JPS62203571A - Vibration wave motor - Google Patents

Vibration wave motor

Info

Publication number
JPS62203571A
JPS62203571A JP61043714A JP4371486A JPS62203571A JP S62203571 A JPS62203571 A JP S62203571A JP 61043714 A JP61043714 A JP 61043714A JP 4371486 A JP4371486 A JP 4371486A JP S62203571 A JPS62203571 A JP S62203571A
Authority
JP
Japan
Prior art keywords
diaphragm
vibration
electro
voltage
mechanical energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61043714A
Other languages
Japanese (ja)
Inventor
Koichi Wakizaka
脇坂 浩一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61043714A priority Critical patent/JPS62203571A/en
Publication of JPS62203571A publication Critical patent/JPS62203571A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To readily apply an AC voltage by providing conductivity at a vibration plate and a movable body, securing an electro-mechanical energy converter to one side of the plate, and applying an AC voltage to the other side face of the converter and the body. CONSTITUTION:A vibration plate 2 is held together with a piezoelectric element plate 1 through a ringlike vibration absorber 4 at a base 5 made of an insulating material. A rotatable circular movable body 3 made of a conductor material is supported by bearing 77 through a bush 8 to a stationary shaft 6. The body 3 is contacted with the upper surface of the body 3 in a pressed stage. The shaft 6, the bush 8 and the bearing 7 are formed of conductive materials, the shaft 6 is electrically conducted with the body 3 to apply an AC voltage between an electrode film formed on the lower surface of the plate and the body 3.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、振動板に電気−機械エネルギー変換素子を複
数個配列固着して振動体を構成し、該変換素子に交流電
圧を印加して該振動体に生ぜしめた曲げ振動の進行波に
よって、該振動体と接触する移動体を摩擦駆動するよう
に構成したいわゆる振動波モータにおいて、該電気−機
械エネルギー変換素子に交流電圧を印加するための構成
の改良に関する。
[Detailed Description of the Invention] [Field of Application of the Invention] The present invention comprises a vibrating body by arranging and fixing a plurality of electro-mechanical energy converting elements to a diaphragm, and applying an alternating current voltage to the converting elements. In a so-called vibration wave motor configured to frictionally drive a moving body in contact with the vibrating body by a traveling wave of bending vibration generated in the vibrating body, a motor for applying an alternating current voltage to the electro-mechanical energy conversion element is used. Concerning improvements to the configuration.

〔発明の背景〕[Background of the invention]

始めに、曲げ振動の進行波を利用した振動波モータの原
理を第2図およびその下面図である第3図によシ説明す
る。同図に示すように、弾性体(例えば金属)よりなる
リング板状の振動板2の下面に第1群の電気−機械エネ
ルギー変換素子1a、および第2群の電気−機械エネル
ギー変換素子1bが配列固着されている。これら電気−
機械エネルギー変換素子としては圧電素子、電歪素子、
又は磁゛歪素子などを用いることができるが、以下では
圧電素子で代表する。
First, the principle of a vibration wave motor using traveling waves of bending vibration will be explained with reference to FIG. 2 and FIG. 3, which is a bottom view thereof. As shown in the figure, a first group of electro-mechanical energy conversion elements 1a and a second group of electro-mechanical energy conversion elements 1b are arranged on the lower surface of a ring plate-shaped diaphragm 2 made of an elastic body (for example, metal). The array is fixed. These electricity-
Mechanical energy conversion elements include piezoelectric elements, electrostrictive elements,
Alternatively, a magnetostrictive element or the like can be used, but a piezoelectric element will be used as a representative example below.

先ず第1群圧電素子1aについて述べると、そ・の全て
の圧電素子laの上下面に電極膜(不図示)が設けられ
ておシ、これら電極は不図示の電気接続手段で上面電極
同志および下面電極同志が電気的に並列接続されていて
、各圧電素子1&に同時に電圧が印加されるようになっ
ており、この電圧印加により各圧電素子は周方向に伸縮
するように構成されている。そして各圧電素子1aは、
隣9合うものが互に逆の極性であるように(すなわち、
一方のものが伸びるとき他方のものが縮むように入λ 且つ7のピッチ全以て周方向に配列されている。
First, referring to the first group of piezoelectric elements 1a, electrode films (not shown) are provided on the upper and lower surfaces of all the piezoelectric elements 1a, and these electrodes are connected to each other and the upper surface electrodes by electrical connection means (not shown). The lower surface electrodes are electrically connected in parallel, and a voltage is simultaneously applied to each piezoelectric element 1&, and each piezoelectric element is configured to expand and contract in the circumferential direction by applying this voltage. And each piezoelectric element 1a is
Just as nine neighboring items have opposite polarity (i.e.
They are arranged in the circumferential direction with inputs λ and a total pitch of 7 so that when one expands, the other contracts.

第2群圧電素子1bの構成および配列についても同様で
ある。
The same applies to the configuration and arrangement of the second group piezoelectric elements 1b.

λ 第1群1aと第2群lbとは−の奇数倍だけずらせて配
置されている。また振動板2の全周の長さはλの整数倍
であるとする。なお、第1群1aと第2群lbとの間の
部分1′は電圧の印加がなく積極的に伸縮作用をしない
領域である。振動板2、圧電素子1a、lbおよび部分
Y1慟体を形成している。
λ The first group 1a and the second group lb are arranged to be shifted by an odd multiple of -. It is also assumed that the length of the entire circumference of the diaphragm 2 is an integral multiple of λ. Note that a portion 1' between the first group 1a and the second group lb is a region to which no voltage is applied and does not actively expand or contract. The diaphragm 2, the piezoelectric elements 1a and 1b, and the portion Y1 form a rectangular body.

このような構成・配列において、第1群圧電素子1aの
みに交流電圧を印加すると、振動板体は伸びる圧電素子
1aの部分では下方に凸に、縮む圧電素子1aの部分で
は上方に凸になるような曲げ変形をする結果、振動体の
全周に亘り曲げ振動の定在波(波長λ)が発生する。こ
の場合、電圧λ 電素子1mの間の中間位置およびそこから−おきの各位
置が節になる。第2群圧電素子1bのみに交流電圧を印
加したときも同様に波長λの定在波が発生するが、その
節の位置は前記の定在波のそ、 λ れに比へて7だけずれたものとなる。
In such a configuration and arrangement, when an AC voltage is applied only to the first group piezoelectric element 1a, the diaphragm becomes convex downward in the part where the piezoelectric element 1a extends, and convex upward in the part where the piezoelectric element 1a contracts. As a result of such bending deformation, a standing wave of bending vibration (wavelength λ) is generated over the entire circumference of the vibrating body. In this case, the intermediate position between the voltage λ and the electric element 1m and the positions spaced apart from the intermediate position become nodes. When an AC voltage is applied only to the second group piezoelectric element 1b, a standing wave of wavelength λ is similarly generated, but the position of the node is shifted by 7 compared to the standing wave. It becomes something.

第1群圧電素子1aに交流電圧を印加すると同時に、そ
れとは電気的に900の位相差を持つ交流電圧を82群
圧電素子1bに印加すれば、両者による定在波の合成の
結果、振動体には周方向に進む曲げ振動の進行波が発生
し、その進行方向は上記印加電圧の位相差の正負によっ
て決まる。この曲げ振動の進行波においては、振動板の
厚さの中立面上の点は上下方向振動をするだけであるが
、振動板の上面および下面上の点は上下方向振動および
周方向振動の合成された一種の楕円運動をする。従って
、第2図において振動板2を回転しないように適宜支持
しておき、その上面にリング板状の移動体3(不図示)
を加圧接触させておけば、該移動体は振動板の上記楕円
運動による摩擦力により駆動されて回転し、その回転方
向は圧電素子群1a、lbO印加電圧の位相差の正負に
よって選択できる。以上が曲げ振動進行波を利用した振
動波モータの原理でちる。
If an AC voltage is applied to the first group piezoelectric element 1a, and at the same time an AC voltage having an electrical phase difference of 900 is applied to the 82nd group piezoelectric element 1b, as a result of the synthesis of standing waves by both, the vibrating body A traveling wave of bending vibration is generated that travels in the circumferential direction, and its traveling direction is determined by the sign of the phase difference between the applied voltages. In this traveling wave of bending vibration, points on the neutral plane of the diaphragm's thickness only vibrate in the vertical direction, but points on the top and bottom surfaces of the diaphragm vibrate in the vertical and circumferential directions. It performs a kind of combined elliptical motion. Therefore, in FIG. 2, the diaphragm 2 is appropriately supported so as not to rotate, and a ring plate-shaped moving body 3 (not shown) is mounted on the top surface of the diaphragm 2.
When pressed into contact with each other, the movable body is driven and rotated by the frictional force caused by the elliptical motion of the diaphragm, and the direction of rotation can be selected by the positive or negative sign of the phase difference between the voltages applied to the piezoelectric element groups 1a and lbO. The above is the principle of a vibration wave motor that uses traveling waves of bending vibration.

ところで、このような振動波モータにおいて、従来、圧
電素子の厚み方向に交流電圧を印加する為には、金属等
の導電性材質の振動板2に導電性接着剤でリード線をつ
けるか、前記振動板(又は。
By the way, conventionally, in such a vibration wave motor, in order to apply an alternating voltage in the thickness direction of the piezoelectric element, lead wires are attached to the diaphragm 2 made of a conductive material such as metal with a conductive adhesive, or the Vibration plate (or.

圧!素子の振動板と接合する面の電極)と圧電素子の裏
面の不要電極(第2図、第3図の1′に相当する部分に
設けた電極)間を導電性樹脂でつなぎそこからリード線
を出していた。しかし、振動板側面からのリード線引き
出しは、振動体の振動を乱したり、振動によりリード線
が外れたり、また圧電素子の電圧の印加されない積極的
に伸縮作用をしない部分の不要電極を導電性樹脂でつな
ぐ場合、その導電性樹脂の塗p量によって振動状態が変
化してしまったシ、その作業自体がとても面倒である為
、量産を考える場合、モータ個々のバラツキが太きいと
いう欠点があった。
Pressure! Connect the conductive resin between the electrode on the surface that connects to the diaphragm of the element and the unnecessary electrode on the back side of the piezoelectric element (the electrode provided at the part corresponding to 1' in Figures 2 and 3) and connect the lead wire from there. was issued. However, pulling out the lead wires from the side of the diaphragm can disturb the vibration of the vibrating body, cause the lead wires to come off due to vibration, and conduct conductivity from unnecessary electrodes in parts of the piezoelectric element that are not applied with voltage and do not actively expand or contract. When connecting with conductive resin, the vibration state changes depending on the amount of conductive resin applied, and the work itself is very troublesome, so when considering mass production, there is a drawback that there is wide variation between individual motors. there were.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、前記欠点を除去し、振動体の振動を妨
げることなく、圧電素子への交流電圧の印加が極めて容
易になされる振動波モータを提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a vibration wave motor which eliminates the above-mentioned drawbacks and allows application of an alternating current voltage to a piezoelectric element very easily without disturbing the vibration of the vibrating body.

〔発明の概要〕[Summary of the invention]

振動板の片面に複数の電気−機械エネルギー変換素子を
配列固着して振動体を形成し、該電気−機械エネルギー
変換素子に交流電圧を印加したときの該電気−機械エネ
ルギー変換素子の伸縮作用により励起されて該振動体に
生ずる曲げ振動の進行波によシ、該振動板の他面に加圧
接触している移動体を摩擦駆動する振動波モータにおい
て、上記振動板および移動体に導電性を有せしめ、上記
電気−機械エネルギー変換素子を振動板の上記片面と電
気的導通状態で固着し、上記交流電圧全上記電気−機械
エネルギー変換素子の上記振動板固着面とは反対側の面
と上記移動体との間に印加することを特徴とするもので
ある。
A vibrating body is formed by arranging and fixing a plurality of electro-mechanical energy conversion elements on one side of a diaphragm, and when an alternating current voltage is applied to the electro-mechanical energy conversion elements, the expansion and contraction action of the electro-mechanical energy conversion elements causes In a vibration wave motor that frictionally drives a moving body that is in pressure contact with the other surface of the diaphragm by a traveling wave of bending vibration that is excited and generated in the vibrating body, the diaphragm and the moving body are electrically conductive. the electro-mechanical energy conversion element is fixed in electrical continuity with one side of the diaphragm, and the alternating current voltage is applied to a surface of the electro-mechanical energy conversion element opposite to the surface to which the diaphragm is fixed. It is characterized in that the voltage is applied between the moving body and the moving body.

〔発明の実施例〕[Embodiments of the invention]

第1図は、本発明の一実施例に係る振動波モータの、一
部所面図とした立側面図である。第1図において、1は
発明の詳細な説明したようなピッチおよび極性で配列さ
れた第1圧電素子群1aおよび第2圧電素子群1bの形
成されているリング状の圧電素子板であシ、強誘電体の
セラミック、例えばPZT (チタン酸ジルコン酸鉛)
で作られている。2は黄銅又はステンレスなどの導電性
の金属からなるリング状の振動板で、その下面に圧電素
子板1の上面を導電性接着剤で接着しである。
FIG. 1 is a partial elevational side view of a vibration wave motor according to an embodiment of the present invention. In FIG. 1, 1 is a ring-shaped piezoelectric element plate on which a first piezoelectric element group 1a and a second piezoelectric element group 1b are arranged with pitch and polarity as described in detail of the invention; Ferroelectric ceramics, such as PZT (lead zirconate titanate)
It is made of. Reference numeral 2 denotes a ring-shaped diaphragm made of a conductive metal such as brass or stainless steel, and the upper surface of the piezoelectric element plate 1 is adhered to the lower surface of the ring-shaped diaphragm 2 using a conductive adhesive.

振動板2は圧電素子板1と共にリング状の振動吸収体4
t−介して絶縁材料製の基台5に保持されている。3は
導電性材料からなる回転可能な円形の移動体で、軸受7
によシブッシ−8を介して固定軸6に回転可能に支持さ
れている。固定軸6は基台5に固定され、上部はねじに
なっている。ブツシュ8は固定軸6に接触遊嵌されてお
シ、その上端にはね9が嵌められ、ナツト11がワッシ
ャ10を介してねじ込まれている。これによシ移動体3
は振動板2の上面に対し押し付けられた状態で接触して
いる。圧電素子板1の下面には、夫々第1圧電素子群I
ILおよび第2圧電素子群1bに対する領域に電極膜が
設けられており、これらに夫々リード線が接続されてい
る。他方、移動体3は、モータ停止時はもちろん、駆動
中も曲げ振動波の山の部分で振動板2に接触している。
The diaphragm 2 includes a ring-shaped vibration absorber 4 together with the piezoelectric element plate 1.
It is held on a base 5 made of an insulating material via a T-. 3 is a rotatable circular moving body made of conductive material, and bearing 7
It is rotatably supported by a fixed shaft 6 via a bushing 8. The fixed shaft 6 is fixed to the base 5 and has a screw at the top. The bush 8 is loosely fitted onto the fixed shaft 6, and a spring 9 is fitted to the upper end of the bush 8, and a nut 11 is screwed into the bush 8 through a washer 10. In this case, mobile object 3
is in contact with the upper surface of the diaphragm 2 in a pressed state. On the lower surface of the piezoelectric element plate 1, first piezoelectric element groups I are provided.
Electrode films are provided in regions corresponding to the IL and the second piezoelectric element group 1b, and lead wires are connected to these, respectively. On the other hand, the movable body 3 is in contact with the diaphragm 2 at the peak of the bending vibration wave not only when the motor is stopped but also during driving.

よって上記夫々のリード線と移動体3との間K、発明の
背景で述べた如き交流電圧を夫々印加することによって
振動モータとしての動作が生じ、移動体3は回転駆動さ
れる。第1図の実施例では、固定軸6、ブツシュ8およ
び軸受7も導電性材料で作シ、固定軸6からこれらを介
して移動体3に電気的導通を与えることによって、上記
リード線と移動体3との間の交流電圧印加を行うように
している。もちろん、移動体3に直接接触するブラシ等
から移動体3に電気的導通を与えるようにしてもよい。
Therefore, by applying an alternating current voltage as described in the background of the invention between each of the lead wires and the movable body 3, an operation as a vibration motor occurs, and the movable body 3 is rotationally driven. In the embodiment shown in FIG. 1, the fixed shaft 6, bushing 8, and bearing 7 are also made of conductive materials, and by providing electrical continuity from the fixed shaft 6 to the movable body 3 through these, the movable body 3 can be moved with the lead wire. An alternating current voltage is applied between the body 3 and the body 3. Of course, the movable body 3 may be electrically connected to the movable body 3 from a brush or the like that directly contacts the movable body 3.

特願昭60−65455には、本質的に同様の原理で直
線部と曲線部とを有する長円形振動板を用いた直線往復
運動を行なわせる型式の振動波モータが記載されている
が、本発明はこれへの適用も可能である。
Japanese Patent Application No. 60-65455 describes a type of vibration wave motor that performs linear reciprocating motion using an oblong diaphragm having a straight portion and a curved portion based on essentially the same principle, but this The invention can also be applied to this.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、振動板からのリード線引き出しにより
振動体の振動を乱したシ、iた、振動によりリード線が
振動体から外れたシするという従来の欠点を防止でき、
振動波モータの効率及び信頼性が著しく向上する。
According to the present invention, it is possible to prevent the conventional drawbacks in which the vibration of the vibrating body is disturbed by pulling out the lead wire from the diaphragm, and the lead wire is detached from the vibrating body due to vibration.
The efficiency and reliability of vibration wave motors are significantly improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の振動波モータの一実施例を示す一部断
面とした立側面図、第2図および第3図は振動波モータ
の原理説明図である。 1・・・圧電素子板、 1a、lb・・・第1群および第2群圧電素子、2・・
・振動板、    3・・・移動体、4・・・振動吸収
体、  5・・・基台、6・・・固定軸、    7・
・・軸受、8・・・ブツシュ、   9・・・バネ、1
0・・・ワッシャ、   11・・・ナツト。 本 多 小 平゛ +−―ψ
FIG. 1 is an elevational side view, partially in section, showing one embodiment of the vibration wave motor of the present invention, and FIGS. 2 and 3 are diagrams illustrating the principle of the vibration wave motor. DESCRIPTION OF SYMBOLS 1... Piezoelectric element plate, 1a, lb... 1st group and 2nd group piezoelectric elements, 2...
- Vibration plate, 3... Moving body, 4... Vibration absorber, 5... Base, 6... Fixed axis, 7.
...Bearing, 8...Button, 9...Spring, 1
0...washer, 11...nut. Honta small flat ゛+−―ψ

Claims (1)

【特許請求の範囲】[Claims] 振動板の片面に複数の電気−機械エネルギー変換素子を
配列固着して振動体を形成し、該電気−機械エネルギー
変換素子に交流電圧を印加したときの該電気−機械エネ
ルギー変換素子の伸縮作用により励起されて該振動体に
生ずる曲げ振動の進行波により、該振動板の他面に加圧
接触している移動体を摩擦駆動する振動波モータにおい
て、上記振動板および移動体に導電性を有せしめ、上記
電気−機械エネルギー変換素子を振動板の上記片面と電
気的導通状態で固着し、上記交流電圧を上記電気−機械
エネルギー変換素子の上記振動板固着面とは反対側の面
と上記移動体との間に印加することを特徴とする振動波
モータ。
A vibrating body is formed by arranging and fixing a plurality of electro-mechanical energy conversion elements on one side of a diaphragm, and when an alternating current voltage is applied to the electro-mechanical energy conversion elements, the expansion and contraction action of the electro-mechanical energy conversion elements causes In a vibration wave motor that frictionally drives a moving body that is in pressure contact with the other surface of the diaphragm by a traveling wave of bending vibration that is excited and generated in the vibrating body, the diaphragm and the moving body have electrical conductivity. The electro-mechanical energy conversion element is fixed in electrical continuity with one side of the diaphragm, and the AC voltage is transferred to the surface of the electro-mechanical energy conversion element opposite to the surface to which the diaphragm is fixed. A vibration wave motor that is characterized by being applied between the vibration wave motor and the body.
JP61043714A 1986-02-28 1986-02-28 Vibration wave motor Pending JPS62203571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61043714A JPS62203571A (en) 1986-02-28 1986-02-28 Vibration wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61043714A JPS62203571A (en) 1986-02-28 1986-02-28 Vibration wave motor

Publications (1)

Publication Number Publication Date
JPS62203571A true JPS62203571A (en) 1987-09-08

Family

ID=12671470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61043714A Pending JPS62203571A (en) 1986-02-28 1986-02-28 Vibration wave motor

Country Status (1)

Country Link
JP (1) JPS62203571A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6477482A (en) * 1987-09-18 1989-03-23 Nec Corp Ultrasonic motor
JPH01138981A (en) * 1987-11-26 1989-05-31 Matsushita Electric Ind Co Ltd Switching device
EP0627774A2 (en) * 1989-02-10 1994-12-07 Nikon Corporation Ultrasonic motor having high drive efficiency

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6477482A (en) * 1987-09-18 1989-03-23 Nec Corp Ultrasonic motor
JPH01138981A (en) * 1987-11-26 1989-05-31 Matsushita Electric Ind Co Ltd Switching device
EP0627774A2 (en) * 1989-02-10 1994-12-07 Nikon Corporation Ultrasonic motor having high drive efficiency
EP0627774A3 (en) * 1989-02-10 1994-12-28 Nippon Kogaku Kk
EP0631334A1 (en) * 1989-02-10 1994-12-28 Nikon Corporation Ultrasonic motor having high drive efficiency
EP0783186A1 (en) * 1989-02-10 1997-07-09 Nikon Corporation Ultrasonic motor having high drive efficiency

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