JPS62204355U - - Google Patents

Info

Publication number

JPS62204355U

JPS62204355U JP9266486U JP9266486U JPS62204355U JP S62204355 U JPS62204355 U JP S62204355U JP 9266486 U JP9266486 U JP 9266486U JP 9266486 U JP9266486 U JP 9266486U JP S62204355 U JPS62204355 U JP S62204355U

Authority

JP

Japan

Prior art keywords

field effect

effect transistor

mesa

mes

substrate

Prior art date

1986-06-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 3
• 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
• 230000005669 field effect Effects 0.000 claims 2
• 239000011810 insulating material Substances 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1