JPS62231599A - Manufacture of ultrasonic probe - Google Patents

Manufacture of ultrasonic probe

Info

Publication number
JPS62231599A
JPS62231599A JP7459286A JP7459286A JPS62231599A JP S62231599 A JPS62231599 A JP S62231599A JP 7459286 A JP7459286 A JP 7459286A JP 7459286 A JP7459286 A JP 7459286A JP S62231599 A JPS62231599 A JP S62231599A
Authority
JP
Japan
Prior art keywords
ceramic
adhesive
ultrasonic probe
probe
ceramic piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7459286A
Other languages
Japanese (ja)
Inventor
Yoshio Yokogawa
横川 芳夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP7459286A priority Critical patent/JPS62231599A/en
Publication of JPS62231599A publication Critical patent/JPS62231599A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To facilitate manufacture and to improve a yield and an electromechanical transfer efficiency by forming grooves in lateral and longitudinal direction on ceramic from its upper surface, filling an adhesive, providing electrodes on both end surfaces of each ceramic piece, forming probe element blocks, arraying them laterally and longitudinally on the surface of a fixed plate, and adhering and fixing them. CONSTITUTION:The longitudinal groove 4C and the lateral groove 4d are formed along peripheral edges 4a and 4b on a previously polarized rectangular ceramic 4 with a comparatively thick thickness from its upper surface, and the adhesive 5 such as epoxy resin is filled in said grooves 4c and 4d to be cured. The botton side joint part 4f of each ceramic piece 4e is separated at a position shown by a broken line 6. The both surfaces 7a and 7b of a ceramic aggregation body 7 are grounded to finish in the prescribed thickness. Electrodes 8 are provided on the both end surfaces of each ceramic piece 4e. The probe element blocks 3 are arranged laterally and longitudinally along the peripheral edges 2a and 2b on the surface of one fixed plate 2 and fixed with the adhesive, thereby obtaining a ultrasonic probe 1 with a large diameter. Accordingly the ultrasonic probe with a large diameter can be easily produced and the yield can be improved.

Description

【発明の詳細な説明】 (イ)産業上の利用分野 本発明は、大きなパワーを必要とする魚群探知器などに
使用されろ大口径の超音波探触子の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a method for manufacturing a large-diameter ultrasonic probe used in fish finders and the like that require large power.

(ロ)従来技術とその問題点 従来、直径が数10cm以上の大口径の超音波探触子を
製造する場合、一枚のセラミックを焼成した基板の両面
に全面に電極を形成した構造を採っていたため、その製
造が難しく、しかも、歩留まりが悪いという問題があっ
た。
(b) Conventional technology and its problems Conventionally, when manufacturing large-diameter ultrasonic probes with a diameter of several tens of centimeters or more, a structure was adopted in which electrodes were formed on both sides of a single fired ceramic substrate. Therefore, there were problems in that it was difficult to manufacture and the yield was low.

本発明は、このような事情に鑑みてなされたらのであっ
て、大口径のものでも容易に製造でき、歩留まりを向上
するとともに、電気−機械的変換効率を高めた超音波探
触子を提供することを目的とする。
The present invention has been made in view of these circumstances, and provides an ultrasonic probe that can be easily manufactured even with a large diameter, improves yield, and has enhanced electro-mechanical conversion efficiency. The purpose is to

(ハ)問題点を解決するための手段 本発明は、上記の目的を達成するために、セラミックに
その上面から縦横の溝を形成して、その溝に接着剤を充
填し、かっ、上記縦横の114により形成された複数の
セラミック片の付け根側連結部を取り除いた後、各セラ
ミック片の両端面に電極を設けてなる複数の探触子素子
からなる探触子素子ブロックを形成する工程と、 この探触子素子ブロックを一枚の固定板の表面に縦横に
配列して接着固定する工程とを、を備えるものとした。
(C) Means for Solving the Problems In order to achieve the above object, the present invention forms vertical and horizontal grooves in the ceramic from the top surface, fills the grooves with an adhesive, and then After removing the base connecting portions of the plurality of ceramic pieces formed in step 114, a step of forming a probe element block consisting of a plurality of probe elements in which electrodes are provided on both end faces of each ceramic piece; , and a step of arranging the probe element blocks vertically and horizontally on the surface of one fixing plate and fixing them by adhesive.

(ニ)実施例 第1図(Dは、本発明の実施例に係る大口径の超音波探
触子lの該略を示す斜視図である。この超音波探触子1
は、一枚の固定板2の表面に、探触子素子ブロック3を
縦横に並べて接着固定されている。
(D) Embodiment FIG. 1 (D is a perspective view schematically showing a large-diameter ultrasonic probe l according to an embodiment of the present invention. This ultrasonic probe 1
In this case, probe element blocks 3 are arranged vertically and horizontally and adhesively fixed to the surface of one fixed plate 2.

上記超音波探触子1は、次の(i)〜(1v)の工程順
に従う方法により製造される。
The ultrasonic probe 1 is manufactured by a method according to the following steps (i) to (1v).

(i)第1図(a)に示すように、予め分極された厚さ
が比較的厚い矩形のセラミック4にその上面から周縁4
a、4bに沿って縦溝4C1横溝4dを形成し、その縦
溝4c、横i4dに、第1図(b)に示すように、エポ
キシ樹脂などの接着剤5を充填して硬化させる。この接
着剤5は、縦溝4Cと@iM 4 dにより形成された
横断面四角形の短柱状のセラミック片4eどうしを結合
するためのらのである。
(i) As shown in FIG. 1(a), a relatively thick rectangular ceramic 4 that has been polarized in advance is
A vertical groove 4C1 and a horizontal groove 4d are formed along the a and 4b, and the vertical groove 4c and the horizontal groove i4d are filled with an adhesive 5 such as an epoxy resin and cured, as shown in FIG. 1(b). This adhesive 5 is used to bond the short columnar ceramic pieces 4e with a square cross section formed by the vertical grooves 4C and @iM 4 d.

ここで、セラミック片4eの一辺の寸法aは、超音波の
波長に比へて十分小さい値に設定される。
Here, the dimension a of one side of the ceramic piece 4e is set to a value sufficiently small compared to the wavelength of the ultrasonic wave.

また、縦溝4c、t&溝4dは、グイシングツ−によリ
カッティングされる。したがって、短柱状のセラミック
片4eをいきなり形成すると、接着剤5の補強効果がま
ったく得られず、縦溝4c(または11!1ii44d
)のカッティングに引き続いて行なわれる、横溝4d(
または縦溝4c)のカッティング時にセラミック片4e
に欠けが生じ易くなる。このような理由から、一方の溝
(縦溝または横溝)のカンティング、その溝への接着剤
の充填、他方の苛のカッティング、その溝への接着剤の
充填というような手順を経るのが望ましい。
Further, the vertical grooves 4c and the t&grooves 4d are recut by a guising tool. Therefore, if a short columnar ceramic piece 4e is suddenly formed, the reinforcing effect of the adhesive 5 will not be obtained at all, and the vertical groove 4c (or 11!1ii44d
), the horizontal groove 4d (
Or when cutting the vertical groove 4c), the ceramic piece 4e
chipping is more likely to occur. For this reason, it is best to go through the following steps: canting one groove (vertical or horizontal), filling that groove with adhesive, cutting the other groove, and filling that groove with adhesive. desirable.

(ii)第1図(C)に示すように、各セラミック片4
eの付け根側連結部4rを破線6の位置から分離させ、
第1図(d)のようなセラミック片集合体7を得る。
(ii) As shown in FIG. 1(C), each ceramic piece 4
Separate the base side connecting part 4r of e from the position of the broken line 6,
A ceramic piece assembly 7 as shown in FIG. 1(d) is obtained.

(iii)セラミック片集合体7の両面7a、7bの研
摩を施して、これが所定の周波数で共振するように、こ
のセラミック片集合体7を所定の厚さに仕上げる。
(iii) Both surfaces 7a and 7b of the ceramic piece assembly 7 are polished to finish the ceramic piece assembly 7 to a predetermined thickness so that it resonates at a predetermined frequency.

(iv)第1図(C)に示すように、各セラミック片4
eの両端面に電極8を設ける。これにより、複数の探触
子素子9からなる探触子素子ブロック3が得られる。
(iv) As shown in FIG. 1(C), each ceramic piece 4
Electrodes 8 are provided on both end faces of e. Thereby, a probe element block 3 consisting of a plurality of probe elements 9 is obtained.

(1v)第1図(r)に示すように、探触子素子ブロッ
ク3を一枚の固定板2の表面に、その周縁2a、2bに
沿って縦横に並べて接着剤で固定し、大口径の超音波探
触子lを得る。
(1v) As shown in FIG. 1(r), the probe element blocks 3 are arranged vertically and horizontally along the peripheral edges 2a and 2b on the surface of one fixed plate 2 and fixed with adhesive, and Obtain an ultrasonic probe l.

(ホ)効果 以上のように本発明によれば、複数の探触子素子からな
る探触子素子ブロックを一枚の固定板の表面に縦横に並
べて接着固定するので、これによって、大口径の超音波
探触子を容易に製造できるので、歩留まりを向上するこ
とができる。また、本発明で製造される超音波探触子は
、複数の探触子素子の集合体からなるので、従来の一枚
のものに比べで、電気−機械変換効率を高めることがで
きるという効果らある。
(E) Effect As described above, according to the present invention, probe element blocks consisting of a plurality of probe elements are arranged vertically and horizontally on the surface of a single fixing plate and are adhesively fixed. Since the ultrasonic probe can be manufactured easily, the yield can be improved. In addition, since the ultrasonic probe manufactured by the present invention is composed of an aggregate of multiple probe elements, it has the effect of increasing electro-mechanical conversion efficiency compared to conventional single-piece probe elements. There are.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)ないしくf)は本発明の実施例の超音波探
触子の製造工程を示ずらので、同図(a)は苛が形成さ
れたセラミックの斜視図、同図(b)は接着剤の充填状
態の平面図、同図(c)は(b)の側面図、同図(d)
はセラミック片集合体の側面図、同図(e)は電極形成
状態の側面図、同図(f)は完成した超音波探触子の斜
視図である。 I・・・超音波探触子、2・・固定板、3・・探触子素
子ブロック、4・・セラミック、4c・・・縦溝、4d
・・横溝、4e・・・セラミック片、4f・・・付け根
側連結部、8・・電極、9・・探触子素子。
1(a) to 1(f) do not show the manufacturing process of the ultrasonic probe according to the embodiment of the present invention, so FIG. ) is a plan view of the state in which the adhesive is filled, (c) is a side view of (b), and (d) is a side view of (b).
is a side view of the ceramic piece assembly, (e) is a side view of the state in which electrodes are formed, and (f) is a perspective view of the completed ultrasonic probe. I...Ultrasonic probe, 2...Fixing plate, 3...Probe element block, 4...Ceramic, 4c...Vertical groove, 4d
...Horizontal groove, 4e... Ceramic piece, 4f... Root side connection part, 8... Electrode, 9... Probe element.

Claims (1)

【特許請求の範囲】[Claims] (1)セラミックにその上面から縦横の溝を形成して、
その溝に接着剤を充てんし、かつ、上記縦横の溝により
形成された複数のセラミック片の付け根側連結部を取り
除いた後、各セラミック片の両端面に電極を設けてなる
複数の探触子素子からなる探触子素子ブロックを形成す
る工程と、 この探触子素子ブロックを一枚の固定板の表面に縦横に
配列して接着固定する工程とを、 を備えたことを特徴とする超音波探触子の製造方法。
(1) Forming vertical and horizontal grooves on the ceramic from its top surface,
After filling the grooves with adhesive and removing the joints on the base sides of the plurality of ceramic pieces formed by the above-mentioned vertical and horizontal grooves, a plurality of probes are formed by providing electrodes on both end faces of each ceramic piece. A method of ultra-high-performance ultrasonic technology characterized by comprising: a step of forming a probe element block consisting of elements; and a step of arranging the probe element blocks vertically and horizontally on the surface of a single fixing plate and fixing them by adhesive. A method of manufacturing a sonic probe.
JP7459286A 1986-03-31 1986-03-31 Manufacture of ultrasonic probe Pending JPS62231599A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7459286A JPS62231599A (en) 1986-03-31 1986-03-31 Manufacture of ultrasonic probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7459286A JPS62231599A (en) 1986-03-31 1986-03-31 Manufacture of ultrasonic probe

Publications (1)

Publication Number Publication Date
JPS62231599A true JPS62231599A (en) 1987-10-12

Family

ID=13551582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7459286A Pending JPS62231599A (en) 1986-03-31 1986-03-31 Manufacture of ultrasonic probe

Country Status (1)

Country Link
JP (1) JPS62231599A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04200098A (en) * 1990-11-29 1992-07-21 Matsushita Electric Ind Co Ltd Production of composite piezoelectric

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04200098A (en) * 1990-11-29 1992-07-21 Matsushita Electric Ind Co Ltd Production of composite piezoelectric

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