JPS62214300A - Rotating body made of ceramics - Google Patents
Rotating body made of ceramicsInfo
- Publication number
- JPS62214300A JPS62214300A JP5506186A JP5506186A JPS62214300A JP S62214300 A JPS62214300 A JP S62214300A JP 5506186 A JP5506186 A JP 5506186A JP 5506186 A JP5506186 A JP 5506186A JP S62214300 A JPS62214300 A JP S62214300A
- Authority
- JP
- Japan
- Prior art keywords
- rotating body
- ceramic
- turbine blade
- shaped member
- driving shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 125000006850 spacer group Chemical group 0.000 abstract description 2
- 239000002184 metal Substances 0.000 description 6
- 239000002861 polymer material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はターボ分子ポンプ等に使用するセラミックス製
回転体に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a ceramic rotating body used in a turbo-molecular pump or the like.
（従来の技術）
従来のターボ分子ポンプを第２図により説明すると、（
１）が回転体、 （ｌａ）が同回転体（１）の駆動軸、
（６）が同駆動軸（１ａ）に取付けたガスタービンブレ
ード、 （２ａ） （２ｂ）が上記回転体（１）を取り
囲むケーシング、 （３）（４）が上記駆動軸（１ａ）
の周りの上記ケーシング（２ｂ）内に設けたラジアル方
向の多孔質金属製ガスベアリング、（５）が上記ガスタ
ービンブレード（６）上下の上記ケーシング（２ｂ）内
に設けたスラスト方向の多孔質金属製ガスベアリング。(Prior Art) A conventional turbomolecular pump will be explained with reference to FIG.
1) is the rotating body, (la) is the drive shaft of the rotating body (1),
(6) is a gas turbine blade attached to the drive shaft (1a), (2a) and (2b) are casings surrounding the rotating body (1), (3) and (4) are the drive shaft (1a).
A porous metal gas bearing (5) in the radial direction provided in the casing (2b) around the gas turbine blade (6), and a porous metal gas bearing (5) in the thrust direction provided in the casing (2b) above and below the gas turbine blade (6). Made of gas bearings.
（３ａ）が上記多孔質金属製ガスベアリング（３）の背
後の上記ケーシング（２ｂ）を貫通したガス導入孔。(3a) is a gas introduction hole passing through the casing (2b) behind the porous metal gas bearing (3).
（４ａ）が上記多孔質金属製ガスベアリング（４）の背
後の上記ケーシング（２ｂ）を貫通したガス導入孔。(4a) is a gas introduction hole passing through the casing (2b) behind the porous metal gas bearing (4).
（５ａ）が上記多孔質金属製ガスベアリング（５）の背
後の上記ケーシング（２ｂ）を貫通したガス導入孔。(5a) is a gas introduction hole passing through the casing (2b) behind the porous metal gas bearing (5).
（７）が上記ガスベアリング部と吐出側真空室（８）と
を遮断するシール部材で、ガスをガス導入孔（３ａ）
（４ａ） （５ａ）から多孔質金属製ガスベアリング（
３）（４） （５）を経てケーシング（２ｂ）内へ噴出
して、駆動軸（ｌａ）及び回転体（１）を回転可能に支
持する一方、ガスをケーシング（２ｂ）に設けたタービ
ンガス供給孔（図示せず）−ガスタービンブレード（６
）部−ケーシング（２ｂ）に設けたタービンガス吐出孔
（図示せず）に通過させて、駆動軸（１ａ）及び回転体
（１）を両速回転させ、矢印（ＡＩ）−（Δ２）方向に
向かう排気作用を生じさせて、（Δ１）側に高真空を発
生させるようになっている。(7) is a sealing member that isolates the gas bearing part and the discharge side vacuum chamber (8), and the gas is introduced into the gas introduction hole (3a).
(4a) From (5a) to porous metal gas bearing (
3) (4) The turbine gas is injected into the casing (2b) through (5) and rotatably supports the drive shaft (la) and the rotating body (1), while the gas is provided in the casing (2b). Supply hole (not shown) - Gas turbine blade (6
) section - passing through the turbine gas discharge hole (not shown) provided in the casing (2b), and rotating the drive shaft (1a) and the rotating body (1) at both speeds in the direction of the arrow (AI) - (Δ2) The system is designed to generate a high vacuum on the (Δ1) side by causing an evacuation action toward the (Δ1) side.
（発明が解決しようとする問題点）
前記第２図に示した従来のターボ分子ポンプの回転体（
１）をセラミックスで製作する場合１回転体（１）の構
造が複雑な上に、製作方法に制約があって２回転体（１
）をセラミックスで製作するのが困難であった。(Problems to be Solved by the Invention) The rotating body of the conventional turbo molecular pump shown in FIG.
When manufacturing 1) with ceramics, the structure of the 1-rotator (1) is complicated, and there are restrictions on the manufacturing method.
) was difficult to manufacture from ceramics.
（問題点を解決するための手段）
本発明は前記の問題点に対処するもので、複数個のセラ
ミックス製部品を組み付け且つ同各部品を延性の高い高
分子材料等よりなる結合材を介して結合したことを特徴
とするセラミックス製回転体に係わり、その目的とする
処は１強度が高くしかも構造の複雑なセラミックス製回
転体を供する点にある。(Means for Solving the Problems) The present invention addresses the above-mentioned problems by assembling a plurality of ceramic parts and bonding each part through a bonding material made of a highly ductile polymeric material or the like. Regarding a ceramic rotating body characterized by a bonded structure, the object is to provide a ceramic rotating body with high strength and a complicated structure.
（作用）
本発明のセラミックス製回転体は前記のように複数個の
セラミックス製部品を組み付けて構成するので、構造の
複雑な回転体でも製作可能になる。(Function) Since the ceramic rotating body of the present invention is constructed by assembling a plurality of ceramic parts as described above, even a rotating body with a complicated structure can be manufactured.
また複数個のセラミックス製部品同士を直接結合すると
２強度を要求される結合面に局部的な高応力部が発生し
て６回転体の強度が低下するが１本発明のセラミックス
製回転体は前記のように延性の晶い高分子材料等よりな
る′結合材を介して各部品を結合するので、各部品の結
合面に高応力部が発生しない。Furthermore, when a plurality of ceramic parts are directly joined to each other, localized high stress areas are generated on the joining surfaces that require two strengths, reducing the strength of the six-rotating body. Since each part is joined through a bonding material made of a ductile crystalline polymer material, no high stress portion is generated on the joint surface of each part.
（実施例）
次に本発明のセラミックス製回転体を第１図に示す一実
施例により説明すると、 （ｌａ）が同回転体・（第２
図の（１）参照）のセラミックス製駆動軸で。(Example) Next, the ceramic rotating body of the present invention will be explained using an example shown in FIG.
(See (1) in the figure) with a ceramic drive shaft.
同駆動軸（ｌａ’）には、内孔が設けられ、同内孔の内
周面には、ねじが刻設されている。また（６）が同駆動
軸（ｌａ）に取付けられるセラミックス製ガスタービン
ブレード、（１１）が延性の高い高分子材料製ボルト状
部材で、同ボルト状部材（１１）の先端部には、ねじが
刻設されている。また（９）が延性の高い高分子材料製
ナツト状部材で、同ナツト状部材（９）の内外周面には
、ねじが刻設されている。また（１０）が延性の高い高
分子材料製スペーサである。The drive shaft (la') is provided with an inner hole, and a screw is carved into the inner peripheral surface of the inner hole. In addition, (6) is a ceramic gas turbine blade that is attached to the drive shaft (la), and (11) is a bolt-like member made of a highly ductile polymer material. is engraved. Further, (9) is a nut-shaped member made of a highly ductile polymeric material, and threads are carved on the inner and outer peripheral surfaces of the nut-shaped member (9). Further, (10) is a spacer made of a highly ductile polymer material.
前記第１図に示すセラミックス製回転体を組み立てると
きには、まず高分子材料製ナツト状部材（９）をセラミ
ックス製駆動軸（１ａ）の内周面に螺合し１次いで高分
子材料製スペーサ（１０）を介してセラミックス製ガス
タービンブレード（６）をセラミックス製駆動軸（ｌａ
）の下端面に当てがい１次いで高分子材料製ボルト状部
材（１１）を上記高分子材料゛製ナツト状部材（９）に
螺合して、上記セラミックス製ガスタービンブレード（
６）を上記セラミックス製駆動軸（１ａ）に締付け固定
する。なお上記各ねじ面は接着剤により接着してもよい
。When assembling the ceramic rotating body shown in FIG. ) is connected to the ceramic gas turbine blade (6) via the ceramic drive shaft (la
A bolt-like member (11) made of a polymeric material is then screwed onto the lower end surface of the ceramic gas turbine blade (
6) is tightened and fixed to the ceramic drive shaft (1a). Note that each of the above threaded surfaces may be bonded with an adhesive.
（発明の効果）
本発明のセラミックス製回転体は前記のように複数個の
セラミックス製部品を組み付けて構成するので、構造の
複雑な回転体でも製作できる。また複数個のセラミック
ス製部品同士を直接結合すると２強度を要求される結合
面に局部的な高応力部が発生して２回転体の強度が低下
するが１本発明のセラミックス製回転体は前記のように
延性の高い高分子材料等よりなる結合材を介して各部品
を結合するので、各部品の結合面に高応力部が発生しな
くて１強度の高いセラミックス製回転体を得られる効果
がある。(Effects of the Invention) Since the ceramic rotating body of the present invention is constructed by assembling a plurality of ceramic parts as described above, even a rotating body with a complicated structure can be manufactured. Furthermore, when a plurality of ceramic parts are directly connected to each other, localized high stress areas are generated on the joining surfaces that require two-strength, reducing the strength of the two-rotating body. Since each part is joined through a bonding material made of a highly ductile polymeric material, etc., high stress areas do not occur on the joint surfaces of each part, and a ceramic rotating body with high strength can be obtained. There is.
以上本発明を実施例により説明したが、勿論本発明はこ
のような実施例だけに局限されるものでなく２本発明の
精神を逸脱しない範囲で種々の設計の改変を施しうるち
のである。Although the present invention has been described above with reference to embodiments, it goes without saying that the present invention is not limited to these embodiments, and can be modified in various ways without departing from the spirit of the present invention.
第１図は本発明に係わるセラミックス製回転体の一実施
例を示す縦断側面図、第２図は従来のターボ分子ポンプ
を示す縦断側面図である。
（ｌａ） （６） ・・・セラミックス製部品、 （
９） （１０） （１１）・・・延性の高い高分子材料
等よりなる結合材。
復代理人弁理士岡本重文他２名
第２図
民FIG. 1 is a longitudinal side view showing an embodiment of a ceramic rotating body according to the present invention, and FIG. 2 is a longitudinal side view showing a conventional turbo molecular pump. (la) (6) ... Ceramic parts, (
9) (10) (11)...Binding material made of a highly ductile polymer material, etc. Sub-Agent Patent Attorney Shigefumi Okamoto and 2 others 2nd figure Min
Claims (1)
延性の高い高分子材料等よりなる結合材を介して結合し
たことを特徴とするセラミックス製回転体。A ceramic rotating body characterized by assembling a plurality of ceramic parts and bonding the parts through a bonding material made of a highly ductile polymeric material or the like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61055061A JPH0612117B2 (en) | 1986-03-14 | 1986-03-14 | Ceramic rotating body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61055061A JPH0612117B2 (en) | 1986-03-14 | 1986-03-14 | Ceramic rotating body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62214300A true JPS62214300A (en) | 1987-09-21 |
| JPH0612117B2 JPH0612117B2 (en) | 1994-02-16 |
Family
ID=12988168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61055061A Expired - Fee Related JPH0612117B2 (en) | 1986-03-14 | 1986-03-14 | Ceramic rotating body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612117B2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6026197A (en) * | 1983-07-21 | 1985-02-09 | Asahi Glass Co Ltd | Turbo machine and blade wheel chip |
| JPS60108796U (en) * | 1983-12-26 | 1985-07-24 | 日本碍子株式会社 | Corrosion-resistant leak-free pump |
-
1986
- 1986-03-14 JP JP61055061A patent/JPH0612117B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6026197A (en) * | 1983-07-21 | 1985-02-09 | Asahi Glass Co Ltd | Turbo machine and blade wheel chip |
| JPS60108796U (en) * | 1983-12-26 | 1985-07-24 | 日本碍子株式会社 | Corrosion-resistant leak-free pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0612117B2 (en) | 1994-02-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |