JPS62204334U - - Google Patents
Info
- Publication number
- JPS62204334U JPS62204334U JP9265286U JP9265286U JPS62204334U JP S62204334 U JPS62204334 U JP S62204334U JP 9265286 U JP9265286 U JP 9265286U JP 9265286 U JP9265286 U JP 9265286U JP S62204334 U JPS62204334 U JP S62204334U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer chuck
- suctioning
- outer periphery
- edge portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265286U JPS62204334U (en:Method) | 1986-06-17 | 1986-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265286U JPS62204334U (en:Method) | 1986-06-17 | 1986-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62204334U true JPS62204334U (en:Method) | 1987-12-26 |
Family
ID=30954546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9265286U Pending JPS62204334U (en:Method) | 1986-06-17 | 1986-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62204334U (en:Method) |
-
1986
- 1986-06-17 JP JP9265286U patent/JPS62204334U/ja active Pending