JPS6220395A - Manufacture of printed circuit board - Google Patents

Manufacture of printed circuit board

Info

Publication number
JPS6220395A
JPS6220395A JP15989385A JP15989385A JPS6220395A JP S6220395 A JPS6220395 A JP S6220395A JP 15989385 A JP15989385 A JP 15989385A JP 15989385 A JP15989385 A JP 15989385A JP S6220395 A JPS6220395 A JP S6220395A
Authority
JP
Japan
Prior art keywords
printed circuit
circuit board
board
forming
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15989385A
Other languages
Japanese (ja)
Inventor
竹俣 孝一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15989385A priority Critical patent/JPS6220395A/en
Publication of JPS6220395A publication Critical patent/JPS6220395A/en
Pending legal-status Critical Current

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Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 [m要〕 プリント基板の製造方法の改良であって、プリント基板
形成用板の上下両面に除去液を噴射させて、その両面を
所定パターンにエツチング形成する際、このプリント基
板形成用板の−上面に噴射する除去液の温度を、プリン
ト基板形成用板の下面に噴射する除去液の温度より上昇
さセ、プリント基板形成用板の上下両面に設けたレジス
ト膜、或いは銅箔等の被膜のエツチング速度を均一にな
るようにする。
[Detailed Description of the Invention] [Required] This is an improvement in the manufacturing method of a printed circuit board, in which a removing liquid is sprayed on both the upper and lower surfaces of a printed circuit board forming board, and when etching both surfaces into a predetermined pattern, this The temperature of the removal liquid sprayed onto the upper surface of the printed circuit board forming board is higher than the temperature of the removing liquid sprayed onto the lower surface of the printed circuit board forming board, and the resist film provided on both the upper and lower surfaces of the printed circuit board forming board; Alternatively, the etching rate of a film such as copper foil may be made uniform.

(産業−!−の利用分野〕 本発明はプリント基板の製造方法に係り、特にプリント
基板形成用板をエツチングにより形成する際、このプリ
ント基板形成用板の上下両面に設けたレジスト膜、或い
は銅箔等の被膜が均一な工ノチング速度でエツチングさ
れるようにしたプリント基板の製造方法に関する。
(Field of application in industry) The present invention relates to a method of manufacturing a printed circuit board, and in particular, when a printed circuit board forming board is formed by etching, resist films or copper The present invention relates to a method for manufacturing a printed circuit board in which a film such as a foil is etched at a uniform etching speed.

IC1L、SI等の電子部品を搭載し、電子回路を形成
するプリント基扱は多数の電f機器の製造に用いられて
いる。
Print-based processing, which mounts electronic components such as IC1L and SI to form electronic circuits, is used in the manufacture of many electronic devices.

このようなプリント基板の内で、多層構造のプリンI・
基板を形成(”る際に用いる内層材のよ・うなプリント
基板形成用板をエツチングにより形成する場合、この形
成用板の上下両面に設けた銅箔、或いはレジスト膜等の
被膜が均一・なエツチング速度でエツチングできるよう
な方法が要望されている。
Among these printed circuit boards, multilayer structure printed circuit board I.
When forming a board for forming a printed circuit board, such as an inner layer material used when forming a board, by etching, it is necessary to ensure that the coating such as copper foil or resist film provided on both the upper and lower surfaces of the forming board is uniform. There is a need for a method that can perform etching at high etching speeds.

〔従来の技術〕[Conventional technology]

多層構造のプリント基板を製造する場合、両面に回路パ
ターンを形成した樹脂板よりなる内層材の上下両面に、
樹脂よりなる接着シー[・を挟んで銅箔を設置し、この
L士の一対の銅箔間を加熱jアた熱盤で加圧1−2て接
着シー[・を溶融して、[、Fの銅箔の内部に接着シー
トを介して内層+4を設ijて多層構造のプリント基板
を形成し−Cいる。
When manufacturing a printed circuit board with a multilayer structure, the upper and lower surfaces of the inner layer material, which is made of a resin plate with circuit patterns formed on both sides, are
Copper foil is placed across a resin adhesive sheet [.], and the adhesive sheet [. An inner layer +4 is provided inside the copper foil F through an adhesive sheet to form a printed circuit board with a multilayer structure.

従来、このような内層材を形成するには、第2図にボす
ように樹脂板1の上ト両面に銅箔2A、2I(を設けて
内N祠となるプリン1−基板形成用析3の上F両面にレ
ジス1−膜4A、4Bを塗布し2六−後、1−のレジス
l−股4Δ、4Bを所定のパターンに露光する。
Conventionally, in order to form such an inner layer material, as shown in FIG. After applying the resist 1 film 4A, 4B on both sides of the upper F of the resist 1 film 4A, 4B, the resist 1 film 4A, 4B of the resist 1- is exposed in a predetermined pattern.

史に・−のプリンl基板形成用板3をゴムローラ5を用
いて矢印A方向に搬送する。史C4ルジスト欣除去液が
収容されているタンク6より加圧ポンプ7を用いてこの
除去液を搬送し、ノズル8により除去液をレジスl−1
*4A、4B 、):に噴射さゼて未露光部のレジスト
腔を除去している。
1. The board 3 for forming a printed circuit board 3 is conveyed in the direction of arrow A using a rubber roller 5. A pressurizing pump 7 is used to transport this removal liquid from a tank 6 containing the C4 Lugist lint removal liquid, and a nozzle 8 transfers the removal liquid to Regis l-1.
*4A, 4B, ): The resist cavity in the unexposed area is removed by spraying.

更に第3図に示ずよ・うにレジスl−1194A、4B
を所定のパターンに形成した後、このプリント基板形成
用板3を搬送してプリント基板形成用板3の上下両面よ
りタンク9内に収容されている銅In2A、2Bのエツ
チング液を加圧ポンプ10を用いてノズル11より噴射
させ、パターンニングされたレジスト膜4A、4Bをマ
スクとして銅箔2A、2Bを所定のパターンにエツチン
グ形成している。
Furthermore, as shown in Fig. 3, Regis l-1194A, 4B
After forming the printed circuit board 3 into a predetermined pattern, the printed circuit board forming board 3 is transported, and the etching solution for copper In2A and 2B contained in the tank 9 is pumped through the pressure pump 10 from the upper and lower surfaces of the printed circuit board forming board 3. The copper foils 2A and 2B are etched into a predetermined pattern using the patterned resist films 4A and 4B as masks.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところでプリント基板形成用板3の上面に噴射するレジ
スト膜除去液、或いは銅箔のエツチング液等の除去液は
その上面で停滞しやすいのに対し、プリント基板形成用
板3の下面に噴射する除去液は常に新しい除去液が供給
されて噴射するよ・うになる。
By the way, the resist film removal solution sprayed onto the top surface of the printed circuit board forming board 3 or the removal solution such as a copper foil etching solution tends to stagnate on the top surface, whereas the removal solution sprayed onto the bottom surface of the printed circuit board forming board 3 tends to stagnate on the top surface. The liquid will always be supplied with new removal liquid and sprayed.

その結果、プリント基板形成用板3の上面のレジスト膜
4Aや銅箔2Aのエツチング速度は、プリント基板形成
用板3の下面のレジスト膜4Bや銅箔2Rのエツチング
速度より遅くなり、上記した1al箔2A。
As a result, the etching speed of the resist film 4A and the copper foil 2A on the upper surface of the printed circuit board forming board 3 is slower than the etching speed of the resist film 4B and the copper foil 2R on the lower surface of the printed circuit board forming board 3. Foil 2A.

2Bおよびレジスト膜4^、4Bのエツチング速度が均
一とならない問題が生しる。
A problem arises in that the etching rates of 2B and the resist films 4^ and 4B are not uniform.

そのため、従来このプリント基板形成用板3の上面に噴
射する除去液の圧力を、プリント基板形成用板3の下面
に噴射する除去液の圧力より大きくする。そして前記し
たプリント基板形成用板3の」二面に除去液が停滞して
その面のエツチング速度が遅くなる現象を除いて、プリ
ント基板形成用板3の−に面に設けられた銅箔2A、及
びレジスト膜4Aのエツチング速度をプリント基板形成
用板3の下面に設置Jられた銅箔2B、及びレジスト膜
4Bのエツチング速度と均一になるようにしていた。
Therefore, conventionally, the pressure of the removing liquid injected onto the upper surface of the printed circuit board forming board 3 is made higher than the pressure of the removing liquid injected onto the lower surface of the printed circuit board forming board 3. Except for the phenomenon that the removal liquid stagnates on the two sides of the printed circuit board forming board 3 described above and the etching speed of that surface slows down, the copper foil 2A provided on the negative side of the printed circuit board forming board 3 can be removed. , and the etching speed of the resist film 4A were made to be uniform with the etching speed of the copper foil 2B placed on the lower surface of the printed circuit board forming board 3 and the resist film 4B.

然し、このようなレジスト膜除去液や腐食液等の除去液
の圧力を変える方法は、除去液の搬送用圧力ポンプのバ
ルブの開閉の角度を調節して行っており、操作に確実性
がなく、この方法で銅箔2A。
However, this method of changing the pressure of the resist film removal solution, corrosive solution, and other removal liquids involves adjusting the opening and closing angle of the valve of the pressure pump for conveying the removal liquid, and the operation is not reliable. , Copper foil 2A using this method.

2Bのエツチング速度や、レジスト膜4A、4Bのエツ
チング速度を調節するのは再現性に乏しい問題がある。
There is a problem of poor reproducibility in adjusting the etching speed of the resist film 2B and the etching speed of the resist films 4A and 4B.

〔問題点を解決するための手段〕[Means for solving problems]

本発明はプリント基板形成用板の1−下の両面に設けた
レジスト膜や銅箔のような被股の除去速度が均一となる
ようにしたプリント基板の製造方法を提供することを目
的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a printed circuit board in which the removal speed of resist films and coatings such as copper foil provided on both sides of a printed circuit board forming board is uniform. .

第1図は本発明の方法を実施するための装置の模式図で
、図示するようにプリント基板形成用板3の上面に噴射
される除去液21の温度を前記プリント基板形成用板3
の下面に噴射される除去液22の温度よりIニー: !
7/さl、プリント基板形成用板3十に形成されている
1、・ジスlI!m4A、4++や、銅箔2A、2Hの
エツチング速度が均一となるよ・うにしてエツチングし
ている。
FIG. 1 is a schematic diagram of an apparatus for carrying out the method of the present invention.
From the temperature of the removal liquid 22 sprayed onto the bottom surface of
7/Sl, 1 formed on the printed circuit board forming board 30! Etching is performed so that the etching speed of m4A, 4++ and copper foils 2A, 2H are uniform.

〔作用〕[Effect]

本発明の方法は1.プリント基板形成用板の銅箔やレジ
ス1」簗を銅箔エツチング液守用2・シスト膜除去液の
、にうな除去液でコ゛ソチング除去するJ稈C於いて、
除去液が停滞し易いプリント基板形成用板の1面に噴射
される除去液の温度を、プリント基板形成用板のF面に
噴射される除去液の温度より高めてプリン1一基板形成
用板の1面に於ける銅箔やレジスト膜のエツチング速度
を早めて、プリント基板形成用板の1王両面に於ける銅
箔やレジスト股のコーノチング速度を均一な状態に保つ
よ・)にしたものである。
The method of the present invention includes 1. In J-culm C, the copper foil and resist film of the board for forming printed circuit boards are removed by co-soching with a different removal solution such as copper foil etching solution protection 2 and cyst film removal solution.
The temperature of the removal liquid sprayed onto one side of the printed circuit board forming board where the removal liquid tends to stagnate is made higher than the temperature of the removal liquid sprayed onto the F side of the printed circuit board forming board. This speeds up the etching speed of the copper foil and resist film on one side of the board and maintains a uniform etching speed of the copper foil and resist film on both sides of the board for forming printed circuit boards. It is.

〔実hト例〕[Actual example]

Jス下、図面を用いながら本発明の一実施例につき詳細
に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below using the drawings.

第111!!Iは本発明の方法6ご用いる装置の模式図
で、前記したように114脂扱1の−Lド両而面銅箔2
Δ、2Bが設iJられ、史にその−1には所定のパター
ンに露光されたレジスト膜4A、4Bが設けられて、プ
リント基板形成用板3が形成さねでいる。、5:のプリ
ンI・基板形成用板3を矢印入方向に沿、っ゛Cゴムロ
ーラ5を用いて搬送する。更にタンク6より導入され、
加熱タンク23で温度を1昇させたレジスト膜除去液を
、加圧ポンプ7A、ノズル)怪を介し”Cプリント基板
形成用板3の−上面に、腐食/&21と1−2で噴射さ
せる。
111th! ! I is a schematic diagram of the apparatus used in method 6 of the present invention, and as described above, 114 fat handling 1 -L do both sides copper foil 2
Δ, 2B are provided, and resist films 4A, 4B exposed in a predetermined pattern are provided on the -1, and the printed circuit board forming board 3 is formed. , 5: The print I/substrate forming plate 3 is conveyed along the direction indicated by the arrow using the C rubber roller 5. Furthermore, it is introduced from tank 6,
A resist film removing solution whose temperature has been raised by 1 in the heating tank 23 is sprayed onto the upper surface of the printed circuit board forming board 3 through the pressure pump 7A and the nozzle 21 and 1-2.

この場合加圧ポンプ7B、およびノズル8Bを介してプ
リント基板形成用板3の下面より噴射させる除去液22
は加熱していないため、除去液21の温度が除去液22
の温度より[−昇する。そのため、プリン1一基板形成
用板3のl二面に於番」るレジスト膜4Aのエツチング
速度が、プリント基板形成用板3の下面に於けるレジス
ト膜4Bのエツチング速度より速くなり、仮に除去液2
1がプリン1へ基板形成用板3の[4面で停滞したとし
ても、1/シスト膜4Aとレジスl]e4Bのエツチン
グ速度は均一となる。
In this case, the removal liquid 22 is sprayed from the lower surface of the printed circuit board forming board 3 via the pressure pump 7B and the nozzle 8B.
is not heated, the temperature of the removal liquid 21 is lower than that of the removal liquid 22.
The temperature increases by [-]. Therefore, the etching speed of the resist film 4A on the two sides of the printed circuit board forming plate 3 becomes faster than the etching speed of the resist film 4B on the lower surface of the printed circuit board forming plate 3. liquid 2
Even if 1 is stagnated on the 4th surface of the substrate forming plate 3 to the print 1, the etching rate of 1/the cyst film 4A and the resist 1 e4B becomes uniform.

ここでL記しI′v除去液21.22はレジスト膜除去
液に例を用いて述べたが、無給この除去液21.22は
銅箔2A、2Rをエツチングするエソ千ング液で有って
も良い。
Here, the I'v removal liquid 21.22 marked L was described using the resist film removal liquid as an example, but the unsupplied removal liquid 21.22 is an etching liquid for etching the copper foils 2A and 2R. Also good.

〔発明の効果〕〔Effect of the invention〕

以−F、述べたように本発明の方法によれば、エツチン
グ速度が遅くなるプリント基板形成用板の土面側に下面
側より温度の高い除去液が供給されるので、プリント基
板形成用板のF面に形成されている銅箔のような被膜と
プリント基板形成用板の下面に形成されている銅箔のよ
うな被膜のエツチング速度が均一となるので、プリント
基板形成用板のパターン形成が容易で、高品位なものと
なる効果がある。
As described in Section F below, according to the method of the present invention, a removal solution having a higher temperature is supplied to the soil surface side of the printed circuit board forming board where the etching rate is slower than the lower surface side. Since the etching speed of the film such as copper foil formed on the F side of the board and the film such as copper foil formed on the bottom surface of the board for forming printed circuit boards is uniform, pattern formation of the board for forming printed circuit boards is possible. This has the effect of making it easy to use and of high quality.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の詳細な説明するための模式図、第2図
および第3図は従来の方法を説明するための模式図であ
る。 図に於いて、 1は樹脂板、2A、2Bは銅箔、3はプリント基板形成
用板、4A、4Bはレジスト膜、5はローラ、6はタン
ク、7^、7Bは加圧ポンプ、8A、8Bはノズル、2
1.22は除去液、23は加熱タンクを示す。
FIG. 1 is a schematic diagram for explaining the present invention in detail, and FIGS. 2 and 3 are schematic diagrams for explaining the conventional method. In the figure, 1 is a resin board, 2A and 2B are copper foils, 3 is a printed circuit board forming board, 4A and 4B are resist films, 5 is a roller, 6 is a tank, 7^ and 7B are pressure pumps, and 8A , 8B is a nozzle, 2
1.22 is a removal liquid, and 23 is a heating tank.

Claims (3)

【特許請求の範囲】[Claims] (1)移動するプリント基板形成用板(3)の上下両面
に除去液(21、22)を噴射させてプリント基板形成
用板(3)の上下両面に形成されている被膜を所定のパ
ターンとなるようにエッチング除去する方法に於いて、 前記プリント基板形成用板(3)の上面に噴射される除
去液(21)の温度を、前記プリント基板形成用板の下
面に噴射される除去液(22)の温度より上昇させたこ
とを特徴とするプリント基板の製造方法。
(1) Spray the removal liquid (21, 22) on both the upper and lower surfaces of the moving printed circuit board forming board (3) to remove the coating formed on both the upper and lower surfaces of the printed circuit board forming board (3) in a predetermined pattern. In the method of etching away the printed circuit board forming plate (3), the temperature of the removing liquid (21) sprayed onto the upper surface of the printed circuit board forming plate (3) is adjusted to 22) A method for manufacturing a printed circuit board, characterized in that the temperature is raised above the temperature described in 22).
(2)前記被膜がレジスト膜(4A、4B)、或いは導
電性被膜(2A、2B)であることを特徴とする特許請
求の範囲第(1)項に記載のプリント基板の製造方法。
(2) The method for manufacturing a printed circuit board according to claim (1), wherein the film is a resist film (4A, 4B) or a conductive film (2A, 2B).
(3)前記除去液(21、22)がレジスト膜除去液、
或いは導電性被膜のエッチング液であることを特徴とす
る特許請求の範囲第(1)項に記載のプリント基板の製
造方法。
(3) The removal liquid (21, 22) is a resist film removal liquid;
Alternatively, the method for manufacturing a printed circuit board according to claim (1), wherein the etching solution is an etching solution for a conductive film.
JP15989385A 1985-07-18 1985-07-18 Manufacture of printed circuit board Pending JPS6220395A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15989385A JPS6220395A (en) 1985-07-18 1985-07-18 Manufacture of printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15989385A JPS6220395A (en) 1985-07-18 1985-07-18 Manufacture of printed circuit board

Publications (1)

Publication Number Publication Date
JPS6220395A true JPS6220395A (en) 1987-01-28

Family

ID=15703477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15989385A Pending JPS6220395A (en) 1985-07-18 1985-07-18 Manufacture of printed circuit board

Country Status (1)

Country Link
JP (1) JPS6220395A (en)

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