JPS62203443U - - Google Patents
Info
- Publication number
- JPS62203443U JPS62203443U JP9153386U JP9153386U JPS62203443U JP S62203443 U JPS62203443 U JP S62203443U JP 9153386 U JP9153386 U JP 9153386U JP 9153386 U JP9153386 U JP 9153386U JP S62203443 U JPS62203443 U JP S62203443U
- Authority
- JP
- Japan
- Prior art keywords
- light source
- ccd camera
- microhole
- detected
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
第１図は本考案装置の全体構造を例示する概念
図である。 １……検出対象物気密端子、２……光源装置、
３……ＣＣＤカメラ、４……画像処理装置。
図である。 １……検出対象物気密端子、２……光源装置、
３……ＣＣＤカメラ、４……画像処理装置。
Claims (1)
- 微小穴の検出対象物を挾んでその両面側に所定
の間隔を置いて光源装置とＣＣＤカメラを対向配
置したことを特徴とする微小穴検出装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9153386U JPS62203443U (ja) | 1986-06-16 | 1986-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9153386U JPS62203443U (ja) | 1986-06-16 | 1986-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203443U true JPS62203443U (ja) | 1987-12-25 |
Family
ID=30952404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9153386U Pending JPS62203443U (ja) | 1986-06-16 | 1986-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203443U (ja) |
-
1986
- 1986-06-16 JP JP9153386U patent/JPS62203443U/ja active Pending