JPS622237U - - Google Patents
Info
- Publication number
- JPS622237U JPS622237U JP9282685U JP9282685U JPS622237U JP S622237 U JPS622237 U JP S622237U JP 9282685 U JP9282685 U JP 9282685U JP 9282685 U JP9282685 U JP 9282685U JP S622237 U JPS622237 U JP S622237U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- beam source
- housing part
- part made
- melting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9282685U JPH0342677Y2 (sl) | 1985-06-19 | 1985-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9282685U JPH0342677Y2 (sl) | 1985-06-19 | 1985-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622237U true JPS622237U (sl) | 1987-01-08 |
| JPH0342677Y2 JPH0342677Y2 (sl) | 1991-09-06 |
Family
ID=30649967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9282685U Expired JPH0342677Y2 (sl) | 1985-06-19 | 1985-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342677Y2 (sl) |
-
1985
- 1985-06-19 JP JP9282685U patent/JPH0342677Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342677Y2 (sl) | 1991-09-06 |