JPS62131433U - - Google Patents
Info
- Publication number
- JPS62131433U JPS62131433U JP1847786U JP1847786U JPS62131433U JP S62131433 U JPS62131433 U JP S62131433U JP 1847786 U JP1847786 U JP 1847786U JP 1847786 U JP1847786 U JP 1847786U JP S62131433 U JPS62131433 U JP S62131433U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- rotary table
- center
- suctioning
- onto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1847786U JPS62131433U (en:Method) | 1986-02-12 | 1986-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1847786U JPS62131433U (en:Method) | 1986-02-12 | 1986-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62131433U true JPS62131433U (en:Method) | 1987-08-19 |
Family
ID=30812183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1847786U Pending JPS62131433U (en:Method) | 1986-02-12 | 1986-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62131433U (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2015098699A1 (ja) * | 2013-12-26 | 2017-03-23 | 並木精密宝石株式会社 | 洗浄装置 |
| JP2021158381A (ja) * | 2017-03-30 | 2021-10-07 | 株式会社東京精密 | スピンナー洗浄装置 |
-
1986
- 1986-02-12 JP JP1847786U patent/JPS62131433U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2015098699A1 (ja) * | 2013-12-26 | 2017-03-23 | 並木精密宝石株式会社 | 洗浄装置 |
| JP2021158381A (ja) * | 2017-03-30 | 2021-10-07 | 株式会社東京精密 | スピンナー洗浄装置 |