JPS62202768U - - Google Patents
Info
- Publication number
- JPS62202768U JPS62202768U JP9154086U JP9154086U JPS62202768U JP S62202768 U JPS62202768 U JP S62202768U JP 9154086 U JP9154086 U JP 9154086U JP 9154086 U JP9154086 U JP 9154086U JP S62202768 U JPS62202768 U JP S62202768U
- Authority
- JP
- Japan
- Prior art keywords
- source device
- evaporation source
- crucible
- section
- shaped cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9154086U JPS62202768U (ru) | 1986-06-16 | 1986-06-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9154086U JPS62202768U (ru) | 1986-06-16 | 1986-06-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62202768U true JPS62202768U (ru) | 1987-12-24 |
Family
ID=30952418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9154086U Pending JPS62202768U (ru) | 1986-06-16 | 1986-06-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62202768U (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014003046A (ja) * | 2012-06-15 | 2014-01-09 | Hitachi Ltd | イオン注入方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59203644A (ja) * | 1983-05-06 | 1984-11-17 | Mitsubishi Electric Corp | 蒸発源用るつぼ |
-
1986
- 1986-06-16 JP JP9154086U patent/JPS62202768U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59203644A (ja) * | 1983-05-06 | 1984-11-17 | Mitsubishi Electric Corp | 蒸発源用るつぼ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014003046A (ja) * | 2012-06-15 | 2014-01-09 | Hitachi Ltd | イオン注入方法 |