JPS62203262U - - Google Patents
Info
- Publication number
- JPS62203262U JPS62203262U JP9235986U JP9235986U JPS62203262U JP S62203262 U JPS62203262 U JP S62203262U JP 9235986 U JP9235986 U JP 9235986U JP 9235986 U JP9235986 U JP 9235986U JP S62203262 U JPS62203262 U JP S62203262U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition crucible
- refractory material
- sic
- carbon material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 claims description 6
- 239000011819 refractory material Substances 0.000 claims 3
- 239000003575 carbonaceous material Substances 0.000 claims 2
- 239000002344 surface layer Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9235986U JPH024123Y2 (https=) | 1986-06-17 | 1986-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9235986U JPH024123Y2 (https=) | 1986-06-17 | 1986-06-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62203262U true JPS62203262U (https=) | 1987-12-25 |
| JPH024123Y2 JPH024123Y2 (https=) | 1990-01-31 |
Family
ID=30953996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9235986U Expired JPH024123Y2 (https=) | 1986-06-17 | 1986-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024123Y2 (https=) |
-
1986
- 1986-06-17 JP JP9235986U patent/JPH024123Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH024123Y2 (https=) | 1990-01-31 |