JPS62201934U - - Google Patents
Info
- Publication number
- JPS62201934U JPS62201934U JP1986088576U JP8857686U JPS62201934U JP S62201934 U JPS62201934 U JP S62201934U JP 1986088576 U JP1986088576 U JP 1986088576U JP 8857686 U JP8857686 U JP 8857686U JP S62201934 U JPS62201934 U JP S62201934U
- Authority
- JP
- Japan
- Prior art keywords
- gas introduction
- gas
- semiconductor wafer
- wafer processing
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986088576U JPS62201934U (enExample) | 1986-06-12 | 1986-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986088576U JPS62201934U (enExample) | 1986-06-12 | 1986-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201934U true JPS62201934U (enExample) | 1987-12-23 |
Family
ID=30946797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986088576U Pending JPS62201934U (enExample) | 1986-06-12 | 1986-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201934U (enExample) |
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1986
- 1986-06-12 JP JP1986088576U patent/JPS62201934U/ja active Pending