JPS622110A - 光学式粗さ計 - Google Patents
光学式粗さ計Info
- Publication number
- JPS622110A JPS622110A JP14179685A JP14179685A JPS622110A JP S622110 A JPS622110 A JP S622110A JP 14179685 A JP14179685 A JP 14179685A JP 14179685 A JP14179685 A JP 14179685A JP S622110 A JPS622110 A JP S622110A
- Authority
- JP
- Japan
- Prior art keywords
- receiving element
- light
- prism
- objective lens
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 37
- 230000003746 surface roughness Effects 0.000 title description 11
- 238000006073 displacement reaction Methods 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 description 29
- 238000000034 method Methods 0.000 description 12
- 230000035945 sensitivity Effects 0.000 description 12
- 238000003754 machining Methods 0.000 description 7
- 238000004439 roughness measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 201000009310 astigmatism Diseases 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14179685A JPS622110A (ja) | 1985-06-28 | 1985-06-28 | 光学式粗さ計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14179685A JPS622110A (ja) | 1985-06-28 | 1985-06-28 | 光学式粗さ計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622110A true JPS622110A (ja) | 1987-01-08 |
| JPH0521405B2 JPH0521405B2 (enrdf_load_stackoverflow) | 1993-03-24 |
Family
ID=15300336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14179685A Granted JPS622110A (ja) | 1985-06-28 | 1985-06-28 | 光学式粗さ計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS622110A (enrdf_load_stackoverflow) |
-
1985
- 1985-06-28 JP JP14179685A patent/JPS622110A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521405B2 (enrdf_load_stackoverflow) | 1993-03-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |