JPS62203272U - - Google Patents

Info

Publication number
JPS62203272U
JPS62203272U JP8938286U JP8938286U JPS62203272U JP S62203272 U JPS62203272 U JP S62203272U JP 8938286 U JP8938286 U JP 8938286U JP 8938286 U JP8938286 U JP 8938286U JP S62203272 U JPS62203272 U JP S62203272U
Authority
JP
Japan
Prior art keywords
flow path
susceptor
wafer
epitaxial growth
gravity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8938286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8938286U priority Critical patent/JPS62203272U/ja
Publication of JPS62203272U publication Critical patent/JPS62203272U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP8938286U 1986-06-13 1986-06-13 Pending JPS62203272U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8938286U JPS62203272U (US20100268047A1-20101021-C00003.png) 1986-06-13 1986-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8938286U JPS62203272U (US20100268047A1-20101021-C00003.png) 1986-06-13 1986-06-13

Publications (1)

Publication Number Publication Date
JPS62203272U true JPS62203272U (US20100268047A1-20101021-C00003.png) 1987-12-25

Family

ID=30948324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8938286U Pending JPS62203272U (US20100268047A1-20101021-C00003.png) 1986-06-13 1986-06-13

Country Status (1)

Country Link
JP (1) JPS62203272U (US20100268047A1-20101021-C00003.png)

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