JPS62234223A - Thin film magnetic head slider and its production - Google Patents
Thin film magnetic head slider and its productionInfo
- Publication number
- JPS62234223A JPS62234223A JP7657886A JP7657886A JPS62234223A JP S62234223 A JPS62234223 A JP S62234223A JP 7657886 A JP7657886 A JP 7657886A JP 7657886 A JP7657886 A JP 7657886A JP S62234223 A JPS62234223 A JP S62234223A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- magnetic disk
- magnetic head
- thin film
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000463 material Substances 0.000 claims abstract description 16
- 239000000843 powder Substances 0.000 claims abstract description 8
- 238000010304 firing Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 6
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 229920001568 phenolic resin Polymers 0.000 claims description 4
- 239000005011 phenolic resin Substances 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 2
- 239000005416 organic matter Substances 0.000 claims 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 32
- 239000013078 crystal Substances 0.000 abstract description 8
- 239000000428 dust Substances 0.000 abstract description 4
- 239000002245 particle Substances 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 2
- 239000000314 lubricant Substances 0.000 abstract description 2
- 238000005245 sintering Methods 0.000 abstract description 2
- 239000011148 porous material Substances 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気ディスク装置用の薄膜磁気ヘッドスライダ
に係り、特に磁気ディスクの寿命を向上させるスライダ
とその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a thin-film magnetic head slider for a magnetic disk device, and more particularly to a slider and a method for manufacturing the same that improve the life of a magnetic disk.
磁気ディスク記憶装置の分野においては、増大する高記
録密度化の要請に応えるために磁気ディスクと磁気ヘッ
ドの浮上隙間の狭小化が進み、また磁気特性がよい薄膜
磁気ヘッドや薄膜ディスクの実用化が検討されている。In the field of magnetic disk storage devices, the flying gap between a magnetic disk and a magnetic head is becoming narrower in order to meet the increasing demand for higher recording densities, and thin-film magnetic heads and thin-film disks with better magnetic properties are being put into practical use. It is being considered.
薄膜磁気ヘッド・スライダはその端面に薄膜素子が設け
られて磁気ディスク表面に接して保持され、扁速回転す
る磁気ディスク表面に生じる空気流によって磁気ディス
ク面上に浮上する機能を有する。したがって、スライダ
は、磁気ディスク回転の起動・停止時には過渡的に磁気
ディスクと摺動する。さらに、浮上隙間の狭小化（０，
１〜０．３ μｍ）によってスライダと磁気ディスクの
予期しない接触、摺動の機会がますます多くなる。A thin-film magnetic head slider has a thin-film element provided on its end face and is held in contact with the surface of a magnetic disk, and has the function of floating above the magnetic disk surface by an air flow generated on the surface of the magnetic disk rotating at a flat speed. Therefore, the slider slides transiently on the magnetic disk when starting and stopping rotation of the magnetic disk. Furthermore, the levitation gap is narrowed (0,
1 to 0.3 μm), the chances of unexpected contact and sliding between the slider and the magnetic disk increase.
このため、スライダの接触、摺動によって受ける磁気デ
ィスクの損傷が問題となっている。特に、薄膜ディスク
の場合には大きな問題となる。すなわち、薄膜ディスク
の磁性量の厚さは極めて小さい（０，０５〜０．１μｍ
）ので、許容される損傷の大きさは極めて小さくなる。For this reason, damage to the magnetic disk caused by contact and sliding of the slider has become a problem. This is especially a big problem in the case of thin film disks. In other words, the magnetic thickness of the thin film disk is extremely small (0.05 to 0.1 μm).
), the amount of damage allowed is extremely small.
このため、スライダとしては、磁気ディスクに損傷を与
えないものが強く望まれている。For this reason, there is a strong desire for a slider that does not damage the magnetic disk.
従来のスライダとしては１代表的には特公昭５８−５４
７０号公報に開示されたＡ Ｑ ｚ○ａ／ＴｉＣ焼結体
がある。 Ａ Ｑ ２０３／ Ｔ ｉ Ｃ焼結体は加工
性がよく、薄膜磁気ヘッドを歩留りよく加工製造するに
は好適であるが、前述の磁気ディスクに与える損傷に関
しては必ずしも満足のいく材料ではなかった。A typical example of a conventional slider is the Tokko Kokoku 1985-1985 slider.
There is an A Q z○a/TiC sintered body disclosed in Publication No. 70. Although the AQ 203/T i C sintered body has good workability and is suitable for processing and manufacturing thin film magnetic heads with high yield, it is not necessarily a satisfactory material in terms of the damage caused to the magnetic disk.
この問題を解決するために、例えば特開昭５８−１５０
１２２号公報に開示された方法が提案されている。In order to solve this problem, for example,
A method disclosed in Japanese Patent No. 122 has been proposed.
これは、スライダの磁気ディスクとの摺動面に、Ｍ ｏ
Ｓ ｚ ＋ Ｃ等の潤滑性物質をコートする方法であ
る。潤滑性物質のコーティングによって確かに磁気ディ
スクの寿命は向上する。しかし薄くコートしたのでは効
果が長続きせず、逆に厚くコートしたのでは実質的な浮
上空隙が大きくなるので、記録密度を向上する上で不利
である。This is because M o
This is a method of coating with a lubricating substance such as S z +C. Coating with lubricating material certainly improves the lifespan of magnetic disks. However, if it is coated thinly, the effect will not last long, and if it is coated thickly, the effective floating gap will become larger, which is disadvantageous in improving the recording density.
一方、それ自体が磁気ディスクに与える損傷が少ないス
ライダとしては、例えば特開昭５８−１２１１７９号公
報に開示されたＺｒＯ２焼結体が提案されている。この
材料は確かに接触、摺動によって磁気ディスクに与える
損傷が小さくなっている。On the other hand, as a slider which itself causes less damage to the magnetic disk, a ZrO2 sintered body disclosed in, for example, Japanese Patent Application Laid-Open No. 121179/1982 has been proposed. This material certainly reduces the damage caused to magnetic disks by contact and sliding.
しかしながら、スライダの微小な浮上隙間を保った長期
の連続運転においては、磁気ディスクの寿命は必らずし
も十分なものではなかった。However, in long-term continuous operation while maintaining a small flying clearance of the slider, the life of the magnetic disk is not necessarily sufficient.
以上述べたように、従来のスライダでは磁気ディスクの
寿命に問題があった。すなわち、スライダの磁気ディス
ク摺動面に潤滑膜をコートする方法は、磁気ディスクの
長寿命化と高記録密度化の両立が困難である。一方、摺
動性に改善が見られるＺｒＯ２焼結体を用いた場合でも
、実用においては必ずしも十分な磁気ディスクの寿命が
得られない。これは、ＺｒＯ２焼結体が電気絶縁体であ
るために、静電引力によって大気中塵埃が付着し。As described above, conventional sliders have had problems with the lifespan of the magnetic disk. That is, the method of coating the sliding surface of the magnetic disk of the slider with a lubricating film has difficulty achieving both a long life of the magnetic disk and a high recording density. On the other hand, even when a ZrO2 sintered body with improved sliding properties is used, a sufficient life of the magnetic disk cannot necessarily be obtained in practical use. This is because the ZrO2 sintered body is an electrical insulator, so dust in the atmosphere adheres to it due to electrostatic attraction.
これが浮上中のスライダと磁気ディスクの予期しない接
触を引き起し、スライダと磁気ディスクの接触頻度が大
きくなるためである。This is because this causes unexpected contact between the flying slider and the magnetic disk, increasing the frequency of contact between the slider and the magnetic disk.
本発明の目的は、浮上空隙の狭小化ができ、かつ長期に
わたって磁気ディスクに損傷を与えない薄膜磁気ヘッド
用スライダを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a slider for a thin film magnetic head that can reduce the flying gap and does not damage a magnetic disk over a long period of time.
上記目的を達成するために、本発明者らは、ＺｒＯ２焼
結体に導電性を付与する努力を重ね。In order to achieve the above object, the present inventors have made repeated efforts to impart electrical conductivity to ZrO2 sintered bodies.
本発明をなすに至った。すなわち、スライダ材料の内部
に少なくともＣを含む結晶粒界相を内在させることによ
り上記目的を達成できることを見出した。The present invention has been accomplished. That is, it has been found that the above object can be achieved by including a grain boundary phase containing at least C inside the slider material.
以下に本発明を詳細に述べる。 The present invention will be described in detail below.
本発明の目的を達成するために、スライダ材料の母材と
してはＺｒ０ｚを用いる０本発明者らは、Ｃを添加した
ＺｒＯ２の焼成において、適度な焼成温度とＣ含有量、
及び焼成雰囲気を選ぶことによりＣを含む相が結晶粒界
に生成され、しかも内部に気孔を含まない焼結体が得ら
れることを見出し本発明に至った。すなわち焼成温度が
１６５０℃未満では、いかなるＣ含有量に対しても前記
結晶粒界相は生じないので、焼成温度は１６５０℃以上
であることが必要である。逆に焼成温度が２０００℃を
越えては、焼結体の結晶粒が極めて大きくなるため、加
工によって生じるチッピングが大きくなり好ましくなく
、焼成コストの上からも問題がある。なお、チッピング
の問題を防ぐためには、結晶粒径は５μｍ以下であるこ
とが必要である。したがって焼成温度は１６５０℃〜２
０００℃がよい。In order to achieve the object of the present invention, the present inventors used ZrOz as the base material of the slider material.In the firing of ZrO2 with added C, the present inventors set an appropriate firing temperature, C content,
The present inventors have discovered that by selecting the firing atmosphere, a phase containing C can be generated at the grain boundaries, and a sintered body containing no internal pores can be obtained, leading to the present invention. That is, if the firing temperature is less than 1650°C, the grain boundary phase will not occur regardless of the C content, so the firing temperature needs to be 1650°C or higher. On the other hand, if the firing temperature exceeds 2000° C., the crystal grains of the sintered body become extremely large, which is undesirable because chipping caused by processing becomes large, and there is also a problem in terms of firing cost. Note that in order to prevent the problem of chipping, the crystal grain size needs to be 5 μm or less. Therefore, the firing temperature is 1650℃~2
000°C is good.
一方、Ｃ含有量が０．２重量％未満ではＣの一部または
大半はＺｒ０ｚと反応しＺｒＣ結晶粒を生じてしまうの
で効果はなく、前記結晶粒界相を生じるためには０．２
重量％以上のＣ含有量が必要である。逆にＣ含有量が２
重量％を越えると。On the other hand, if the C content is less than 0.2% by weight, some or most of the C will react with Zr0z and produce ZrC grains, so there will be no effect.
A C content of at least % by weight is required. On the other hand, if the C content is 2
If it exceeds the weight%.
ＣはＺｒ０ｉの焼結を著しく妨げるため、焼結体内部に
気孔が残ってしまい、スライダの如き精密加工が必要な
材料として好ましくない、したがって、Ｃ含有量は０．
２〜２重量％がよい、また。Since C significantly hinders the sintering of ZrOi, pores remain inside the sintered body, making it undesirable as a material that requires precision processing such as a slider. Therefore, the C content is 0.
2 to 2% by weight is also good.
焼成雰囲気が酸化性の場合には、添加したＣはＣＯない
しＣＯｚガスとなって離散するため、焼成雰囲気は非酸
化性であることが必要である。If the firing atmosphere is oxidizing, the added C becomes CO or COz gas and disperses, so the firing atmosphere needs to be non-oxidizing.
スライダ材の微視的な均一性を得るためにはＣを含む相
を結晶粒界に均一に生成せしめるのがよい。このために
は焼成前に、ＣとＺｒＯ２粉末を極めて均一に混合しな
ければならない。このためには熱分解してＣを生じる有
機物を適当な溶媒に溶かして、ＺｒＯ２粉末と混合する
のが望ましい。In order to obtain microscopic uniformity of the slider material, it is preferable to uniformly generate a phase containing C at the grain boundaries. For this purpose, the C and ZrO2 powders must be mixed very uniformly before firing. For this purpose, it is desirable to dissolve the organic substance that generates C by thermal decomposition in a suitable solvent and mix it with the ZrO2 powder.
生成したＣを含有相は、導電性を有するために、この相
が結晶粒界に存在することによって、焼結体全体が導電
性を有するようになる。・この結果、スライダの帯電が
防止されるので、静電引力によるスライダへの大気中の
塵埃付着が減少する。スライダへの塵埃付着は、浮上中
のスライダの浮上安定性を乱し、スライダとディスクの
予期しない接触を引き起す最も大きな原因の一つである
。したがって、スライダの導電性によって磁気ディスク
の運転寿命を長くすることができる。このためには電気
抵抗率は１０”Ωｃ＋ｍ以下であることが望ましい。Since the generated C-containing phase has electrical conductivity, the presence of this phase at the grain boundaries makes the entire sintered body electrically conductive. - As a result, since the slider is prevented from being charged, the adhesion of atmospheric dust to the slider due to electrostatic attraction is reduced. Dust adhering to the slider is one of the biggest causes of disturbing the flying stability of the slider during flight and causing unexpected contact between the slider and the disk. Therefore, the electrical conductivity of the slider can extend the operating life of the magnetic disk. For this purpose, it is desirable that the electrical resistivity is 10''Ωc+m or less.
本発明においては、Ｃを含む相の少なくとも一部は非晶
質にすることができる。このことは、次の利点を有する
。すなわち、Ｃを含む非晶質相は。In the present invention, at least a portion of the C-containing phase can be made amorphous. This has the following advantages. That is, an amorphous phase containing C.
母材のＺｒＯ２結晶と比べて機械的強度が弱いため、摺
動によって優先的に摩耗する。この結果、磁気ディスク
との摺動によってスライダの摺動面に極めて微細なＣの
摩耗粉が介在するようになり、これが潤滑材となって摺
動特性を一層向上するのである。また、非晶質相の存在
は、スライダの硬度を軟かくするために、接触による磁
気ディスクの損傷がより小さくなる。Since its mechanical strength is weaker than that of the base material ZrO2 crystal, it is preferentially worn out by sliding. As a result, extremely fine C wear particles become present on the sliding surface of the slider due to sliding with the magnetic disk, which acts as a lubricant and further improves the sliding characteristics. Furthermore, the presence of the amorphous phase softens the hardness of the slider, so that damage to the magnetic disk due to contact becomes smaller.
〔実施例〕
以下に本発明を実施例によりさらに詳細に説明゛するが
、本発明はこれら実施例に限定されない。[Examples] The present invention will be explained in more detail with reference to Examples below, but the present invention is not limited to these Examples.
実施例１
粉粒径が０．１μｍのＺｒＯ２粉末（但し、８ｍｏＱ％
のＹ２Ｏ３が固溶したもの）に対し、０゜０．２，０，
４，２．０，４．０，５．０重量％のノボラック・フェ
ノール樹脂をアセトンに溶かして添加し、ボールミルに
よって４８時間混練した。Example 1 ZrO2 powder with a particle size of 0.1 μm (however, 8moQ%
of Y2O3 in solid solution), 0°0.2,0,
4, 2.0, 4.0, 5.0% by weight of novolak phenolic resin dissolved in acetone was added and kneaded for 48 hours using a ball mill.
ノボラック・フェノール樹脂は熱分解によって添加量の
約５０重量％のＣを生じる。得た混合物は乾燥後、金型
で圧粉成形し、ホットプレス焼成に供した。ホットプレ
ス焼成は、試料を黒鉛型に装填し、１０′−４ＴＯｒｒ
の真空雰囲気中で黒鉛型を高周波誘導加熱しつつ、黒鉛
型に油圧プレスで荷重をかけ試料を５００ ｋ ｇｆ／
ｃ＋ｓ”の圧力で圧縮して行った。焼成は１８００℃で
１時間行った。The novolac phenolic resin yields about 50% by weight of C by thermal decomposition. The obtained mixture was dried, compacted in a mold, and subjected to hot press firing. For hot press firing, the sample is loaded into a graphite mold and heated to 10'-4 TOrr.
While the graphite mold was heated by high frequency induction in a vacuum atmosphere, a load was applied to the graphite mold with a hydraulic press and the sample was heated to 500 kg gf/
It was compressed at a pressure of "c+s". Firing was performed at 1800° C. for 1 hour.
こうして得た焼結体は、まず、Ｃの含有量を分析した。The sintered body thus obtained was first analyzed for C content.
次に電子顕微鏡を用いて焼結体の微構造をＩＩ！察した
。さらに焼結体はラップ盤で表面を研磨して顕微鏡で観
察し、気孔の有無を調べた。また電気抵抗率を測定した
。第１表はこれらの結果を示したものである。電子顕微
鏡による観察においては、結晶粒界相でのＣの有無はエ
ネルギ・ロス測定法で調べ、結晶粒界相の結晶性は、回
折パターン１１察におけるハロー現象の有無によって調
べた。Next, we used an electron microscope to examine the microstructure of the sintered body II! I guessed it. Furthermore, the surface of the sintered body was polished with a lapping machine and observed under a microscope to check for the presence of pores. The electrical resistivity was also measured. Table 1 shows these results. In observation using an electron microscope, the presence or absence of C in the grain boundary phase was determined by an energy loss measurement method, and the crystallinity of the grain boundary phase was determined by the presence or absence of a halo phenomenon in the diffraction pattern 11.
第１表より、０．２重量％以上のＣを含む本発明品（試
料番号２，３．４）ではＣを含む粒界相が存在すること
がわかる。また、この粒界相の生成によって焼結体の電
気抵抗率が著しく低下することがわかる。一方、２重量
％以下のＣを含む本発明品では気孔が見られないのに対
し、２．５重量％のＣを含む焼結体（試料番号６）では
、気孔が存在している。気孔が存在することの焼結体は
一定の加工条件でスライダ形状に加工を試みたところ、
欠けや穴が多数発生し、スライダとして不適当であった
、
生成した粒界相には、電子顕微鏡による観察の結果、Ｃ
を含む非晶質相が認められた。From Table 1, it can be seen that grain boundary phases containing C exist in the products of the present invention (sample numbers 2 and 3.4) containing 0.2% by weight or more of C. It is also seen that the electrical resistivity of the sintered body is significantly reduced due to the formation of this grain boundary phase. On the other hand, in the product of the present invention containing 2% by weight or less of C, no pores are observed, whereas in the sintered body (sample number 6) containing 2.5% by weight of C, pores are present. When a sintered body with pores was processed into a slider shape under certain processing conditions,
Many chips and holes occurred, making it unsuitable for use as a slider.As a result of observation using an electron microscope, the produced grain boundary phase contained C.
An amorphous phase containing .
第１図は１本発明によるＺｒＯ２焼結体の典型的な破面
の走査型電子顕微鏡写真である。ＺｒＯ２結晶粒の間に
Ｃを含む粒界相が認められる。FIG. 1 is a scanning electron micrograph of a typical fracture surface of a ZrO2 sintered body according to the present invention. A grain boundary phase containing C is observed between ZrO2 crystal grains.
実施例２
実施例１に記載と同様のＺｒＯ２粉末に対し、２．０重
量％のノボラック・フェノール樹脂をアセトンに溶かし
て添加し、ボールミルによって４８時間混練した。得た
混合物は、乾燥後、金型で圧粉成形し、実施例１に記載
と同様の方法でホットプレス焼成した。ただし、焼成温
度は１６００℃。Example 2 To ZrO2 powder similar to that described in Example 1, 2.0% by weight of novolak phenolic resin dissolved in acetone was added and kneaded for 48 hours using a ball mill. After drying, the obtained mixture was compacted in a mold and hot press fired in the same manner as described in Example 1. However, the firing temperature is 1600℃.
１６５０℃、 １８００℃、 ２０００℃、 ２０５０
℃と５通りで行なった。1650℃, 1800℃, 2000℃, 2050
℃ and 5 different temperatures.
得た焼結体は、実施例１に記載と同様の方法で。The obtained sintered body was obtained in the same manner as described in Example 1.
Ｃ含有量、微構造、電気抵抗率を調べた。さらに結晶粒
径の大きさを調べた。第２表はこれらの結果である。The C content, microstructure, and electrical resistivity were investigated. Furthermore, the size of crystal grains was investigated. Table 2 shows these results.
第２表より、焼成温度が１６５０℃以上の本発明品（試
料番号８，６．９）では、Ｃを含む粒界相が存在するこ
とがわかる。また、この相の生成によって、焼結体の電
気抵抗率が著しく低下することがわかる。一方、焼成温
度が２０００℃を越える２０５０℃（試料番号１０）で
は、結晶粒径が９．１μｍと大きくなっている。この焼
結体は、スライダ形状に加工を試みたところ１粒径に匹
敵する大きなチッピングが発生しスライダとして不適当
であった。From Table 2, it can be seen that in the products of the present invention (sample numbers 8 and 6.9) in which the firing temperature was 1650° C. or higher, a grain boundary phase containing C was present. It is also seen that the electrical resistivity of the sintered body decreases significantly due to the formation of this phase. On the other hand, when the firing temperature exceeds 2000°C, 2050°C (sample number 10), the crystal grain size is as large as 9.1 μm. When this sintered body was attempted to be processed into a slider shape, large chippings comparable to the size of one grain occurred, making it unsuitable for use as a slider.
電子顕微鏡によるＩＩＩ察の結果、生成した粒界相には
Ｃを含む非晶質が＊察された。As a result of III observation using an electron microscope, an amorphous substance containing C was detected in the generated grain boundary phase.
実施例３
実施例１で得た試料番号１〜５，７〜９の焼結体を用い
て、第２図に示すようにスライダに加工した。第２図は
薄膜磁気ヘッド・スライダの一例を示す斜視図であり、
スライダは薄膜素子形成面３と磁気ディスク摺動面４を
有している。Example 3 The sintered bodies of sample numbers 1 to 5 and 7 to 9 obtained in Example 1 were processed into a slider as shown in FIG. 2. FIG. 2 is a perspective view showing an example of a thin film magnetic head slider.
The slider has a thin film element forming surface 3 and a magnetic disk sliding surface 4.
加工して得たスライダの磁気ディスクの寿命に対する特
性は次の方法で調べた。まずスライダは磁気ディスク摺
動面を磁気ディスクにのせてジンバルバネによって磁気
ディスク面上に保持した。The characteristics of the processed slider with respect to the magnetic disk life were investigated using the following method. First, the slider placed the magnetic disk sliding surface on the magnetic disk and was held on the magnetic disk surface by a gimbal spring.
次いで、磁気ディスクをスライダ位置での周速が４０ｍ
／ｓｅｃとなる回転数で回転させ、スライダを０．３μ
ｍ浮上させ、３０秒後に磁気ディスクは回転停止した。Next, the magnetic disk was set at a circumferential speed of 40 m at the slider position.
Rotate the slider at a rotation speed of /sec and set the slider to 0.3μ.
The magnetic disk stopped rotating after 30 seconds.
以上の磁気ディスクの回転の起動、停止を反復し磁気デ
ィスクの損傷によってジンバルバネに急激な負荷がかか
るまでの時間を測定した。磁気ディスクは、Ｆｅｚｅｓ
磁性粉とＡＱｚ○３フィラー粉が混練された有機物樹脂
が磁性層としてＡＱ製円板の表面に塗布された塗布型デ
ィスクを用いた。The above rotation of the magnetic disk was repeatedly started and stopped, and the time until a sudden load was applied to the gimbal spring due to damage to the magnetic disk was measured. The magnetic disk is Fezes.
A coated disk was used in which an organic resin in which magnetic powder and AQz○3 filler powder were kneaded was coated as a magnetic layer on the surface of an AQ disk.
第３表は、測定結果を示す、第３表より、Ｃを含有する
粒界相を含み、電気抵抗率が１０８ΩＣ■以下のＺｒＯ
２焼結体（試料番号３，４，５．８９）は、そうでない
従来のＺｒＯ２焼結体（試料番号１，２．７）と較べ、
磁気ディスクの寿命を少なくとも約２倍以上長くするこ
とがわかる。Table 3 shows the measurement results. From Table 3, ZrO containing a grain boundary phase containing C and having an electrical resistivity of 108ΩC or less
2 sintered bodies (sample numbers 3, 4, 5.89) compared to conventional ZrO2 sintered bodies (sample numbers 1, 2.7),
It can be seen that the life of the magnetic disk is at least doubled.
第３表
なお、本発明の７．ｒＯｘとしては部分安定化Ｚｒ○２
を用いることもできる。Table 3 also shows 7. of the present invention. As rOx, partially stabilized Zr○2
You can also use
部分安定化Ｚｒ０ｚ （以下ｐｓｚ）は優れた耐摩耗
性、靭性等を有するセラミックスとして注目を集めてい
る。しかしながら、その実用化に対しては次の点が大き
な問題点となってりる。すなわちＰＳＺは加工性が極め
て悪い、ｐｓｚは耐摩耗性、靭性がよいという機械的特
性を有するため。Partially stabilized Zr0z (hereinafter referred to as psz) is attracting attention as a ceramic having excellent wear resistance, toughness, etc. However, the following points pose major problems for its practical use. That is, PSZ has extremely poor workability, while psz has mechanical properties such as good wear resistance and toughness.
逆に加工する場合には、極めて加工が困難であり。Conversely, processing is extremely difficult.
コスト高となるのである。この点を解決するため焼成後
に加工部分を残さないようにしようとしても、成形体は
焼成前後で数１０％の寸法変化（収縮）をするため、高
精度の寸法制御は困難である。This results in high costs. Even if an attempt is made to avoid leaving any processed parts after firing in order to solve this problem, the molded body undergoes a dimensional change (shrinkage) of several tens of percent before and after firing, making it difficult to control the dimensions with high precision.
このためＰＳＺは優れた機械的特性を有しながらも、高
精度品、Ｗｌ雑形状品等への実用化が難しかった。For this reason, although PSZ has excellent mechanical properties, it has been difficult to put it to practical use in high-precision products, Wl irregularly shaped products, etc.
本発明によれば、Ｃの添加によりＰＳＺに導電性をもた
せることができる。この結果、ＰＳＺの放電加工が可能
となり、高精度品、複雑形状品の加工が可能となるので
ある。しかも、Ｃの添加量はせいぜい２％以下であるた
めに、ＦＳＺの優れた機械的特性は全く損うことがない
。さらにＰＳＺの耐摩耗性に加えて、Ｃによる潤滑性も
加えられるという特長を有する。According to the present invention, PSZ can be made conductive by adding C. As a result, electrical discharge machining of PSZ becomes possible, and high precision products and products with complex shapes can be machined. Furthermore, since the amount of C added is at most 2% or less, the excellent mechanical properties of FSZ are not impaired at all. Furthermore, in addition to the wear resistance of PSZ, it also has the advantage of having lubricity due to C.
このＰＳＺは摺動部材として好適であり１例えば車輪の
軸受けやベアリング部材またはノズル部材等として好適
であるが、とくに導電性を有し帯電をを防止することが
できるため、磁気テープのガイドローラ等の磁気機器の
摺動部材として好適である。This PSZ is suitable as a sliding member, such as a wheel bearing, a bearing member, a nozzle member, etc., but it is especially suitable for use as a guide roller of a magnetic tape, etc. because it is electrically conductive and can prevent charging. It is suitable as a sliding member for magnetic equipment.
本発明によれば、長期にわたって磁気ディスクに損傷を
与えないスライダ材を得ることができるので、薄膜磁気
ヘッドの浮上隙間を小さくして。According to the present invention, it is possible to obtain a slider material that does not cause damage to the magnetic disk over a long period of time, so the flying gap of the thin-film magnetic head can be reduced.
磁気ディスク記憶装置の記録密度を向上し、かつ磁気デ
ィスクの寿命を長くするのに効果がある。It is effective in improving the recording density of a magnetic disk storage device and extending the life of the magnetic disk.
第２図は、薄膜磁気ヘッド・スライダの一例を示す斜視
図である。FIG. 2 is a perspective view showing an example of a thin film magnetic head slider.
１・・・Ｃを含む粒界相、２・・・ＺｒＯ２の結晶粒、
３・・・薄膜素子形成面、４・・・磁気ディスク摺動面
。1... Grain boundary phase containing C, 2... Crystal grains of ZrO2,
3... Thin film element forming surface, 4... Magnetic disk sliding surface.
Claims (1)
体から成ることを特徴とする薄膜磁気ヘッドスライダ。 ２、ＺｒＯ＿２焼結体は少なくともＣを含む相が混在す
ることを特徴とする特許請求の範囲第１項記載の薄膜磁
気ヘッド。 ３、少なくともＣを含む相は、ＺｒＯ＿２結晶粒界に存
在することを特徴とする特許請求の範囲第２項に記載の
薄膜磁気ヘッドスライダ。 ４、少なくともＣを含む相の少なくとも一部は非晶質で
あることを特徴とする特許請求の範囲第２項または第３
項に記載の薄膜磁気ヘッドスライダ。 ５、Ｃの含有量は０．２〜２．０重量％であることを特
徴とする特許請求の範囲第２項、第３項または第４項記
載の薄膜磁気ヘッドスライダ。 ６、Ｃまたは熱分解してＣを生じる有機物とＺｒＯ＿２
粉末との混合物を、１６５０〜２０００℃の温度で、非
酸化性の雰囲気中で焼成することを特徴とする薄膜磁気
ヘッド用スライダ材料の製造方法。 ７、有機物とＺｒＯ＿２の粉末の混合は、有機物を溶媒
に溶かして行うことを特徴とする特許請求の範囲第６項
に記載の薄膜磁気ヘッドスライダの製造方法。 ８、有機物としてフェノール樹脂を用いることを特徴と
する特許請求の範囲第６項または第７項に記載の薄膜磁
気ヘッドスライダの製造方法。[Claims] 1. A thin-film magnetic head slider comprising a ZrO_2 sintered body having an electrical resistivity of 10^8 Ωcm or less. 2. The thin film magnetic head according to claim 1, wherein the ZrO_2 sintered body contains a phase containing at least C. 3. The thin film magnetic head slider according to claim 2, wherein the phase containing at least C exists at the ZrO_2 grain boundaries. 4. Claim 2 or 3, characterized in that at least a part of the phase containing at least C is amorphous.
The thin-film magnetic head slider described in . 5. The thin film magnetic head slider according to claim 2, 3 or 4, wherein the content of C is 0.2 to 2.0% by weight. 6. C or organic matter that thermally decomposes to produce C and ZrO_2
1. A method for manufacturing a slider material for a thin film magnetic head, comprising firing a mixture with powder at a temperature of 1650 to 2000° C. in a non-oxidizing atmosphere. 7. The method for manufacturing a thin film magnetic head slider according to claim 6, wherein the organic substance and the ZrO_2 powder are mixed by dissolving the organic substance in a solvent. 8. A method for manufacturing a thin film magnetic head slider according to claim 6 or 7, characterized in that a phenolic resin is used as the organic substance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61076578A JPH071531B2 (en) | 1986-04-04 | 1986-04-04 | Thin film magnetic head slider and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61076578A JPH071531B2 (en) | 1986-04-04 | 1986-04-04 | Thin film magnetic head slider and method of manufacturing the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2321876A Division JPH0752484B2 (en) | 1990-11-26 | 1990-11-26 | Magnetic disk unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62234223A true JPS62234223A (en) | 1987-10-14 |
| JPH071531B2 JPH071531B2 (en) | 1995-01-11 |
Family
ID=13609144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61076578A Expired - Lifetime JPH071531B2 (en) | 1986-04-04 | 1986-04-04 | Thin film magnetic head slider and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071531B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990005363A1 (en) * | 1988-03-29 | 1990-05-17 | Kao Corporation | Magnetic recording apparatus |
| US5323283A (en) * | 1991-03-29 | 1994-06-21 | Minebea Co., Ltd. | Floating magnetic head slider |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6051666U (en) * | 1983-09-14 | 1985-04-11 | 株式会社三協精機製作所 | Magnetic head for recording and reproduction |
| JPS6066361A (en) * | 1984-04-12 | 1985-04-16 | Hitachi Metals Ltd | Magnetic head |
-
1986
- 1986-04-04 JP JP61076578A patent/JPH071531B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6051666U (en) * | 1983-09-14 | 1985-04-11 | 株式会社三協精機製作所 | Magnetic head for recording and reproduction |
| JPS6066361A (en) * | 1984-04-12 | 1985-04-16 | Hitachi Metals Ltd | Magnetic head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990005363A1 (en) * | 1988-03-29 | 1990-05-17 | Kao Corporation | Magnetic recording apparatus |
| US5323283A (en) * | 1991-03-29 | 1994-06-21 | Minebea Co., Ltd. | Floating magnetic head slider |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH071531B2 (en) | 1995-01-11 |
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