JPS62216412A - Thin film electrode for piezoelectric substrate - Google Patents
Thin film electrode for piezoelectric substrateInfo
- Publication number
- JPS62216412A JPS62216412A JP5873086A JP5873086A JPS62216412A JP S62216412 A JPS62216412 A JP S62216412A JP 5873086 A JP5873086 A JP 5873086A JP 5873086 A JP5873086 A JP 5873086A JP S62216412 A JPS62216412 A JP S62216412A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- thin film
- parts
- electrodes
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 25
- 239000010409 thin film Substances 0.000 title claims abstract description 24
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 19
- 230000002093 peripheral effect Effects 0.000 claims abstract description 16
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000010897 surface acoustic wave method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
圧電基板上のアルミニュム薄膜電極において、周縁長の
大きい電極形状をえることにより、基板との接着強度の
高い電極周縁部を多くすることにより、安定な電極を基
板上に作り、得られる装置の特性を安定化させるもので
ある。[Detailed Description of the Invention] [Summary] In an aluminum thin film electrode on a piezoelectric substrate, by obtaining an electrode shape with a large peripheral length, and by increasing the electrode peripheral portion with high adhesive strength with the substrate, a stable electrode can be obtained. It is made on a substrate and stabilizes the characteristics of the resulting device.
本発明は圧電基板の薄膜電極の改良に関する。 The present invention relates to improvements in thin film electrodes for piezoelectric substrates.
圧電材料からなる基板上にアルミニュムの薄膜電極を設
けた装置、例えば弾性表面波装置においては、圧電基板
、例えば水晶基板にアルミニュム薄膜電極を強固に設け
ることは装置の特性を安定化するために望ましい。In a device in which an aluminum thin film electrode is provided on a substrate made of piezoelectric material, such as a surface acoustic wave device, it is desirable to firmly provide the aluminum thin film electrode on the piezoelectric substrate, such as a quartz substrate, in order to stabilize the characteristics of the device. .
例えば弾性表面波装置において、圧電基板上にアルミニ
ュム薄膜電極を設けた従来装置の構成が第２図に示され
る。電極はその面積に比較して周縁長の大きな交叉指電
極部５とその面積に比較して周縁長の小さい共通電極部
１．２．３．４を備えている。For example, in a surface acoustic wave device, the structure of a conventional device in which an aluminum thin film electrode is provided on a piezoelectric substrate is shown in FIG. The electrodes include a cross-finger electrode section 5 having a large circumferential length compared to its area and a common electrode section 1.2.3.4 having a small circumferential length compared to its area.
弾性表面波装置はフィルタとして用いられ、左右対象的
に設けた正電位の与えられた２個の共通電極１．２と地
気の与えられた２個の共通電極３．４をもつ。また信号
は共通電極１から与えられ他方の共通電極２から取出さ
れる。The surface acoustic wave device is used as a filter and has two common electrodes 1.2 symmetrically provided with a positive potential and two common electrodes 3.4 provided with earth air. Further, a signal is applied from the common electrode 1 and taken out from the other common electrode 2.
交叉指電極部５は入出カドランスジューサにフィルタ特
性を与える。The interdigitated electrode section 5 provides filter characteristics to the input and output quadrant transducers.
フィルタ特性は交叉指電極部の機械的なＭＮ、交叉幅、
ピッチ等の値により変化する。The filter characteristics are the mechanical MN of the intersecting finger electrodes, the intersecting width,
It changes depending on the value of pitch etc.
所望の周波数特性を得るため、交叉指電極はＭ量の小さ
いことが必要で、アルミニュム薄膜が電極材料として使
用される。In order to obtain desired frequency characteristics, it is necessary that the interdigitated electrode has a small amount of M, and an aluminum thin film is used as the electrode material.
また、アルミニュム薄膜に精密な電極形状を与えるため
、水晶基板上にアルミニュム薄膜を設けた後、化学的エ
ツチングによって所定の形状を与える。Furthermore, in order to give the aluminum thin film a precise electrode shape, the aluminum thin film is provided on a quartz substrate and then chemically etched to give it a predetermined shape.
上記の手法にてつくられる弾性表面波フィルタは特に共
通電極部分が不安定となり、はがれを生じ電極の断線、
フィルタ特性の喪失、あるいはアルミニュム薄膜の腐食
や剥離が原因として交叉指電極に悪影響が及ぼされるこ
とがある。そのためにフィルタの周波数特性に変動を生
じ、周波数変移を発生する等の欠点がある。Surface acoustic wave filters made using the above method are unstable, especially at the common electrode part, which can cause peeling, disconnection of the electrodes, and
The interdigitated electrodes may be adversely affected due to loss of filter properties or due to corrosion or peeling of the aluminum film. Therefore, there are drawbacks such as fluctuations in the frequency characteristics of the filter and frequency shifts.
上記の問題点は、
周縁長の小さいアルミニュム薄欣からなる１極部をその
周縁長が増大する様に編目構成とした本発明による圧電
基板の薄膜電極によって解決される。The above-mentioned problems are solved by the thin film electrode of the piezoelectric substrate according to the present invention, which has a one-pole portion made of a thin aluminum rod with a small peripheral edge length and has a mesh structure so that the peripheral edge length increases.
圧電基板上に設けたアルミニュム薄肋電極はアルミニュ
ウム電極の周縁部においては基板との結合が他の結合部
分に比較して極めて強固である。In the thin aluminum rib electrode provided on the piezoelectric substrate, the bonding to the substrate at the peripheral edge of the aluminum electrode is extremely strong compared to other bonding portions.
これは完成されたアルミニュム薄膜電極をエツチングに
よって強制的に剥脱する実験によって確認された。従っ
てアルミニュム薄膜電極を編目構成にすることにより、
面積との関係において周縁長の小さな電極部を無くすこ
とにより総ての電極部において基板との接着性を強化し
、特性の良好な装置を提供することを可能にする。This was confirmed by an experiment in which a completed aluminum thin film electrode was forcibly removed by etching. Therefore, by making the aluminum thin film electrode into a mesh structure,
By eliminating electrode portions with small peripheral lengths in relation to area, it is possible to strengthen the adhesion to the substrate in all electrode portions and provide a device with good characteristics.
図示実施例に従い本発明を説明する。 The present invention will be explained according to the illustrated embodiments.
第１図は本発明一実施例における圧電基板の薄膜電極平
面図である。FIG. 1 is a plan view of a thin film electrode on a piezoelectric substrate in one embodiment of the present invention.
図において１１〜１４は共通電極を示し、６は電極内に
設けた電極大部であり、共通電極１１〜１４の周縁長を
拡大するために電極薄膜に設けられる。In the figure, reference numerals 11 to 14 indicate common electrodes, and 6 indicates a large portion of the electrode provided within the electrode, which is provided on the electrode thin film in order to enlarge the peripheral length of the common electrodes 11 to 14.
本発明により電極面積に比較して周縁長の少ない電極部
はその電極内に設けた大部により編目構造を与えられ、
基板と結合した電極周縁部を増加され周縁長が大にされ
る。According to the present invention, an electrode portion having a small peripheral length compared to the electrode area is given a mesh structure by the large portion provided within the electrode,
The peripheral edge of the electrode coupled to the substrate is increased to increase the peripheral length.
本発明は圧電基板に設けたアルミニュム薄膜電極の剥離
を阻止し、安定した圧電基板の薄膜電極を提供するもの
であり、その作用効果は極めて大きい。The present invention prevents peeling of an aluminum thin film electrode provided on a piezoelectric substrate and provides a stable thin film electrode of a piezoelectric substrate, and its effects are extremely large.
第１図は本発明一実施例における圧電基板の薄膜電極平
面図、
第２図は従来の弾性表面波装置の圧電基板の薄膜電極平
面図である。
図において、
１．２，３，４．１１．１２，１３．１４は共通電極部
、５は交叉指電極部、
６は電極大部を示す。FIG. 1 is a plan view of a thin film electrode on a piezoelectric substrate in an embodiment of the present invention, and FIG. 2 is a plan view of a thin film electrode on a piezoelectric substrate of a conventional surface acoustic wave device. In the figure, 1.2, 3, 4.11.12, 13.14 are common electrode parts, 5 is a crossed finger electrode part, and 6 is a large part of the electrodes.
Claims (1)
る電極部（１１〜１４）を備えてなることを特徴とする
圧電基板の薄膜電極。A thin film electrode for a piezoelectric substrate, characterized in that it is provided with an electrode part (11 to 14) made of an aluminum thin film having a shape with an increased peripheral length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5873086A JPS62216412A (en) | 1986-03-17 | 1986-03-17 | Thin film electrode for piezoelectric substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5873086A JPS62216412A (en) | 1986-03-17 | 1986-03-17 | Thin film electrode for piezoelectric substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62216412A true JPS62216412A (en) | 1987-09-24 |
Family
ID=13092618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5873086A Pending JPS62216412A (en) | 1986-03-17 | 1986-03-17 | Thin film electrode for piezoelectric substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62216412A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0526728A2 (en) * | 1991-07-05 | 1993-02-10 | Murata Manufacturing Co., Ltd. | Piezoelectric element |
-
1986
- 1986-03-17 JP JP5873086A patent/JPS62216412A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0526728A2 (en) * | 1991-07-05 | 1993-02-10 | Murata Manufacturing Co., Ltd. | Piezoelectric element |
| EP0526728A3 (en) * | 1991-07-05 | 1994-05-18 | Murata Manufacturing Co | Piezoelectric element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW425758B (en) | Surface acoustic wave device | |
| JP3339350B2 (en) | Surface acoustic wave device | |
| JPS6146609A (en) | Piezoelectric vibrator | |
| JP2002176333A (en) | Surface acoustic wave filter | |
| JPS60137112A (en) | Piezoelectric vibrator | |
| JPS62216412A (en) | Thin film electrode for piezoelectric substrate | |
| JP3106912B2 (en) | Method of manufacturing edge reflection type surface acoustic wave device | |
| JPH0646692B2 (en) | Surface acoustic wave resonator | |
| JP2855208B2 (en) | LiTaO 3 Lower piezoelectric resonator | |
| JPH0215390Y2 (en) | ||
| JPS6142447B2 (en) | ||
| JPH10126208A (en) | Surface acoustic wave device | |
| JPH02250413A (en) | Surface acoustic wave device | |
| JPH02260908A (en) | Surface acoustic wave device | |
| JP3127018B2 (en) | Leaky SAW resonator | |
| JPH07231238A (en) | Surface acoustic wave converter | |
| JPH0421205A (en) | Manufacture of surface acoustic wave device | |
| JPS6050077B2 (en) | Method for manufacturing surface acoustic wave devices | |
| US20040021530A1 (en) | Surface acoustic wave device | |
| JP2539549B2 (en) | Surface acoustic wave filter | |
| JPS584256Y2 (en) | surface acoustic wave device | |
| JPS62220012A (en) | Piezoelectric vibration element | |
| JPS5852370B2 (en) | surface acoustic wave device | |
| JPH02230809A (en) | Surface acoustic wave device | |
| JPS63126400A (en) | Diaphragm for speaker |