JPS6223492A - Controller for air shower chamber - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an air shower room control device that prevents dust from entering a clean room.

BACKGROUND OF THE INVENTION In recent years, industrial clean rooms and bio-clean rooms are required to have a high cleanliness level of class 1 or lower.

To achieve this, the importance of air shower rooms that remove as much dust as possible from those entering the clean room has become extremely important.

A conventional air shower room control device will be explained below.

In FIGS. 2 and 3, an air shower room 1 is provided adjacent to a clean room 2. In FIG.

These rooms are separated by an air shower room entry/exit door 5. The air chamber 1 is provided with a blowout nozzle 9 on the upper side thereof. In order to send clean air to this blow-off nozzle 9, an air supply fan 8 passes through an air supply duct 7 to
It is connected to an EPA filter 10. The air in the air shower room 1 is then sent into an exhaust duct 14 connected to an exhaust fan 12 via a mesh floor plate 11 disposed at the bottom of the air shower room 1. A cleanliness sampling tube 13 is connected to the exhaust duct 14, and air from this tube 13 is measured by a cleanliness measuring device 15. This measurement result is sent to the air shower room control device 3. This air shower room control device 3 has a door 4 for entering and exiting the air shower room.
A signal for opening the air supply fan 8. exhaust fan 1
The supply air fan 8 and the exhaust fan 12 are operated by the operation start means 1 of 2. In addition, the cleanliness measuring means 18 compares the measured cleanliness value with the cleanliness set value, and
When it is determined that the shower room 1 has been purified to a level higher than the cleanliness setting value, the air supply fan 8 and the exhaust fan 12 are stopped by the stop means 19. Then, an operation command for the clean room entrance/exit door 5 is outputted to the fan actuating device 6 by the clean room entrance/exit non-operation command means 20, and the clean room entrance/exit door 5 is opened.

Problems to be Solved by the Invention However, in the conventional configuration, once the occupant is cleansed by the air shower, the person entering the clean room is allowed to enter the clean room and the door 5 is opened. There was a problem in that the dust generated when the user started walking was brought into the clean room 2.

The present invention solves these problems and provides an air shower room control device that does not allow dust generated in the air shower room 1 to enter the clean room 2 after the clean room entrance/exit boundary 5 is opened. be.

Means for Solving the Problems In order to solve the above problems, the air shower room control device of the present invention includes an air supply fan/exhaust fan operation start means that operates in conjunction with the opening operation of the air shower room entrance/exit door. a cleanliness determining means for outputting a signal when the dust concentration in the exhaust duct of the air seven tower room is below a predetermined value; and an air supply fan stopping means for receiving the signal from the cleanliness determining means and outputting it to the air supply fan. , clean room entry/exit deactivation command means for outputting a signal from the air supply fan stopping means to a door operating device to open the clean room entry/exit door; and an exhaust fan for stopping the exhaust fan in response to an operation end signal of the door operating device. It consists of a stopping means.

Effect of the present invention With the above-described configuration, when the air supply fan/exhaust fan operation start means operates the air supply fan and the exhaust fan, and then the cleanliness determination means determines that the inside of the air chamber has been purified. The air supply fan is stopped by the air supply fan stop means, and the door operating device is activated by the clean room entry/exit non-operation command means to open the clean room entry/exit door.

The exhaust fan continues to operate even if the supply fan stops.
It will stop after the closing operation of the clean room entrance/exit area is completed by the operating device.

EXAMPLE Hereinafter, an example of the present invention will be described based on FIG. Note that the same reference numerals are used for the same components as in the conventional example, and the description thereof will be omitted.

In the figure, an air shower room control device 21 receives a signal for opening the air shower room entry/exit door 4, and starts air supply fan/exhaust fan operation starting means 22 for operating the air supply fan 8 and exhaust fan 12. Cleanliness determination means 23 that compares and determines the cleanliness measurement value from the cleanliness measuring device 15 and the cleanliness set value.
．． Air supply fan stop means 2 which receives a signal output from cleanliness determination means 23 and stops the air supply fan when the occupant in the air shower room 1 is purified to a level higher than the cleanliness setting value.
4. Clean room entry/exit non-operation command means 25 for receiving the signal from the air supply fan stop means 24 and outputting it to the door operating device. The exhaust fan stop means 26 inputs an operation end signal from the door operating device and outputs it to the exhaust fan 12.

With the above configuration, when a person enters the air shower room 1 through the air shower room entrance/exit door 4 and closes the air shower room entrance/exit door 4, the air supply fan 8 is activated by the air supply fan/exhaust fan operation start means 22. Then, the exhaust fan 12 starts operating.

Shower air is passed through the air supply duct 7 by the air supply fan 8, purified by the HEPA filter 10, and then blown into the air shower room 1 from the blow-off nozzle 9.

The shower air that has blown away dust from the occupants is exhausted to the outside through an exhaust duct 14 by an exhaust fan 12.

Exhausted shower air is sampled from the cleanliness sampling tube 13, its cleanliness is measured by a cleanliness measuring device, and the measured cleanliness value is input to the air shower room control device 21. When the air shower room control device 21 determines by the cleanliness determination means 23 that the air shower room 1 in which the occupant is present has been purified to a level higher than the cleanliness setting value, the air supply fan 8 is stopped by the air supply fan stop means 24. . Air supply fan 8
When the clean room entrance/exit door operation command means 25 stops,
The door operating device 6 is activated, and the clean room entrance/exit door 5 is opened.

When the clean room entry/exit door 5 opens, the occupants in the air shower room 1 start moving toward the clean room 2, but the dust generated in the air shower room 1 during movement is removed because the exhaust fan 12 is in operation. , is sucked into the exhaust duct 14 and removed from the air shower room 1. the result,
The above dust can be prevented from being brought into the clean room 2.

When a person enters the clean room 2, the clean room entry/exit door 5 is closed, and the door operating device 6 outputs an operation end signal to the air shower room control device 21. The air shower room control device 21 that receives the operation end signal causes the exhaust fan 12 to be stopped by the exhaust fan stop means 26.

In addition to the effects of the invention, as is clear from the examples, the present invention has the advantage that the exhaust fan continues to operate while the occupant is moving into the air shower room, so the problem occurs when the occupant moves from the air shower room toward the clean room. It is possible to prevent dust from entering the clean room.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing an air shower control device according to an embodiment of the present invention, FIG. 2 is a block diagram showing a conventional air shower control device, and FIG. 3 is a sectional view of a room in an air Java. 1...Air shower room, 4...Air shower room entrance/exit door, 6...Door operating device, 8...
...Air supply fan, 12...Exhaust fan, 2
1... Air shower room control device, 22...
...Yuki fan/exhaust fan operation start means, 23...
... Cleanliness measuring means, 24 ... Air supply fan stopping means, 25 ... Clean room entrance/exit door operation command means, 26 ... Exhaust fan stopping means. Name of agent: Patent attorney Toshio Nakao and 1 other person
1 Figure 1 --- l Ah Shower Lord

Claims (1)

[Claims] An air supply fan that sends clean air into the air shower room, an exhaust fan that exhausts air from the air shower room through an exhaust duct, an air shower room entrance/exit door for entering and exiting the air shower room, and a door from the air shower room to the clean room. It is equipped with a clean room entrance/exit door for entering and exiting, and an air shower room control device that controls the cleanliness of the air shower room or the opening/closing of the door. and an air supply fan/exhaust fan operation start means for activating the exhaust fan; a cleanliness determination means for measuring the dust concentration in the exhaust duct and determining the cleanliness level; an air supply fan stop means that stops the air supply fan when it is determined that the air supply fan stops; and an output from the air supply fan stop means that outputs an output to a door operating device that opens and closes the door when the air supply fan stops, causing the door to be opened. An air shower room control device comprising a clean room entry/exit door operation command means and an exhaust fan stop means for stopping the exhaust fan upon receiving an operation end signal of the door operation device.