JPS62201097U - - Google Patents
Info
- Publication number
- JPS62201097U JPS62201097U JP9028186U JP9028186U JPS62201097U JP S62201097 U JPS62201097 U JP S62201097U JP 9028186 U JP9028186 U JP 9028186U JP 9028186 U JP9028186 U JP 9028186U JP S62201097 U JPS62201097 U JP S62201097U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- elastic support
- precision processing
- model registration
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9028186U JPH0348557Y2 (en, 2012) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9028186U JPH0348557Y2 (en, 2012) | 1986-06-13 | 1986-06-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62201097U true JPS62201097U (en, 2012) | 1987-12-22 |
JPH0348557Y2 JPH0348557Y2 (en, 2012) | 1991-10-16 |
Family
ID=30949996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9028186U Expired JPH0348557Y2 (en, 2012) | 1986-06-13 | 1986-06-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0348557Y2 (en, 2012) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007214449A (ja) * | 2006-02-10 | 2007-08-23 | Ushio Inc | XYθ移動ステージ |
-
1986
- 1986-06-13 JP JP9028186U patent/JPH0348557Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007214449A (ja) * | 2006-02-10 | 2007-08-23 | Ushio Inc | XYθ移動ステージ |
Also Published As
Publication number | Publication date |
---|---|
JPH0348557Y2 (en, 2012) | 1991-10-16 |