JPS62213398A - Vibrator device - Google Patents
Vibrator deviceInfo
- Publication number
- JPS62213398A JPS62213398A JP5583386A JP5583386A JPS62213398A JP S62213398 A JPS62213398 A JP S62213398A JP 5583386 A JP5583386 A JP 5583386A JP 5583386 A JP5583386 A JP 5583386A JP S62213398 A JPS62213398 A JP S62213398A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- diaphragm
- ceramic
- pattern
- conductive pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 abstract description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 abstract description 3
- 229910002113 barium titanate Inorganic materials 0.000 abstract description 3
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- 230000010287 polarization Effects 0.000 abstract description 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）発明の分野
この発明は、例えばアコースティックエミッション（ａ
ｃｏｕｓｔｉｃ ｅｍｉｓｓｉｏｎ ）信号を検知する
ＡＥセンサや超音波発振体として用いられるような振動
子装置に関する。Detailed Description of the Invention (a) Field of the Invention This invention relates to acoustic emission (a)
The present invention relates to a transducer device used as an AE sensor or an ultrasonic oscillator that detects acoustic emission) signals.
（０）発明の背景
従来、上述例の振動子装置とし又は、例えば、次の如き
構造の装置がある。(0) Background of the Invention Conventionally, there is a vibrator device as described above, or, for example, a device having the following structure.
すなわら、半導性ヂタン酸バリウム焼結体などからなる
円柱状の圧電素子の表央両面に振動子電極を一体的形成
した振動子を設け、この振動子をアルミナ（Ａ、Ｑ ２
０３ ）製の振動板に接着固定すると共に、上述の振動
子にリード線を介して回路部を電気接続した振動子装置
である。In other words, a cylindrical piezoelectric element made of semiconducting barium ditanate sintered body, etc. is provided with a vibrator having vibrator electrodes integrally formed on both sides of the front and center, and this vibrator is made of alumina (A, Q2).
This is a vibrator device which is adhesively fixed to a diaphragm manufactured by 03) and has a circuit section electrically connected to the above-mentioned vibrator via a lead wire.
この振動子装置は、電気エネルギを振動エネルギに変換
したり或は振動エネルギを電気エネルギに変換するのに
用いられるが、上述した従来構造の振動子装置では、次
の如き問題点があった。This vibrator device is used to convert electrical energy into vibration energy or vice versa, but the vibrator device having the conventional structure described above has the following problems.
つまり、前述の振動子と回路部とがリード線によ結線さ
れているため、特にリード線長さに対応してノイズによ
る雑音障害が大となり、Ｓ／Ｎ比が悪化すると共に、リ
ード線長さに比例して線間容量が大きくなるので、回路
の入力電圧が減衰する問題点を有していた。In other words, since the above-mentioned vibrator and circuit section are connected by lead wires, the noise disturbance due to noise becomes large depending on the length of the lead wires, the S/N ratio deteriorates, and the length of the lead wires increases. Since the line capacitance increases in proportion to the line capacitance, there is a problem in that the input voltage of the circuit is attenuated.
（ハ）発明の目的
この発明は、Ｓ／Ｎ比の向上を図ると共に、入力電圧の
減衰を抑止することができる振動子装置の提供を目的と
する。(C) Purpose of the Invention The purpose of the present invention is to provide a vibrator device that can improve the S/N ratio and suppress attenuation of input voltage.
（ニ）発明の要約
この発明は、振動板上に導電パターンを一体形成し、こ
の振動板に振動子を直接取付けた振動子装置であること
を特徴とする特
（ホ）発明の効果
この発明によれば、同一の振動板上に−り述の振動子と
ｅｌｆパターンとを形成しているので、振動子と回路部
としての導電パターンとの間の離間距離を最小限に設定
して、これら両者間の距離を従来のリード線による装置
と比例して大幅に短縮することができるので、Ｓ／Ｎ比
の向上を図ることができると共に、回路の入力電圧の減
衰を抑止することができる効果がある。(D) Summary of the Invention This invention is a vibrator device in which a conductive pattern is integrally formed on a diaphragm, and a vibrator is directly attached to this diaphragm.Special features (e) Effects of the Invention This invention According to , since the above-mentioned vibrator and elf pattern are formed on the same diaphragm, the distance between the vibrator and the conductive pattern as a circuit section is set to the minimum, Since the distance between these two can be significantly shortened in proportion to conventional devices using lead wires, it is possible to improve the S/N ratio and prevent attenuation of the input voltage of the circuit. effective.
加えて、撮動板と回路基板とを共用することで単一板上
に導電パターンと振動子とを形成することができて、装
置の小型軽傷化および製造工程の短縮を図ることができ
る効果がある。In addition, by sharing the imaging board and the circuit board, a conductive pattern and a vibrator can be formed on a single board, which has the effect of reducing the size of the device and shortening the manufacturing process. There is.
（へ）発明の実施例 この発明の一実施例を以下図面に基づいて詳述する。(f) Examples of the invention An embodiment of the present invention will be described in detail below based on the drawings.
図面は撮動子装置を示し、第１図、第２図において、ア
ルミナ（ＡｆＩ２０３ ）などのセラミックからなる偏
平な円盤状のセラミック振動板１の上面には、厚膜印刷
手段に基づいて導電パターン２および抵抗体パターン３
を形成し、これら両パターン２．３により回路部４を構
成している。The drawings show an image sensor device, and in FIGS. 1 and 2, a conductive pattern is printed on the upper surface of a flat disk-shaped ceramic diaphragm 1 made of ceramic such as alumina (AfI203). 2 and resistor pattern 3
These two patterns 2.3 constitute the circuit section 4.
また上述のセラミック撮動板１の上面はぼ中央部には、
上述の導電パターン２を延長して振動子取付パターン５
を形成している。Furthermore, in the center of the upper surface of the ceramic imaging plate 1, there is a
Transducer mounting pattern 5 is obtained by extending the conductive pattern 2 described above.
is formed.
しかも、この振動子取付パターン５には接着剤を用いて
振動子６を直接取付けている。Furthermore, the vibrator 6 is directly attached to the vibrator attachment pattern 5 using an adhesive.
この振齢子６は、例えば半導性チタン酸バリウム焼結体
などのセラミックによって円柱形状の圧電素子７を形成
し、この圧電素子７の相対向する上下両面に振動子電極
としての電極膜８．９を印刷形成し、所定の分極処理を
施しで形成し°た振動子である。This vibrator 6 has a cylindrical piezoelectric element 7 made of ceramic such as a semiconductive barium titanate sintered body, and electrode films 8 as vibrator electrodes are formed on opposing upper and lower surfaces of the piezoelectric element 7. This is a vibrator formed by printing .9 and subjecting it to a predetermined polarization process.
図示実施例は上記の如く構成するものにして、以下作用
を説明する。The illustrated embodiment is constructed as described above, and its operation will be explained below.
例えば、上述のセラミック振動板１に撮動エネルギを加
えると、振動子６は圧電素子７により、この振動エネル
ギを所定の共振周波数の電気エネルギに変換する。For example, when imaging energy is applied to the ceramic diaphragm 1 described above, the vibrator 6 uses the piezoelectric element 7 to convert this vibration energy into electrical energy at a predetermined resonance frequency.
ところで、上述のセラミック振動板１上には、撮動子６
と導電パターン２とを形成しているので、この撮動子６
と導電パターン２を含む回路部４との間の離間距離を最
小限に設定することができ、これら両者６．４間の距離
を従来のリード線による装置と比較して大幅に短縮する
ことができる。By the way, on the above-mentioned ceramic diaphragm 1, there is a camera element 6.
and the conductive pattern 2, this camera element 6
The separation distance between the circuit section 4 including the conductive pattern 2 can be set to a minimum, and the distance between the two 6.4 can be significantly shortened compared to a conventional device using lead wires. can.
この結果、ノイズによる雑音障害を防止してＳ／Ｎ比の
向上を図ることができる効果がある。As a result, it is possible to prevent noise interference due to noise and improve the S/N ratio.
また、振動子６と導電パターン２を含む回路部４との間
を結線するリード線が不要であるため、線間容量の低減
を図ることができ、回路の入力電圧の減衰を抑止するこ
とができる効果がある。Furthermore, since there is no need for a lead wire to connect the vibrator 6 and the circuit section 4 including the conductive pattern 2, it is possible to reduce the line capacitance and prevent the attenuation of the input voltage of the circuit. There is an effect that can be done.
加えて、セラミック振動板１と、上述の各パターン２，
３の回路基板とを共用することができ、単一のセラミッ
ク振動板１上に導電パターン２と感動子６とを形成する
ことができるので、装置全体の小型軽Ｍ化および製造工
程の短縮を図ることができる効果がある。In addition, the ceramic diaphragm 1 and each of the above-mentioned patterns 2,
3 can be shared, and the conductive pattern 2 and the sensor 6 can be formed on a single ceramic diaphragm 1, making the entire device smaller and lighter and shortening the manufacturing process. There are effects that can be achieved.
この発明の構成と、上述の実施例との対応において、
この発明の振動板は、実施例のセラミック振動板に対応
するも、
この発明は、上述の実施例の構成のみに限定されるもの
ではない。Regarding the correspondence between the structure of the present invention and the above-described embodiments, the diaphragm of the present invention corresponds to the ceramic diaphragm of the embodiment, but the present invention is not limited to the structure of the above-described embodiment. do not have.
例えば半導性チタン酸バリウム焼結体いわゆるＢａＴｉ
Ｏ３セラミックの圧電素子７の代わりにＰＺＴ系の他の
セラミックからなる圧電素子を用いてもよいことは勿論
である。For example, semiconducting barium titanate sintered body so-called BaTi
It goes without saying that the piezoelectric element 7 made of O3 ceramic may be replaced with a piezoelectric element made of another PZT ceramic.
図面はこの発明の一実施例を示し、 第１図は振動子装置の斜視図、 第２図は振動子装置の分解斜視図である。 １・・・セラミック振動板 The drawings show an embodiment of the invention, Figure 1 is a perspective view of the vibrator device; FIG. 2 is an exploded perspective view of the vibrator device. 1...Ceramic diaphragm
Claims (1)
に振動子を直接取付けた 振動子装置。[Scope of Claims] 1. A vibrator device in which a conductive pattern is integrally formed on a diaphragm and a vibrator is directly attached to this diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5583386A JPS62213398A (en) | 1986-03-12 | 1986-03-12 | Vibrator device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5583386A JPS62213398A (en) | 1986-03-12 | 1986-03-12 | Vibrator device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62213398A true JPS62213398A (en) | 1987-09-19 |
Family
ID=13009979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5583386A Pending JPS62213398A (en) | 1986-03-12 | 1986-03-12 | Vibrator device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62213398A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0232284A (en) * | 1988-07-21 | 1990-02-02 | Matsushita Electric Ind Co Ltd | Ultrasonic vibrator |
| WO2009078184A1 (en) * | 2007-12-19 | 2009-06-25 | Panasonic Corporation | Piezoelectric sound transducer |
-
1986
- 1986-03-12 JP JP5583386A patent/JPS62213398A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0232284A (en) * | 1988-07-21 | 1990-02-02 | Matsushita Electric Ind Co Ltd | Ultrasonic vibrator |
| WO2009078184A1 (en) * | 2007-12-19 | 2009-06-25 | Panasonic Corporation | Piezoelectric sound transducer |
| JP5279726B2 (en) * | 2007-12-19 | 2013-09-04 | パナソニック株式会社 | Piezoelectric acoustic transducer |
| US8644527B2 (en) | 2007-12-19 | 2014-02-04 | Panasonic Corporation | Piezoelectric acoustic transducer |
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