JPS6221390Y2 - - Google Patents
Info
- Publication number
- JPS6221390Y2 JPS6221390Y2 JP17520082U JP17520082U JPS6221390Y2 JP S6221390 Y2 JPS6221390 Y2 JP S6221390Y2 JP 17520082 U JP17520082 U JP 17520082U JP 17520082 U JP17520082 U JP 17520082U JP S6221390 Y2 JPS6221390 Y2 JP S6221390Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic chuck
- face plate
- pressure fluid
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 19
- 230000010287 polarization Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17520082U JPS5978034U (ja) | 1982-11-19 | 1982-11-19 | 磁気チヤツク用分極板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17520082U JPS5978034U (ja) | 1982-11-19 | 1982-11-19 | 磁気チヤツク用分極板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5978034U JPS5978034U (ja) | 1984-05-26 |
| JPS6221390Y2 true JPS6221390Y2 (enrdf_load_stackoverflow) | 1987-05-30 |
Family
ID=30381221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17520082U Granted JPS5978034U (ja) | 1982-11-19 | 1982-11-19 | 磁気チヤツク用分極板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5978034U (enrdf_load_stackoverflow) |
-
1982
- 1982-11-19 JP JP17520082U patent/JPS5978034U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5978034U (ja) | 1984-05-26 |
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