JPS62220875A - Method and device for diagnosis - Google Patents

Abstract

PURPOSE:To automate diagnosing operation by comparing reference signal data indicating a specific operation state or state change of an object of inspection with actually detected signal data, and judging that abnormality occurs and stopping or adjusting automatically when the difference exceeds a set value. CONSTITUTION:A detecting device 2 detects whether or not abnormality occurs to an object 1 of abnormality detection, e.g. a wire bonder or pellet bonder, reduced projection exposing device, etc., which are used to manufacture a semiconductor. The signal of the detecting device 2 is recorded on an actual signal data recording device 4 after being passed through an actual signal preprocessor 3 which functions for preprocessing such as filtering, reference signal level matching, etc. The recording result is compared by an MPU 5 with reference signal data to judge which part of the object the abnormality occurs to and also generates a signal for stopping or restoration. Consequently, defective articles are prevented from being manufactured unnecessarily.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a diagnostic technique, and particularly to a technique that is effective when applied to abnormality diagnosis of semiconductor manufacturing equipment such as wire bonders and pellet bonders.

[Prior Art] Among the various manufacturing equipment used in the semiconductor manufacturing process, wire bonding, for example, is described in Kogyo Kenkyukai Co., Ltd., published November 10, 1981, [Electronic Materials J 198
It is described in the 2nd year special issue, P2S5. This document describes a fully automatic wire bonder that is an automated wire bonder.

By the way, not only wire bonders but also semiconductor manufacturing equipment, like manufacturing equipment used in various other fields,
The reality is that there is a shift towards automation, and this trend is becoming more and more accelerated.

[Problem that the invention seeks to solve]

However, on the other hand, with the progress of automation, it has become difficult to discover if a failure occurs in a device for some reason. In other words, failures in automatic equipment cannot be detected unless the failure actually occurs, making early detection difficult, and ultimately, it is usually unclear what the abnormality is. This point is a major hindrance to full automation of the device, since humans have to make decisions.

Furthermore, it is often difficult and insufficient to accumulate abnormality data, and it does not necessarily lead directly to improvements in fault diagnosis technology, and there are currently no concrete prospects for the possibility of automatic repair of faults. The inventor has clarified that this is not the case.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, an object of the present invention is to provide a technique that can automatically diagnose the operating state or change in state of an automatic device.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Means for solving problems]

A brief overview of typical inventions disclosed in this application is as follows.

In other words, the reference signal data representing a predetermined operating state or state change of the object to be inspected is compared with the actual signal data actually detected, and when the difference between both data exceeds a predetermined set value, it is determined to be abnormal. This automatically adjusts or controls the object, such as stopping the operation of the object.

[Effect]

According to the above-mentioned means, the object can be automatically diagnosed and abnormalities can be automatically detected.

[Embodiment 1] FIG. 1 is a block diagram of a diagnostic device that is an embodiment of the present invention.

In this embodiment, the object l whose occurrence of an abnormality is detected is
For example, a wire bonder, a pellet bonder, or a reduction projection exposure apparatus used in semiconductor manufacturing is detected by a detection device 2 for the presence or absence of an abnormality. Various principles and methods of detection by this detection device 2 can be considered, and some of them will be exemplarily explained in Examples below.

The detection device 2 is connected to a real signal processing device 3 having a function of preprocessing the detection signal (real signal) to match the level of reference signal data to be described later. Examples of preprocessing performed by this real signal processing device 3 include filtering,
There are width enhancement, Fourier exchange, etc. Among these, when performing Fourier exchange, in cases where direct comparison of signal levels is not suitable, signal levels are compared in the frequency domain using the signal after Fourier exchange of the real signal detected by the detection device 2, An example of this is predicting a location where an abnormality will occur based on a change in natural frequency. However,
If such Fourier exchange or the like is not required, it is also possible to directly compare the actual signals detected by the detection device 2 at their signal levels.

The real signal preprocessing device 3 is connected to a real signal data recording device 4, which records real signal data regarding the real state (operating state) of the object l detected by the detection device 2.

On the other hand, reference signal data representing a predetermined operating state such as a normal state of the object 1 is recorded in the reference signal data recording device 6. The microprocessor unit 5 also includes an input/output device 7 for inputting and outputting various signal data and diagnostic conditions.
is connected.

Next, the operation of this embodiment will be explained.

First, reference data representing an operating state (operating state) such as a normal state of the whole or part of the object 1 is input in advance to the reference signal data recording device 6 by the microprocessor unit 5 and stored as reference signal data.

On the other hand, the detection device 2 collects actual signal data regarding the object 1 undergoing abnormality diagnosis at desired times, for example, periodically.
Alternatively, it is performed when an abnormality is predicted to occur.

The real signal data detected by the detection device 2 is sent to the preprocessing device 3 and subjected to necessary signal preprocessing, and then input to the real signal data recording device 4 under the control of the microprocessor unit 5.

The microprocessor unit 5 compares this actual signal data with the reference signal data and determines whether the difference between the two data exceeds or does not exceed a predetermined set value. This determination is automatically made by the microprocessor unit 5 itself. Setting values regarding the difference between the two data and the like can be input to the microprocessor unit 5 through the input/output device 7.

In determining the presence or absence of the above-mentioned abnormality, the microprocessor unit 5 automatically determines in which part of the object l the abnormality has occurred, performs controls such as stopping the operation of the object l, and performs automatic restoration. If the abnormality is possible, it is also possible to send a signal from the microprocessor unit 5 itself to the object l to automatically restore the abnormality.

As described above, according to this embodiment, the following effects can be obtained.

(1) The microprocessor unit 5 compares the Kyosho signal data input by the reference signal data recording device 6 and the actual signal data detected by the detection value W2, and detects an abnormality according to the difference between the two data. Since the presence or absence of the object can be automatically determined and the object can be controlled, abnormality diagnosis can be automated.

(2) According to +11 above, the location where the failure occurs can be easily identified, and serious failures and accidents such as disasters caused by them, as well as wasteful manufacturing of defective products, can be prevented.

(3) By enabling automatic restoration of automatically restorable abnormalities, it is possible to further advance the automation of abnormality diagnosis.

[Embodiment 2] FIG. 2 is a schematic explanatory diagram showing an embodiment in which the present invention is applied to a wire bonder.

In this embodiment, numeral 8 is an XY table, 9 is a bonding head, 10 is a bonding arm, 11 is a frame feeder that supplies a lead frame 12 as an object to be bonded, 13 is a TV camera for recognition, and 14 is a pattern recognition device. , 15 is a Z-axis control section, and 16 is an XY-axis control section.

Furthermore, in the second embodiment, the XY table driving motor la is selected as the object for abnormality diagnosis, and the power source 17 is connected to the motor la.

This second embodiment focuses on the concept that the motor current supplied from the power supply 2 to the motor 1a is larger as the mechanical load applied to the cough motor 1a becomes larger.

Therefore, the current flowing through the motor 1a is detected by the detection device 2, the detected current value is used as actual signal data, the current value during normal normal operation is used as reference signal data, and both signal data are compared by the microprocessor unit 5. Therefore, if excessive frictional force or the like is generated due to, for example, the XY table 8 being caught, it can be understood as a fluctuation of the actual signal data exceeding a predetermined value due to an excessive detected current value. Thereby, it is possible to automatically detect an abnormality, and also to control the turning off of the power supply 17 by the microprocessor unit 5, and the stopping of the motor 1a and the XY table 8.

In this way, according to the second embodiment, the effects described in the first embodiment can be achieved with the wire bonder.

[Embodiment 3] FIG. 3 is a schematic explanatory diagram showing still another embodiment of the present invention.

In this third embodiment, the detection device is attached to the motor la (target object) for driving the XY table 8.
A rotary encoder 2a detects the shaft rotational position of motor 1a, and a speed detector (
(tachogenerator) 2b or both are used.

According to the third embodiment, it is also possible to automate abnormality diagnosis as in the above-mentioned embodiment 1.2.

[Embodiment 4] FIG. 4 is a schematic explanatory diagram showing still another embodiment of the present invention.

In this embodiment, an acceleration big amplifier 2C that detects the acceleration is attached to a part of the XY table 8 as an external detection device, and abnormalities can be automatically detected and diagnosed due to excessive fluctuations in acceleration due to the movement of the XY table 8. It is something that can be done.

[Embodiment 5] FIG. 5 is a schematic explanatory diagram of still another embodiment of the present invention.

Embodiment 5 uses a microphone 2d as a detection device for detecting the sound generated when the XY table 8 moves, and the presence or absence of an abnormality can be detected based on whether the sound is normal or excessive.

Furthermore, examples of the present invention are listed below.

(1) It has means for detecting the operating state or state change of the target mechanism and recording it as data, and means for comparing the data with pre-recorded reference data, and based on the result of the comparison, Diagnostic method and device for diagnosing the operating state or state change of a mechanism.

(2) A diagnostic method and device using quantized data of the operating state or state change of a mechanism as the data in the previous item (11).

(3) Furthermore, as the data in the above il+, quantized data of the operating state or state change of the mechanism is used, and characteristic parts of the operating state or state change of the mechanism are extracted. Diagnostic methods and devices.

(4) Furthermore, as the data in the preceding item fil, there is a diagnostic method and apparatus in which frequency analysis is performed on the detection results of the operating state or state change of the mechanism.

(5) means for detecting the operating state or state change of the target mechanism and recording it as data; means for comparing the data with pre-recorded reference data; and based on the comparison result, the operating state of the mechanism. or means for adjusting or controlling state changes, and diagnosing the operating state or state change of the mechanism based on the comparison result.

(6) means for detecting the operating state or state change of the target mechanism and recording it as data; a means for comparing the data with pre-recorded reference data; A diagnostic method and device for diagnosing the operating state or state change of a target mechanism, comprising a physical input means for applying an input, and a means for detecting the operating state or state change of the target mechanism by applying the input.

(7) A diagnostic method and device characterized in that the physical input described in the preceding item (6) is electricity, heat, sound, position, weight, shape, or light.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

For example, as the detection device, various devices other than those described above can be used, such as a displacement sensor, a strain gauge, and a temperature sensor.

Furthermore, the actual signal data of the object is not limited to when the object is in operation, but may also be an output obtained in other conditions, such as when vibrations are applied by an exciter.

In the above description, the invention made by the present inventor was mainly applied to the wire bonder, berent bonder, and reduction projection exposure apparatus, which are the background fields of application of the invention, but the invention is not limited to this, for example, It can be widely applied to a variety of devices, including those that rotate at high speeds such as spindles and motors, and those that operate under heavy loads.

〔Effect of the invention〕

A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

That is, it is possible to automatically determine the presence or absence of an abnormality in the target object according to the difference between the reference signal data and the actual signal data, automatically perform desired control, and realize automatic diagnosis of the target object.

[Brief explanation of drawings]

FIG. 1 is a block diagram of a diagnostic device that is an embodiment of the present invention, FIG. 2 is a schematic explanatory diagram in which the present invention is applied to a wire bonder, and FIGS. It is a schematic explanatory view of an example. DESCRIPTION OF SYMBOLS 1...Target, 1a...Motor, 2...Detection device, 2a...Rotary encoder, 2b...Speed detector (tachogenerator), 2c...Acceleration pink up, 2d... - Microphone, 3... Actual signal processing device, 4... Actual signal data recording device, 5... Microprocessor unit (MPU), 6... Reference signal data recording device, 7... Input/output device , 8... XY table, 9... Bonding head, 10... Bonding arm, 11... Frame feeder, 12...
・Lead frame, 13...TV camera, 14...
Pattern recognition device, 15... Z-axis control unit, 16...
XY axis control section, 17...its. Agent: Patent Attorney Katsoo Ogawa Figure 1

Claims (1)

[Claims] 1. Reference signal data representing the operating state or state change of the object is recorded in advance, and the actual signal data of the corresponding part of the object to be operated is detected to generate the recorded reference signal data. A diagnostic method characterized in that when the difference between both data exceeds a predetermined set value, it is determined to be abnormal and the operation of the object is automatically controlled. 2. The diagnostic method according to claim 1, wherein the detection of the actual signal data is performed directly on the drive unit of the object. 3. The diagnostic method according to claim 1, wherein the detection of the actual signal data is performed externally with respect to the object. 4. Claim 1, wherein the detection of the actual signal data is performed by detecting the sound generated from the object.
Diagnostic method described in section. 5. The diagnostic method according to claim 1, wherein the comparison between the reference signal data and the actual signal data is performed by direct comparison of signal levels. 6. The diagnostic method according to claim 1, wherein the comparison between the reference signal data and the actual signal data is performed by comparing signal levels in the frequency domain based on the signal after signal pre-processing. 7. The diagnosis according to claim 1, wherein the comparison between the reference signal data and the actual signal data is performed based on an output obtained by applying a predetermined input to the object in a non-operating state. Method. 8. Reference signal data recording means for recording reference signal data representing the operating state or state change of the object; detection means for detecting actual signal data of a corresponding part of the object to be operated; an actual signal data recording means for recording the actual signal data, and compares the reference signal data and the actual signal data, and if the difference between the two data exceeds a predetermined set value, it is determined that there is an abnormality and the operation of the object is controlled. A diagnostic device comprising a control means for 9. The diagnostic device according to claim 8, wherein the detecting means is a detecting means that is directly attached to the drive section of the object and directly detects the driving state. 10. The diagnostic device according to claim 8, wherein the detection means is a detection means for detecting the operating state of the object from outside the object. 11. The diagnostic device according to claim 8, wherein the detection means is a detection means for detecting sound generated from an object. 12. The diagnostic device according to claim 8, wherein the detection means is a detection means that provides an input to an object in a non-operating state to obtain an output signal as actual signal data. 13. The diagnostic device according to claim 8, further comprising signal preprocessing means for preprocessing real signal data obtained from the object. 14. It has means for detecting the operating state or state change of the target mechanism and recording it as data, and means for comparing the data with pre-recorded reference data, and based on the result of the comparison, the A diagnostic device that diagnoses operating conditions or changes in conditions. 15. The diagnostic device according to claim 14, wherein the data is quantized data of the operating state or state change of the mechanism. 16. A patent claim characterized in that the data is quantized data of the operating state or state change of the mechanism, and the data is extracted from the operating state or state change of the mechanism. The diagnostic device according to item 14. 17. The diagnostic device according to claim 14, wherein the data is frequency-analyzed results of detection of the operating state or state change of the mechanism. 18. Means for detecting the operating state or state change of the target mechanism and recording it as data; means for comparing the data with pre-recorded reference data; and based on the comparison result, the operating state or state of the mechanism. and means for adjusting or controlling the change, the diagnostic device diagnosing the operating state or state change of the mechanism based on the result of the comparison. 19. A means for detecting the operating state or change in state of the target mechanism and recording it as data, a means for comparing the data with pre-recorded reference data, and a means for applying a specific physical input to the target mechanism. a physical input means for applying;
A diagnostic device for diagnosing the operating state or state change of the target mechanism, comprising means for detecting the operating state or state change of the target mechanism by the input application. 20. The diagnostic device according to claim 19, wherein the physical input is electricity, heat, sound, position, weight, shape, or light. 21. The diagnostic device according to claim 19, characterized in that quantized data of the operating state or state change of the mechanism is used as the data. 22. A patent claim characterized in that the data is quantized data of the operating state or state change of the mechanism, and the data is extracted from the operating state or state change of the mechanism. The diagnostic device according to item 19. 23. The diagnostic device according to claim 19, wherein the data is frequency analysis of the detection results of the operating state or state change of the mechanism.