JPS62222071A - Production of member deposited with ceramics - Google Patents

Abstract

PURPOSE:To obtain a high-speed sliding member having excellent wear resistance by forming a region contg. carbon at a high concn. on the surface of a base material contg. iron and carbon in a plasma atmosphere of an Ar-contg. gas under a reduced pressure and further depositing an Si-contg. ceramic layer thereon. CONSTITUTION:The base material 10 contg. the iron and carbon is suspended to a supporting member 11, and is charged into a reaction chamber 1. While the inside of the reaction chamber 1 is evacuated, the gaseous Ar is introduced therein and the inside of the reaction chamber 1 is adjusted to a prescribed pressure. A matching box 15 is connected to the supporting member 11 and the base material 10 is heated to about 150-300 deg.C by a heater 12. High-frequency electric power is impressed to the base material 10 to generate plasma between an electrode 4 and the base material 10. The region of the high concn. of carbon is, therefore, formed on the surface of the base material 10. The gas contg. Si is then introduced into the reaction chamber 1 and the connection of the matching box 15 is changed over to the reaction chamber 1. The connection of a shield 5 is changed over to the supporting member 11 and the high-frequency electric power is impressed to the reaction chamber 1 and the electrode 4. The ceramics is thereby coated on the base material 10 and the member having the excellent wear resistance is obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a method of manufacturing a member m coated with ceramics suitable for a member that melts at high speed.

(Prior Art) For example, members that are subjected to high-speed vibrations, such as compressor shafts, engine camshafts, laser scanners of laser printers, and printer guide rails,
It is easy to wear out, and the wear of this high-speed sliding member has a great effect on the life and performance of the device. For this reason, hard materials such as high-speed steel and cemented carbide that are hard to wear are used for such high-speed sliding members. However, these materials have high material costs and processing costs, so if it is necessary to avoid higher costs, use relatively inexpensive materials such as cast iron or free-cutting steel. Harden the surface or use 111i! Countermeasures such as imparting IWI properties are being taken. Furthermore, a technique has been proposed in which cutting tools are coated with high-hardness ceramics such as TiN and TiC to improve the wear resistance of cutting tools.

(Problem to be solved by the invention) However, surface hardening treatment includes quenching, and lubricity imparting treatment includes tuftride treatment, perco treatment, and coating treatment with blackened molybdenum disulfide. Even in such cases, the adhesion is insufficient, and sufficient durability cannot be obtained under severe conditions where a high load is applied and rotation is performed at eight speeds.

In addition, in hardening and tuftride treatments, the treatment temperature is as high as 500"C or higher, so there is a risk of deformation of the base material during the treatment, so these treatments are not applied to parts that require high dimensional accuracy. Can not do it.

Furthermore, if TiN or TiC is coated on a member that slides at high speed, the hardness of these ceramics is high, so the other sliding member will be ground, and this grinding debris will adhere to the ceramic coating. There is a problem that it gets burned in.

This invention was made in view of such circumstances, and
It has high adhesion to the base material, excellent wear resistance, and does not grind the sliding mating member.
It is an object of the present invention to provide a method for manufacturing a component size coated with ceramics in which the occurrence of seizure is suppressed.

[Structure of the Invention] (Means for Solving the Problems) A method for manufacturing a member coated with ceramics according to the present invention includes applying reduced pressure to the surface of a base material containing iron and carbon and used for high-speed sliding parts. The method is characterized in that a layer containing a high concentration of carbon is formed under a plasma atmosphere of an argon-containing gas, and then a ceramic layer containing silicon is formed on the base material.

(Function) As a result of various studies in order to develop a ceramic material that has high hardness (and excellent wear resistance) and does not grind the sliding material of the other party, the inventor of the present application has developed a ceramic material that contains silicon. It has been found that ceramics fully satisfies these requirements.In addition, such ceramic materials
It can be deposited on the base material by sputtering, plasma CVD, ion blating, etc., but since the treatment temperature is relatively low at 200 to 300°C, deformation of the base material during treatment can be suppressed, and the These ceramics can also be applied to members that require precision.

However, these ceramics have the disadvantage that their adhesion to the base material is inferior to TiN and TiC. In particular, when the base material is cast iron such as a compressor shaft, it is practically difficult to form a film with these ceramics.

The inventor of the present application repeatedly conducted various experimental studies in order to deposit these ceramics stably and easily on a base material whose main component is iron, and as a result, the surface of the base material was By applying high-frequency power or DC power to generate plasma between the bridge and the electric bridge, and performing plasma treatment, it is possible to adhere silicon-containing ceramics to the base material with high adhesiveness. I found it. Through such plasma treatment, a layer with high carbon concentration is formed on the surface layer of the base material, and by forming a ceramic layer on top of this high carbon concentration layer, ceramics imparts high strength to the base material containing iron and carbon. It is covered with. The present invention was made based on such research results. In this way, in the present invention, since a tank containing a high concentration of carbon is formed on the surface of the base material, it is necessary that the base material contains carbon in addition to iron. Considering productivity, it is preferable to use a cast material as the base material.

Note that silicon-containing ceramics include silicon nitride (SiN), silicon oxide (Sin), and silicon carbide (SiC).
etc. For example, SiN and SiO have a Vickers hardness of 18oO to 2000, and SiC has a Vickers hardness of 2000 to 2500. As described above, these ceramics have high hardness and excellent wear resistance, and if the mating sliding member is made of iron, the sliding member will not be ground. Such ceramics can be manufactured by sputtering, ion blating,
Although it can be manufactured by methods such as plasma CVO, thermal CVD, and optical CVD, plasma CVD is preferable in view of its adhesion to the base material and the possibility of lower temperature processing.

(Embodiments) Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The ceramic-coated member used in this example is manufactured as follows. First, a base material is obtained by processing and forming a block of cast iron or free-cutting steel into a predetermined shape, such as a shaft of a rotary compressor or a carriage guide of a printer. Next, the surface of this base material is subjected to plasma treatment in a gas containing Ar gas to form a high carbon concentration region on the surface of the base material. Thereafter, a ceramic such as SiN is coated on the surface of the base material. The shaft or carriage guide manufactured in this way is
The surface of the base material whose main component is iron is coated with ceramics such as SiN.

Therefore, even if the sliding member slides on such a member at high speed, wear is suppressed and the sliding member is not ground.

Next, with reference to FIGS. 1 and 2, a method for manufacturing a member coated with ceramics according to this embodiment will be described using a plasma CVD method as an example. A cylindrical reaction chamber 1 is supported on a suitable support with its axial direction vertical, and is electrically suspended via an insulator 2. The inside of the reaction chamber 1 is evacuated by a mechanical booster pump, an oil rotary pump (not shown), etc., and is maintained at a vacuum level of about 10 −3 Torr. Various raw material gases are introduced into the reaction chamber 1 through a gas inlet 3 . A cylindrical electrode 4 is installed in the reaction chamber 1 coaxially with respect to its peripheral wall, and is set to the same potential as the reaction chamber 1. This electrode 4 is provided with a plurality of gas flow holes (not shown), and the gas inlet 3 is connected to the reaction chamber 1.
The gas introduced therein passes through the gas flow holes of the electrode 4 and is almost uniformly supplied to the center of the reaction chamber 1 . A cylindrical shield 5 is grounded and arranged to surround the reaction chamber 1.

At the center of the reaction chamber 1, a cylindrical base material 10 is disposed at the axial center of the electrode 4 with its axial direction being vertical. Reaction chamber 1
A support member 11 is installed on the top plate of the reaction chamber 1 via an insulator 2, and the base material 10 is suspended from this support member 11 and charged into the reaction chamber 1. A heater 12 made of a resistance heating wire is inserted into the center of the base material 10 . This heater 12 is electric! [ 13 , and is supplied with power from the power source 13 to generate heat and heat the base material 10 . In FIG. 1, the base material 10 and the support member 11 are
A high frequency power source 14 is connected via a matching box 15, and in FIG.
5 is connected to the reaction chamber 1 so that high frequency power is applied to the reaction chamber 1. In this way, as shown in FIGS. 1 and 2, high frequency power is applied between the base material 10 and the reaction chamber 1, and a plasma discharge is generated between the base material 10 and the reaction chamber 1. Ru.

Using the apparatus configured as described above, first, the surface of the base material is subjected to plasma treatment in an Ar-containing gas atmosphere. That is, as shown in FIG. 1, the matching box 15 and the support member 11 are connected, and the inside of the reaction chamber 1 is evacuated to about 10@-3 Torr. Then, while continuing the pumping, 200 SCCM of Ar gas is introduced into the reaction chamber 1 through the gas inlet 3, and the pressure inside the reaction chamber 1 is adjusted to, for example, 1 Torr. Next, Den! Power is supplied from 113 to the heater 12 to cause the heater 12 to generate heat, and the base material 1o is
Heat to 300°C. After that, apply 300W to the base material 10.
high frequency power is applied to generate plasma between the electrode 4 and the base material 10. This plasma treatment time is, for example, about 30 minutes.

This plasma treatment forms a high carbon concentration region on the surface of the base material. In this case, the processing gas is not limited to Ar gas alone, but may be a mixed gas of Ar gas and a gas such as H2°He or N2.

Note that, as in this example, the base material may be heated in advance, but when plasma is generated, the base material is heated by this plasma, so it is not necessarily necessary to provide a special heating means. do not have. In this way, when the base material 10 is not heated using the heater 12, the high frequency power applied to the base material 10 etc. may be increased or the processing time may be lengthened.

Following this plasma treatment, a gas containing constituent elements of the ceramic to be coated is introduced into the reaction chamber 1, and the ceramic is coated on the base material whose surface has been plasma treated. Ceramics to be coated are 3i
Since it contains S i H4 gas or 5i2Hs
When the gas containing 3i, such as gas, is a nitride, N is added.
2 gas or a gas containing N such as NHa gas,
When it is a carbide, C such as Chh gas or C2H6 gas
When it is an oxide, a gas containing O such as 02 gas or N20 gas is mixed. While introducing such raw material gas into the reaction chamber 1, the connection of the matching box is switched from the support member 11 to the reaction chamber 1, and the connection of the shield 5 is switched from the reaction chamber 1 to the support member 11. Then, high frequency power is applied from the high frequency power source 14 to the reaction chamber 1 and the electrode 4 to generate plasma between the electrode 4 and the base material 10. As a result, the surface of the base material 1° is coated with ceramics whose constituent elements are the components in the raw material gas. For example, when coating SiN, 11 of SiH4 gas is mixed with 50SCCM, N2
jj:1. (D flow rate e is set to 800 sccM, reaction pressure is 1.0 torr, and high frequency power is 300 W to form a film for 1 hour, and 5iNI of about 4 μm is formed on the surface of the base material 10.

In addition, in the case of SiC, CH4 gas is used instead of N2 gas, and in the case of SIO, 02 gas is used, and the flow rate etc. conditions are the same as in the case of SiN.
A coating layer having approximately the same thickness as in the case of iN can be formed.

The ceramic-coated member produced as described above has high-strength ceramic coating and has high wear resistance. A shaft for a rotary compressor was manufactured under each film forming condition described above, and 10,000
Continuous operation for 30 minutes at R, P, M rotation speeds, then 10
A 1000 hour durability test was conducted in a mode in which the machine was stopped for 30 minutes and then operated again for 30 minutes. It has been demonstrated that all of the shafts coated with ceramics such as SiN described above do not cause seizure due to wear, do not have layers peeling off, and are extremely durable.

In this example, the carbonization of the surface of the base material and the coating of ceramics are carried out by plasma CVD, but this is not limited to this. means may be used. Furthermore, the power for plasma generation is not limited to high frequency power as in the above embodiments, but direct current power may also be used. In this case, a matching box is not required.

Note that the SiN, SiC, or S film formed in this way
Ceramic layers such as iO are usually amorphous, but
It may be polycrystalline, partially crystalline, or have microcrystalline regions. However, in any of these cases, the wear resistance is good and the same excellent effects can be obtained.

[Effects of the Invention] According to the present invention, a ceramic layer is adhered with high adhesiveness even to a base material whose main component is iron, and a member with excellent wear resistance can be obtained.

This member does not grind the mating member, which prevents seizure from occurring.

[Brief explanation of drawings]

FIGS. 1 and 2 are cross-sectional views showing an apparatus for manufacturing a member coated with ceramics according to an embodiment of the present invention.

Claims (1)

[Claims] (1) A region containing a high concentration of carbon is formed on the surface of a base material containing iron and carbon and used for high-speed sliding parts in a plasma atmosphere of argon-containing gas under reduced pressure, A method of manufacturing a member to which ceramics are adhered, characterized in that a ceramic layer containing silicon is then formed on the base material. (3) The method for manufacturing a ceramic-coated member according to claim 1, wherein the ceramic layer is deposited by generating plasma under reduced pressure.