPS62238516A/en
Publication of JPS62238516A publication Critical patent/JPS62238516A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To easily obtain a grating height of a prescribed quantity, and to satisfactorily display a diffraction effect, by constituting the titled device so that a projecting part and a projecting part, and a recessed part and a recessed part of a diffraction grating part are opposed in parallel to each other and superposed. CONSTITUTION:The titled device is provided with two pieces of substrates 7, 7, a diffraction grating 2 which is placed between these substrates 7, a refractive index variable substance 1 which is packed between grating grooves of this diffraction grating, and a control means for controlling a refractive power of this refractive index variable substance 1. The diffraction grating 2 is constituted of plural diffraction grating parts 20, 21 which have opposed and superposed a projecting part and a projecting part, and a recessed part and a recessed part so that they conform in parallel to each other. In such a way, at the time of executing an optical modulation of a path of light and light-shielding, etc. by utilizing the refractive index variable substance such as a liquid crystal 1, etc. and the diffraction grating 2, height between the projecting and the recessed parts of the diffraction grating 2, and a grating height of about several mum can be secured easily, and also, the adhesion of a transparent electrode 6 and the transparent substrate 7, and the diffraction grating is held satisfactorily, and a drop of a contrast ratio caused by a polarization is prevented.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、光変調装置、特に回折格子と屈折率’iT 
i!i’  ル餉 1fr し t−Ml  ノー ÷
1 キト イ 1、i!  krr  Δ征7T  j
力i  nin  W  /I)Ur!  k丘 (d
を制御することにより入射光に所望の回折現象を生じせ
しめる光変調装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a light modulation device, particularly a diffraction grating and a refractive index 'iT'.
i! i' 1fr t-Ml no ÷
1 Kito i 1, i! krr ΔSei 7T j
Power i nin W /I) Ur! k hill (d
The present invention relates to a light modulation device that produces a desired diffraction phenomenon in incident light by controlling the .

(従来技術) 従来から良く知れれている光変調素子としては、互いに
偏光方向が直交する様に配した一対の偏光板と、この一
対の偏光板間に配され−・対の透明基板の相対する基板
面に互い直交する配向処理を施して液晶を封入した素子
とから成り、この液晶の配向状態をねじれた状態と基板
面に垂直に向いた状態との間でスイッチングを行ない入
射光の変調をする所謂TN(ツウィストネマチック)型
の液晶表示素子がある。この種の表示素子は構成が簡便
で、駆動が容易なことから多岐に亘り利用されているが
、2枚の偏光板を利用して光束の透過及び遮断を行なう
為に消色時、即ち光透過時の透過率が悪く光束利用効率
の面からは好ましい光度:A素子とは言えなかった。
(Prior art) A conventionally well-known light modulation element consists of a pair of polarizing plates arranged so that the polarization directions are perpendicular to each other, and a pair of transparent substrates arranged between the pair of polarizing plates. The device consists of a device in which a liquid crystal is encapsulated with an orientation treatment perpendicular to the substrate surface, and the alignment state of this liquid crystal is switched between a twisted state and a state perpendicular to the substrate surface, thereby modulating the incident light. There is a so-called TN (twisted nematic) type liquid crystal display element that does this. This type of display element has a simple structure and is easy to drive, so it is used in a wide variety of ways. The transmittance during transmission was poor, and it could not be said to be a preferable luminous intensity: A element from the viewpoint of luminous flux utilization efficiency.

又、液晶を利用した同種の表示素子として、液晶分−r
−に色素な況人させて用いる所謂ゲスト・ホストモー1
くの液晶素子があるが、この表示素子に於ても色素か介
在する為に消色時の透過率は良くても75%程度であっ
た。
In addition, as a similar type of display element using liquid crystal, liquid crystal component -r
- So-called guest host mode 1 used as a special person
There are many liquid crystal devices, but even in this display device, the transmittance when decoloring is about 75% at best due to the presence of dye.

一方、特公昭53−3928号公報やUSP4,251
,137等に於て反射型や透過型の位相回折格子と液晶
とを組合わせた表示素子や可変減色フィルター素子が開
示されている。これらで開示されている素子は確かに光
束利用効率は優れているが、特公昭53−3928号公
報に開示されている素子は単なる装飾効果を示すのみで
あり、文字や画像を表示する表示素子や光束の通過、遮
断を行なう光変調素子としては満足出来るものではなか
った。又IJSP4,251,1:17に開示されてい
る可変減色フィルター素子は一対の対向する基板面に互
いに配列方向が直交する様に等方性材料にて回折格子を
形成し、この基板間に液晶を充填して液晶分子の配向状
態な;t、!制御することにより屈折率を変え、回折格
子を成す物質と液晶との屈折率差を変えることで分光透
過率特性を可変にするものであり、光束利用効率に高く
且つ可変減色フィルターとして高性能を有する。
On the other hand, Japanese Patent Publication No. 53-3928 and USP 4,251
, 137, etc., disclose a display element and a variable subtractive color filter element in which a reflective or transmissive phase diffraction grating is combined with a liquid crystal. The elements disclosed in these documents are certainly excellent in luminous flux utilization efficiency, but the element disclosed in Japanese Patent Publication No. 53-3928 merely exhibits a decorative effect, and is not a display element for displaying characters or images. However, it has not been satisfactory as a light modulation element for passing and blocking light beams. In addition, the variable subtractive color filter element disclosed in IJSP 4,251, 1:17 has a diffraction grating made of an isotropic material formed on the surfaces of a pair of opposing substrates so that the alignment directions are orthogonal to each other, and a liquid crystal is placed between the substrates. The alignment state of liquid crystal molecules is filled with ;t,! By controlling the refractive index and changing the difference in refractive index between the material that forms the diffraction grating and the liquid crystal, the spectral transmittance characteristics can be made variable.It has high luminous flux utilization efficiency and high performance as a variable subtractive color filter. have

即ち回折格子の部材の屈折率と液晶との屈折率との差を
Δn、任意の偏向光を持った入射光の波長をλ、回折格
子の凹凸部間の高さである格子基をT、回折格子におけ
る零次透過回折光の回折効率なn。とすると、おおよそ Δn −T ηo=%(1◆cO8(2π・λ))・・・(1)とな
る。 (1)式よりΔn=0のときη。=1゜Δn−T
= (34+m)λ(m=0.1,2,3゜・・・)の
ときη。=0となる。
That is, the difference between the refractive index of the diffraction grating member and the refractive index of the liquid crystal is Δn, the wavelength of the incident light with arbitrary polarization is λ, and the grating base, which is the height between the uneven parts of the diffraction grating, is T. n is the diffraction efficiency of the zero-order transmitted diffracted light in the diffraction grating. Then, approximately Δn −T ηo=%(1◆cO8(2π·λ)) (1). From equation (1), when Δn=0, η. =1゜Δn−T
η when = (34+m)λ (m=0.1, 2, 3°...). =0.

一般に電界により液晶の屈折率を制御して (1)式に
従い入射光を変調させる場合、格子基Tは所望のフィル
ター色を得るために液晶の常屈折率と異常屈折率との差
及び液晶の配向等を考慮すれば数μm程度必要となって
くる。
Generally, when the refractive index of a liquid crystal is controlled by an electric field and the incident light is modulated according to equation (1), the lattice group T is used to determine the difference between the ordinary and extraordinary refractive index of the liquid crystal and the difference between the ordinary and extraordinary refractive index of the liquid crystal in order to obtain the desired filter color. If orientation and other factors are taken into consideration, a thickness of approximately several μm is required.

しかしながら格子基Tを所定量確保する為には例えばフ
ォトレジストにより回折格子を形成する場合、フォトレ
ジストの厚塗りによる塗布ムラを防止する為、2重又は
3重に分けて塗布する必要があり、回折格子製造におい
て余分な工程が必要となってくる。又ポジ型フォトレジ
ストに比べて耐久性の高いネガ型フォトレジストを使用
する場合、露光条件及び現像条件等により格子基Tを所
定量確保するのが大変困難になってくる。
However, in order to secure a predetermined amount of grating groups T, for example, when forming a diffraction grating using photoresist, it is necessary to apply the photoresist in two or three layers to prevent uneven coating due to thick coating. Extra steps are required in diffraction grating manufacture. Furthermore, when using a negative photoresist, which is more durable than a positive photoresist, it becomes very difficult to secure a predetermined amount of lattice groups T depending on exposure conditions, development conditions, etc.

このように従来は回折格子の格子基を所定量確保し、良
好なる回折光を得るのが製造上大変難しく回折格子と液
晶を利用し、光変調を良好に行うのが大変難しかった。
As described above, in the past, it was very difficult to secure a predetermined amount of grating bases for a diffraction grating and obtain good diffracted light, and it was very difficult to perform good optical modulation using a diffraction grating and liquid crystal.

(発明が解決しようとする問題点) 本発明は液晶等の屈折率可変物質と回折格子を利用して
光の通過や遮光等の光変調を行う際、回折格子の凹凸部
間の高さ、所謂格子基を所定量8祐に確保することか出
来、又透明電極や透明基板と回折格子との密着性を良好
に保ち偏光によるコントラスト比の低下を防止した光変
調装置の提供を目的とする。
(Problems to be Solved by the Invention) The present invention solves the problem of the height between the concave and convex portions of the diffraction grating when performing light modulation such as passing light or blocking light using a variable refractive index material such as liquid crystal and a diffraction grating. The object of the present invention is to provide a light modulation device that can secure a predetermined amount of so-called grating bases, and that also maintains good adhesion between a transparent electrode or a transparent substrate and a diffraction grating, and prevents a decrease in contrast ratio due to polarized light. .

(問題点を解決するための手段) 2枚の基板と該基板の間に配置した回折格子と該回折格
子の格子溝の間に充填する屈折率可変物質と該屈折率可
変物質の屈折力を制御する制御下を凸部と凸部モして凹
部と凹部が互いに平行に合致するように対向して重ね合
わせた複数の回折格子部より構成したことである。
(Means for solving the problem) A refractive index variable material filled between two substrates, a diffraction grating disposed between the substrates, and the grating grooves of the diffraction grating, and a refractive power of the refractive index variable material. It is constituted by a plurality of diffraction grating sections which are stacked facing each other so that the convex portions and the concave portions coincide with each other in parallel to each other.

この他、本発明の特徴は実施例において記載されている
Other features of the invention are described in the Examples.

(実施例) 第1図は本発明の一実施例の斜視図、第2図(A)、 
(B)は第1図の動作原理の説明図である。
(Example) Fig. 1 is a perspective view of an embodiment of the present invention, Fig. 2 (A),
(B) is an explanatory diagram of the operating principle of FIG. 1.

図中1は液晶、2は回折格子であり格子ピッチの略等し
い2つの回折格子部20.21を有しており、各々の凸
部と凸部モして凹部と凹部とが互いに平行に合致するよ
うに対向して重ね合わされている。これにより数μm程
度の格子基を得ている。
In the figure, 1 is a liquid crystal, and 2 is a diffraction grating, which has two diffraction grating parts 20 and 21 with approximately equal grating pitches, and each convex part and concave part are aligned parallel to each other. They are stacked facing each other as shown. As a result, a lattice group of approximately several μm is obtained.

又回折格子のパターンはフォトレジストをスピンナー、
ディップ、ロールコーティング等の力”(Aにより’U
 4+され塗布ムラのない均一な平面を得た後、露光及
び現像により作成されている。
In addition, the pattern of the diffraction grating is made by applying photoresist to a spinner.
force such as dipping, roll coating, etc. (A by 'U
After applying 4+ to obtain a uniform flat surface with no uneven coating, it was created by exposure and development.

6はル制御手段の一部を構成する液晶lに電界を印加す
る一対の透明電極、7は透明基板であり、〒→h(:z
nり+117−#1+%Ll−jnc−18#ヒ―!R
atrs+kR?、1M+−1!1.−r−いる。3は
入射光、5.5’、50は出射光である。
6 is a pair of transparent electrodes that apply an electric field to the liquid crystal l constituting a part of the liquid crystal control means; 7 is a transparent substrate; 〒→h(:z
nri+117-#1+%Ll-jnc-18#hi! R
atrs+kR? , 1M+-1!1. -r- I'm here. 3 is the incident light, 5.5', and 50 are the outgoing lights.

第1図に示す光変調装置では透明基板7上に透明電極6
を設け、更にその上に必要に応じて絶縁膜4を設けてい
る。この2つの絶縁1]Q4の間に透明な2つの回折格
子部20.21を挟持している。そして2つの回折格子
部20.21で形成される回折格子2の溝部に液晶1を
充填させている。回折格子2の材料は、その屈折率ng
が液晶1の常屈折率noと略等しくなるように設定して
いる。回折格子2の溝部分には例えば誘電率の異方性が
正のネマチック液晶1が格子溝方向にホモジニアス配向
している。不図示の駆動装置により制御手段の一部であ
る透明電J46間に電界を印加すると液晶の分子構造の
並び方向であるディレクタは電界の向きに並びホメオト
ロピック配向する。
In the light modulation device shown in FIG. 1, a transparent electrode 6 is placed on a transparent substrate 7.
, and an insulating film 4 is further provided thereon as required. Two transparent diffraction grating sections 20 and 21 are sandwiched between these two insulators 1]Q4. Then, the liquid crystal 1 is filled in the groove portion of the diffraction grating 2 formed by the two diffraction grating portions 20 and 21. The material of the diffraction grating 2 has a refractive index ng
is set to be approximately equal to the ordinary refractive index no of the liquid crystal 1. In the groove portion of the diffraction grating 2, for example, a nematic liquid crystal 1 having a positive dielectric constant anisotropy is homogeneously aligned in the direction of the grating groove. When an electric field is applied between the transparent electrodes J46, which are part of the control means, by a driving device (not shown), the director, which is the direction in which the molecular structure of the liquid crystal is arranged, is homeotropically aligned in the direction of the electric field.

第2図(A)、 (11)は第1図の光変調装置におけ
る液晶1と回折格子2から成る格子部材を取り出して示
しており、同図(A)は液晶1に電界な印加しない場合
、同図(ロ)は液晶lに電界を印加した場合である。
Figures 2 (A) and (11) show the grating member consisting of the liquid crystal 1 and the diffraction grating 2 in the light modulation device of Figure 1, and Figure 2 (A) shows the case where no electric field is applied to the liquid crystal 1. , Figure (b) shows the case where an electric field is applied to the liquid crystal l.

同図(八)においては誘電率の異方性が正のネマチック
液晶は回折格子2の溝方向(紙面に垂直方向)と平行に
ホモジニアス配向している。
In the same figure (8), the nematic liquid crystal with positive dielectric anisotropy is homogeneously aligned parallel to the groove direction of the diffraction grating 2 (perpendicular to the plane of the paper).

今、光変調装置8に液晶lのディレクタと同方向(紙面
に垂直方向)に偏光した光31を入射させると、この光
31のうち回折格子2の溝部分を通過した光は液晶1の
異常屈折率n。を感じ、回折格子2の凸部を通過した光
は屈折率ngを感じる。
Now, when light 31 polarized in the same direction as the director of the liquid crystal 1 (perpendicular to the plane of the paper) is incident on the light modulator 8, the light 31 that has passed through the grooves of the diffraction grating 2 will be reflected by the abnormality of the liquid crystal 1. Refractive index n. The light that has passed through the convex portion of the diffraction grating 2 has a refractive index ng.

ここでn g # n eであるから液晶1と回折格子
2より成る格子部材は回折格子としての作用をする。従
って大射光31は回折して出射し、出射光5.5′ と
なる。
Here, since n g # ne, the grating member consisting of the liquid crystal 1 and the diffraction grating 2 acts as a diffraction grating. Therefore, the large emitted light 31 is diffracted and emitted, and becomes emitted light 5.5'.

一方同図(B)の液晶lに電界を印加した場合は液晶1
はホメオトロピック配向する。この為、光変調装置8に
回折格子2の溝方向と同方向(紙面に垂直方向)に偏光
した光31を入射させると、この先31のうち回折格子
2の溝部分を通過した先は液晶1の常屈折率n。を感じ
るようになり、回折格子2の材料の屈折率へ と略等し
くなってくる。このム、液晶1と回折格子2より成る格
子部材は等方体とみなされ入射光31は回折されずにそ
のまま通過し、出射光50となる。
On the other hand, when an electric field is applied to liquid crystal 1 in the same figure (B), liquid crystal 1
is homeotropically oriented. Therefore, when light 31 polarized in the same direction as the groove direction of the diffraction grating 2 (perpendicular to the plane of the paper) is incident on the light modulation device 8, the portion of the light 31 that passes through the groove portion of the diffraction grating 2 is the liquid crystal 1. The ordinary refractive index n. The refractive index becomes almost equal to that of the material of the diffraction grating 2. In this case, the grating member consisting of the liquid crystal 1 and the diffraction grating 2 is regarded as an isotropic body, and the incident light 31 passes through without being diffracted and becomes the emitted light 50.

このように本実施例では光31を液晶1に印加する電界
を制御することにより透過及び不透過の光変調を電気的
に行っている。
As described above, in this embodiment, by controlling the electric field that applies the light 31 to the liquid crystal 1, light modulation of transmission and non-transmission is performed electrically.

又2つの回折格子部20.21を用いることにより所定
量の格子高を容易に得ることにより回折効果を良好に発
揮させ光変調を良好に行っている。
Further, by using the two diffraction grating sections 20 and 21, a predetermined grating height can be easily obtained, thereby achieving a good diffraction effect and performing optical modulation well.

した場合である。This is the case.

尚木実h’h例において光変調装置8に液晶1のディレ
クタと直交する方向(紙面に平行方向)に偏光して入射
する光32のうち回折格子2の溝部分を通過する光は液
晶1に電界を印加する簡抜でいずれも液晶lの常屈折率
n。を感じる。
In the example, out of the light 32 that is polarized and incident on the light modulator 8 in a direction perpendicular to the director of the liquid crystal 1 (parallel to the plane of the paper), the light that passes through the grooves of the diffraction grating 2 is the liquid crystal 1. In both cases, the ordinary refractive index n of the liquid crystal l is applied. I feel it.

回折格子の部材の屈折率はngで一定であり、n g 
=n gとなるように構成しているから光32に対する
回折格子2は回折格子として作用せず、光32は液晶l
への電界の印加の前後において、いずれも回折されずに
、光変調装置8からそのまま出射光50として通過する
The refractive index of the member of the diffraction grating is constant n g
= n g, the diffraction grating 2 for the light 32 does not act as a diffraction grating, and the light 32 is transmitted through the liquid crystal l
Before and after the electric field is applied to the light, the light passes through the light modulation device 8 as it is without being diffracted.

(発明の効果) 本発明によれば液晶と回折格子を利用して光変調を行う
際、回折格子を2つの略同ピッチの凹凸部を有する回折
格子部を該回折格子部の凸部と凸部モして凹部と凹部と
が互いに平行となるように対向して重ね合わせて構成す
ることにより数μm程度の回折格子の格子高を容易に得
ることが出来、回折効果を良好に発揮させた光変調装置
を達成することが出来る。
(Effects of the Invention) According to the present invention, when performing light modulation using a liquid crystal and a diffraction grating, the diffraction grating is connected to a convex portion of the diffraction grating portion having two concave and convex portions having approximately the same pitch. By configuring the grating in such a way that the concave portions face each other and overlap each other so that they are parallel to each other, it is possible to easily obtain a grating height of about several μm, and the diffraction effect is exhibited well. A light modulation device can be achieved.

又本発明によれば絶縁膜や透明電極等の基板は回折格r
−と密着しており回折格子部は基板に比べて柔軟性があ
る為、2つの回折格子部を重ね合わせる際、回折格子の
ない基板と回折格子のある基板とを「[ね合わせる場合
に比べて密着しやすい。
Further, according to the present invention, the substrate such as the insulating film and the transparent electrode has a diffraction grating r.
-, and the diffraction grating part is more flexible than the substrate, so when overlapping two diffraction grating parts, the substrate without the diffraction grating and the substrate with the diffraction grating are Easy to adhere to.

この為従来から問題であった基板と回折格子の凸部との
間における液晶の配向の乱れによるコントラストの低下
を良好に防止した高品位の光変調装置を達成することが
できる。
Therefore, it is possible to achieve a high-quality optical modulation device that satisfactorily prevents a decrease in contrast due to disordered alignment of liquid crystal between the substrate and the convex portion of the diffraction grating, which has been a problem in the past.

尚、本実施例に於ては透過型の光変調素子を示している
か、例えば一方の基板に光反射膜を施して反射型の素子
とすることも可能である。但し、反射型の場合、素子内
に於る回折光の挙動が複雑となる為、設計や実際の表示
素子等の応用面を考慮すれば、本発明では透過型の光変
調素子とするのが望ましい。この場合は、当然の事なが
ら、回折格子、屈折率可変物質、及び基板等は使用波長
に対して透過性を有する部材を用いる。
Although this embodiment shows a transmissive light modulation element, it is also possible to provide a reflective element by applying a light reflecting film to one of the substrates, for example. However, in the case of a reflective type, the behavior of diffracted light within the element becomes complicated, so in consideration of the design and application of actual display elements, it is preferable to use a transmissive type light modulation element in the present invention. desirable. In this case, as a matter of course, the diffraction grating, the refractive index variable material, the substrate, etc. are made of members that are transparent to the wavelength used.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の−・実施例の斜視図、第2図(A)、
 (B)は第1図の光変調装置の動作の説明図である。 図中8は光変調装置、1は液晶、2は回折格子、 20
.21は各々回折格子部、3は入射光、4は絶縁膜、5
.5’、50は出射光、6は透明電極、7は透明基板で
ある。 図面の浄書(内容に変更なし) 手続ネ甫正書(方式) %式% 16  事件の表示                
     冶り住所 東京都大田区下丸子3−30−2
名称 (Ion)  キャノン株式会社代表者 賀  
来  龍 三 部 4、代理人 居所 〒158東京都計田谷区奥沢2−17−3ベルハ
イム自由が丘301 号(電話718−56目)昭和6
1年6月240(発送[り 6、補正の対象 (1)願書に添付した図面 7、補正の内容 (1)願−Fに添付した全図面を別紙のとおり補正する
。 (内容に変更なし)
FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 (A),
(B) is an explanatory diagram of the operation of the optical modulation device of FIG. 1. In the figure, 8 is a light modulation device, 1 is a liquid crystal, 2 is a diffraction grating, 20
.. 21 is a diffraction grating portion, 3 is incident light, 4 is an insulating film, 5
.. 5' and 50 are emitted light, 6 is a transparent electrode, and 7 is a transparent substrate. Engraving of drawings (no change in content) Procedural engraving (method) % formula % 16 Indication of incident
Address: 3-30-2 Shimomaruko, Ota-ku, Tokyo
Name (Ion) Canon Co., Ltd. Representative Ka
Ryu 3 Part 4, Agent address: 301 Jiyugaoka, Belheim, 2-17-3 Okusawa, Kaetaya-ku, Tokyo 158 (Telephone: 718-56) Showa 6
June 1, 2015 240 (Despatch [6, Subject of amendment (1) Drawing 7 attached to the application, contents of amendment (1) All drawings attached to application-F will be amended as shown in the attached sheet. (No change in contents. )

Claims (1)

【特許請求の範囲】 2枚の基板と該基板の間に配置した回折格子と該回折格
子の格子溝の間に充填する屈折率可変物質と該屈折率可
変物質の屈折力を制御する制御手段とを有した光変調装
置において、前記回折格子を凸部と凸部そして凹部と凹
部が互いに平行に合致するように対向して重ね合わせた
複数の回折格子部より構成したことを特徴とする光変調
装置。 (2)前記屈折率可変物質が液晶であることを特徴とす
る特許請求の範囲第1項記載の光変調装置。 (3)前記基板と前記屈折率可変物質が使用波長に対し
て透明であることを特徴とする特許請求の範囲第1項記
載の光変調装置。
[Claims] Two substrates, a diffraction grating disposed between the substrates, a refractive index variable material filled between the grating grooves of the diffraction grating, and a control means for controlling the refractive power of the refractive index variable material. an optical modulator, characterized in that the diffraction grating is constituted by a plurality of diffraction grating parts stacked facing each other so that the convex parts and the concave parts coincide with each other in parallel. Modulator. (2) The light modulation device according to claim 1, wherein the refractive index variable material is a liquid crystal. (3) The light modulation device according to claim 1, wherein the substrate and the variable refractive index material are transparent to the wavelength used.
JP61082528A 1986-04-10 1986-04-10 Optical modulator Pending JPS62238516A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61082528A JPS62238516A (en) 1986-04-10 1986-04-10 Optical modulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61082528A JPS62238516A (en) 1986-04-10 1986-04-10 Optical modulator

Publications (1)

Publication Number Publication Date
JPS62238516A true JPS62238516A (en) 1987-10-19

Family

ID=13777012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61082528A Pending JPS62238516A (en) 1986-04-10 1986-04-10 Optical modulator

Country Status (1)

Country Link
JP (1) JPS62238516A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002372611A (en) * 2001-06-15 2002-12-26 Asahi Glass Co Ltd Diffraction element and optical head device
JP2006259264A (en) * 2005-03-17 2006-09-28 New Industry Research Organization Manufacturing method for x-ray phase type diffraction grating and amplitude type diffraction grating used for x-ray talbot interferometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002372611A (en) * 2001-06-15 2002-12-26 Asahi Glass Co Ltd Diffraction element and optical head device
JP2006259264A (en) * 2005-03-17 2006-09-28 New Industry Research Organization Manufacturing method for x-ray phase type diffraction grating and amplitude type diffraction grating used for x-ray talbot interferometer
JP4608679B2 (en) * 2005-03-17 2011-01-12 財団法人新産業創造研究機構 Manufacturing method of phase type diffraction grating and amplitude type diffraction grating used in X-ray Talbot interferometer

Similar Documents

Publication Publication Date Title
US20210109404A1 (en) Device for combining light beams which interact with adjacently arranged pixels of a light modulator
US5148302A (en) Optical modulation element having two-dimensional phase type diffraction grating
KR100263210B1 (en) Polarisation Independent Optical Phase Modulator
US20050002101A1 (en) Dynamically controllable light modulator using phase diffraction grating and display using the same
JPS62238516A (en) Optical modulator
JP3412775B2 (en) Liquid crystal element
JP2517589B2 (en) Light modulation element
JPH0652351B2 (en) Light modulator
JPS62238520A (en) Optical modulator
JPS62238519A (en) Optical modulator
JPS63250621A (en) Optical modulation element
JPS62238517A (en) Optical modulator
JPS62238521A (en) Optical modulator
JPS62235924A (en) Optical modulation element
JPS62237425A (en) Light modulating element
JPH0776815B2 (en) Light modulator
JPH0652353B2 (en) Light modulator
JPS62237424A (en) Light modulating element
JPS62238523A (en) Optical modulator
JPS63281129A (en) Optical modulator
JPS62238524A (en) Optical modulator
JPH0776814B2 (en) Light modulator
JPH0584487B2 (en)
JPS6338918A (en) Liquid crystal optical modulator
JPS62238518A (en) Optical modulator