JPS62201608U - - Google Patents
Info
- Publication number
- JPS62201608U JPS62201608U JP9094886U JP9094886U JPS62201608U JP S62201608 U JPS62201608 U JP S62201608U JP 9094886 U JP9094886 U JP 9094886U JP 9094886 U JP9094886 U JP 9094886U JP S62201608 U JPS62201608 U JP S62201608U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- recess
- vacuum
- vacuum chuck
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims 1
Landscapes
- Jigs For Machine Tools (AREA)
- Gripping On Spindles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9094886U JPS62201608U (no) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9094886U JPS62201608U (no) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201608U true JPS62201608U (no) | 1987-12-22 |
Family
ID=30951282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9094886U Pending JPS62201608U (no) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201608U (no) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5646529A (en) * | 1979-09-21 | 1981-04-27 | Citizen Watch Co Ltd | Wafer chuck |
-
1986
- 1986-06-13 JP JP9094886U patent/JPS62201608U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5646529A (en) * | 1979-09-21 | 1981-04-27 | Citizen Watch Co Ltd | Wafer chuck |