JPS6221114A - Data collecting device - Google Patents

Abstract

PURPOSE:To measure and record data without moving the eye from a microscope by providing a display means which display data in the visual field of a microscope means, a data input means which supplies display data to the display means, and a data recording means which stores the display data. CONSTITUTION:An image 3 to be observed is moved into the visual field 1 of a microscope ocular while put in focus by moving the sample table of the microscope 5. Values of the observed image 3 are read on a scale 4 and the read values are inputted on the keyboard 6a of the data input device 6 placed beside the micro-scope. The read value data inputted from the data input device 6 are transmitted through a transfer cable 9a and displayed on the data display part 2 fitted to the ocular 8. When the data input is performed correctly, a data input command key provided to the keyboard 6a of the data input device 6 is pressed. Consequently, the read values are inputted to and stored in the data recording device 7 from the data input device 6 through a data transfer cable 9b.

Description

[Detailed Description of the Invention] [Field of the Invention] The present invention relates to a data acquisition device, and in particular to a device that allows measurement data to be recorded without taking one's eyes off the microscope when performing observation, measurement, etc. using a microscope. Regarding.

[Background of the Invention] Conventionally, when observing, for example, a semiconductor wafer or a photomask using a microscope and acquiring various data, it is necessary to take one's eyes off the microscope and write the measured data on a recording sheet or the like each time the data is read. Alternatively, a person who reads data and a person who writes down the data form a pair to acquire data.

For this reason, the efficiency of the data acquisition work is extremely poor, measurement accuracy is lowered, and data acquisition requires unnecessary manpower.

[Summary and Objectives of the Invention] In view of the problems with the conventional type described above, the present invention provides a data acquisition device that allows the measurer to measure and record data without taking his or her eyes off the microscope, thereby improving data acquisition efficiency and The purpose is to improve measurement accuracy and reduce the amount of manpower required to acquire data.

In order to achieve the above object, a data acquisition device according to the present invention comprises a display means for displaying data within the field of view of a microscope means, a data input means for supplying display data to the display means, and a data input means for supplying display data to the display means. Embodiment 1 The present invention will be described in detail below with reference to the drawings.

FIG. 1 shows the inside of a microscope field of view in a data acquisition device according to an embodiment of the present invention. As shown in the figure, within the field of view 1 of the eyepiece of the microscope, a data display section 2, which is attached to the eyepiece and displays data within the field of view 1, an observation image 3, and a scale 4 are visible.

FIG. 2 shows a microscope 11 having a field of view as shown in FIG.
5 shows the overall configuration of a data acquisition device equipped with 5. The device shown in the figure is a microscope! f15, a data input device 6, and a data recording device 7. The eyepiece lens 8 of the microscope 5 is provided with a data display section for displaying data as shown in FIG.
, and the data input device 6 and data recording device 7 are connected by data transfer cables 9a and 9b, respectively. The data input device 6 is, for example, a keyboard 6.
a and a display 6b. The data recording device 7 may use, for example, a floppy disk, or may store data using a solid state memory such as a semiconductor memory.

In the data acquisition device having the above configuration,
The observer sets the observation sample 10 on the microscope 5 and
The observation image 3 is moved within the field of view 1 of the microscope eyepiece while moving the sample stage at t5 and focusing. next,
For example, a value of -1,0 is read from the scale 4 and the observation image 3, and the read value -1,0 is input from the keyboard 6a of the data input device 6 placed beside the microscope. At this time, the observer, without taking his eyes off the eyepiece 8, reads the reading value -
You can input 1 or 0. The reading values -1 and 0 inputted from the data input device 6 are transmitted to the data display unit 2 attached to the eyepiece 8 via the data transfer cable 9a.
will be displayed. This allows the observer to check the input data on the data display section 2 and know whether or not the data has been entered correctly. If the data has been input correctly, a data input command key provided on the keyboard 6a of the data input device 6 is pressed. As a result, the read values -1 and 0 are input from the data input device 6 to the data recording device 1 via the data transfer cable 9b and are recorded.

In the above-described embodiment, numerical values are displayed on the data display section 2, but the data display section Ol...
, (J, 4-, -, ・, etc.) with light-emitting diodes placed next to numbers and symbols, and the data input device 6 is replaced from the keyboard type to a joystick type, and the light-emitting location of the light-emitting diode is moved by the joystick. It is also possible to input readings by pressing the button. This method makes data entry easier than using a keyboard.

In addition to inputting the read values to the data recording device 7, it is also possible to input them to a computer device, perform calculation processing on the read values, and output the results to the data display section 2 within the field of view of the eyepiece. It is. In this case, the calculation results for the read values can also be checked without taking your eyes off the microscope.

[Effects of the Invention] As explained above, according to the present invention, data can be displayed within the field of view of a microscope by a simple method of attaching a data display device to the eyepiece of a microscope, and data input from an input device can be displayed. This allows you to check the readings within the field of view of the microscope, so you can acquire data while checking the readings that are the observation results and the values that are the results of calculations performed on the readings without taking your eyes off the microscope. become. Therefore, the efficiency of data acquisition work is improved, error-free data acquisition is possible, and the amount of manpower required for data acquisition can be reduced.

[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is an explanatory diagram showing the inside of the field of view of the eyepiece of a data acquisition device according to an embodiment of the present invention, and FIG. 2 is an explanatory diagram showing the field of view of the eyepiece as shown in FIG. 1 is a block configuration diagram showing the absolute configuration of a data acquisition device including a microscope having a microscope. 1: Eyepiece field of view, 2: Data display section, 3: Observation image,
4 Niscale, 5: Microscope, 6: Data. Input device, 6a: keyboard, 6b: display, 1: data recording device, 8: eyepiece, 9a, 9b: data transfer cable, 10: observation sample.

Claims (1)

[Claims] The present invention comprises a microscope means, a display means for displaying data within the field of view of the microscope means, a data input means for supplying display data to the display means, and a data recording means for storing the display data. A data acquisition device characterized by: