JPS6221530U - - Google Patents
Info
- Publication number
- JPS6221530U JPS6221530U JP16499984U JP16499984U JPS6221530U JP S6221530 U JPS6221530 U JP S6221530U JP 16499984 U JP16499984 U JP 16499984U JP 16499984 U JP16499984 U JP 16499984U JP S6221530 U JPS6221530 U JP S6221530U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- wafer
- cover
- ion implantation
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000002513 implantation Methods 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499984U JPS6221530U (enExample) | 1984-10-30 | 1984-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499984U JPS6221530U (enExample) | 1984-10-30 | 1984-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6221530U true JPS6221530U (enExample) | 1987-02-09 |
Family
ID=31094630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16499984U Pending JPS6221530U (enExample) | 1984-10-30 | 1984-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221530U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03148411A (ja) * | 1989-09-12 | 1991-06-25 | Kohan Kogyo Kk | シート梱包結束機の横木供給方法とその装置 |
-
1984
- 1984-10-30 JP JP16499984U patent/JPS6221530U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03148411A (ja) * | 1989-09-12 | 1991-06-25 | Kohan Kogyo Kk | シート梱包結束機の横木供給方法とその装置 |