JPS62201097U - - Google Patents

Info

Publication number
JPS62201097U
JPS62201097U JP9028186U JP9028186U JPS62201097U JP S62201097 U JPS62201097 U JP S62201097U JP 9028186 U JP9028186 U JP 9028186U JP 9028186 U JP9028186 U JP 9028186U JP S62201097 U JPS62201097 U JP S62201097U
Authority
JP
Japan
Prior art keywords
surface plate
elastic support
precision processing
model registration
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9028186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0348557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9028186U priority Critical patent/JPH0348557Y2/ja
Publication of JPS62201097U publication Critical patent/JPS62201097U/ja
Application granted granted Critical
Publication of JPH0348557Y2 publication Critical patent/JPH0348557Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
JP9028186U 1986-06-13 1986-06-13 Expired JPH0348557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9028186U JPH0348557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-13 1986-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9028186U JPH0348557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-13 1986-06-13

Publications (2)

Publication Number Publication Date
JPS62201097U true JPS62201097U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-22
JPH0348557Y2 JPH0348557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-16

Family

ID=30949996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9028186U Expired JPH0348557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-13 1986-06-13

Country Status (1)

Country Link
JP (1) JPH0348557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214449A (ja) * 2006-02-10 2007-08-23 Ushio Inc XYθ移動ステージ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214449A (ja) * 2006-02-10 2007-08-23 Ushio Inc XYθ移動ステージ

Also Published As

Publication number Publication date
JPH0348557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-16

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