JPS62200548A - Manufacture of electrode stylus - Google Patents

Abstract

PURPOSE:To obtain an electrode stylus having plural electrodes by forming the plural electrodes polishing the main body part side of the electrode stylus in which an electrode stylus main body member and an electrode stylus supporting member are joined, and forming a thin film attached and formed at a part except the electrode, and a conductive connecting part. CONSTITUTION:A part at the raw material Ms side of the raw material M of the electrode stylus in which the raw material Ms of an electrode main body part, and an electrode stylus supporting member Mc are joined and fixed, is polished in a prescribed outer peripheral plane shape. By polishing, electrodes (a) and (b) having prescribed patterns are formed at an outer peripheral plane formed at the tip part of the raw material Ms. Next, at the part except the electrode stylus main body part in which the electrodes (a) and (b) in the raw material M are formed, a thin film T made of a conductive substance is attached and fixed. The part regulated in advance is eliminated from the thin film T, and conductive connecting parts Ta and Tb against the electrodes (a) and (b) are formed. An electrical connection between the electrodes (a) and (b), and the connecting parts Ta and Tb, can be kept in a good relation with an overlapping part K shown in figure. Thus, the electrode stylus having the plural electrodes can be manufactured.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention provides a plurality of 11! This invention relates to a method for manufacturing an electrode needle provided with a pole.

(Prior art) A disc-shaped information recording medium (disc) has a simpler drive mechanism for the recording medium than other shapes of information recording media, such as tape-shaped or sheet-shaped recording media, making the configuration of a playback device simple and inexpensive. In recent years, floppy disks, optical disks, and static Disks that detect changes in capacitance have come into widespread use in many fields and for many applications, but among the various types of disks mentioned above are disks on which information signals have been recorded (discs for playback only). , a disk on which a user can record data only once (write-once type disk), and a rewritable disk (erasable disk on which data can be repeatedly recorded) are known.

The aforementioned read-only discs include optical discs and capacitive violet discs, which have bits formed on the signal surface of the disc, such as convex or concave parts, corresponding to the information signal to be recorded. It has already been put into practical use as a value change detection type disc, and a playback-only disc is used as a recording device for producing the master disc.

A large number of copies are made based on a high-density recording disk master made using a drive mechanism with high mechanical precision and a recording element feeding mechanism with high mechanical precision. A read-only disk can achieve high-density recording and playback of information signals by causing the playback element to faithfully follow the recording trace through tracking control during playback. However, with a read-only disc, it is not possible to erase the information signals recorded on it and record new information signals.

Furthermore, among the various types of discs described above, write-once discs on which information signals can be recorded only once also erase the information signals recorded on them and record new information signals, similar to the playback-only discs described above. It is not possible.

Information signal recording D (writing) and erasing (information signal rewriting)
Magnetic disks have traditionally been the most commonly known disks that can be read and reproduced (non-destructively read), and have been put into practical use as storage devices in various devices.
Conventional magnetic disk drives rely on the mechanical precision of the magnetic head's feeding mechanism to create recording traces during recording.
Since the recording track was traced during playback, high-density recording and playback was not possible.

In recent years, as the demand for high-density recording of information signals on disks has increased, efforts have been made to obtain magnetic disk devices with high-density recording by narrowing the recording track and applying tracking control methods, for example, in Japanese Patent Laid-Open No. 55 -998
As disclosed in Publication No. 88, a proposal has been made to perform high-density recording and reproduction using a magnetic disk on which only tracking reference signals are recorded in advance, but this existing proposal does not allow recording. In addition to the drawback that a device with a complicated configuration is required to ensure that only the tracking reference signal is not erased when rewriting the content, the size of the magnetic gap is extremely large in order to achieve high-density recording with a magnetic disk. A minute magnetic head is required, but such a magnetic head is difficult to manufacture.

Writing 0 (writing) and erasing information signal (rewriting information signal)
Recently, as a disc with the possibility of playback (non-destructive reading), a phase change is caused in the recording layer of the disc by irradiation with a laser beam spot, making it possible to repeatedly record and play back information signals. Although discs have also been proposed, it has been pointed out that these types of discs currently have problems in weather resistance, making it difficult to obtain recording media suitable for long-term storage.

Japanese Patent Application Laid-Open No. 58-1981 was first developed as a disc that can satisfactorily solve the problems of the various types of rewritable discs mentioned above.
There is a non-volatile charge memory disk disclosed in Japanese Patent No. 56245. That is, an insulating film having a charge storage function is provided on a semiconductor substrate, and a depletion region and a non-depletion region are formed, which correspond to a tracking reference signal and a signal indicating the reference rotational phase of the disk, respectively. This is a non-volatile charge memory disk in which an array pattern is pre-formed on a semiconductor substrate in a state that is not erased during normal recording, reproducing, erasing, etc. operations. When recording, reproducing, and erasing operations are performed through the electrodes provided on the recording/reproducing needle that is rotated and slides into contact with the surface of the nonvolatile charge memory disk, the recording/reproducing needle prerecords information on the nonvolatile charge memory disk. Since it is possible to reproduce the tracking reference signal that has been recorded and to control the tracking of the recording and reproducing needle based on it, it is possible to record and reproduce information signals with an extremely narrow recording trace interval (track pitch). Since the electrode provided on the recording/reproducing needle used for reproduction can be configured to be extremely thin, information signals with extremely short recording wavelengths can be recorded and reproduced well, and therefore, stably. and,
This allows high-density recording and reproduction in a rewritable state.

However, as described above, an insulating film having a charge storage function is provided on a semiconductor substrate, and a depletion region and a non-depletion region corresponding to a tracking reference signal and a signal indicating a reference rotational phase of a disk, respectively, are formed on a semiconductor substrate. A non-volatile charge memory disk, which is pre-formed on a semiconductor substrate, is rotated at a predetermined number of rotations in such a state that the arrangement pattern with the area is not erased during normal recording, reproducing, erasing, etc. operations, and the non-volatile charge memory disk is Conventional recording in which recording and reproducing operations are performed while tracking control of the recording and reproducing needle is performed based on a tracking reference signal reproduced by an electrode provided on the recording and reproducing needle that slides into contact with the surface of the disk. In the playback device, the playback operation of the tracking reference signal and the recording operation of the information signal are performed in a time-sharing manner during the recording mode of the recording and playback device. It cannot be used if the signal must be continuous on the time axis, and the reproduction operation of the tracking reference signal and the recording operation of the information signal are performed in a time-sharing manner in the recording mode of the recording/reproduction device. In addition, if there is uneven rotation of the disk, it becomes impossible to detect the tracking reference signal, and furthermore, the switching circuit described above is Because it is connected to the resonant circuit of the high-frequency signal in the change detection circuit, the detection operation of the tracking reference signal may become unstable due to an increase in stray capacitance. At the present applicant company, an insulating film having a charge storage function is provided on a semiconductor substrate.

The arrangement pattern of the depletion region and non-depletion region, which corresponds to the tracking reference signal and the signal indicating the reference rotational phase of the disk, respectively, is not erased during each operation such as one-degree recording, playback, and erasure. A non-volatile charge memory disk formed in advance on a semiconductor substrate is rotated at a predetermined number of revolutions, and recording and reproducing operations are performed via electrodes provided on a recording and reproducing needle that slides into contact with the surface of the non-volatile charge memory disk. In a recording/reproducing device using a non-volatile charge memory disk, a recording/reproducing needle that comes into sliding contact with the surface of the non-volatile charge memory disk is capable of controlling the length of the recording trace formed on the non-volatile charge memory disk. It is said to be equipped with individual electrodes that are in a front-to-back positional relationship with respect to the direction of movement and are substantially parallel to each other, and one of the two electrodes mentioned above is It is connected to a reproducing circuit that is capable of at least reproducing the tracking reference signal regardless of the operating mode set in the recording and reproducing device, and furthermore, A non-volatile charge memory disk comprising means for preventing crosstalk components from being supplied to the circuit of the electrode connected to the regeneration circuit based on the signal supplied to the electrode from being supplied to the regeneration circuit. A recording/playback device was proposed.

(Problems to be Solved by the Invention) By the way, conventionally known elements for detecting an information signal recorded on a disk as a change in capacitance value are shown in FIGS. As illustrated in FIG. 6, one electrode was constructed in a regenerated needle body made of a hard, wear-resistant material.

That is, FIG. 4 shows a regeneration needle S that detects changes in capacitance value.
It is a perspective view of an example configuration, and 2 is a cylindrical member made of titanium, for example, with a diameter of about 0.4 mm, and the tip of the cylindrical member 2 has a predetermined outer circumferential surface. A hard, wear-resistant material that has been polished to its desired shape.

For example, a regenerated needle body 3 made of diamond is fixed with a conductive adhesive layer such as silver solder.

As is clear from FIG. 5, which shows an enlarged view of the vicinity of the tip of the diamond regenerated needle main body 3,
It is polished into a predetermined polygonal shape.

The electrode 4 is formed by, for example, implanting boron ions into one of the peripheral walls to a depth of 3000 angstroms from the surface. The bottom surface of the regenerated needle main body 3 is a polygonal sliding contact surface, and the sliding contact surface has a diagonal length of, for example, about 10 to 20 microns.

As shown in FIG. 6, the regenerator S shown in FIG. 4 is inserted into the hole provided at the tip of the holder 1 made of synthetic pine resin, The hole at the tip of the fly lead 5 made of, for example, bronze foil is fitted into the part of the regenerated needle S protruding from the holder 1, the fly reed 5, and the regenerated needle S using the electrosensitive resin 6. and teli'ifi.

The conventional regenerated needle S having the general configuration as described above has one electrode 4 configured in the regenerated needle main body, and the regenerated needle main body has a cylindrical shape made of a conductive material. Since the member 2 is electrically connected to the electrode 4 by a conductive bond such as silver solder, the cylindrical member 2 made of the conductive material is electrically connected to the electrode 4. and can be used.

However, as described above, an insulating film having a charge storage function is provided on the conductor substrate, and a depletion region and a non-conductor are formed, which correspond to the tracking reference signal and the signal indicating the reference rotational phase of the disk, respectively. A recording operation of a recording signal on a nonvolatile charge memory disk, which is formed in advance on a semiconductor substrate in such a state that the arrangement pattern with depletion regions is not erased during normal recording, reproducing, and erasing operations.

A plurality of recording/reproducing needles are used when reproducing information signals from a non-volatile charge memory is performed using a recording/reproducing needle having two electrodes. When electrodes are provided on the electrode needle body, it is necessary to provide individual conductive connection parts (lead wire parts) for each of the plurality of electrodes, but the above-mentioned electrode needle Since the dimensions of the electrode needle are extremely small, it is extremely difficult to connect individual lead wires to the plurality of electrodes provided on the electrode needle body.

(Means for Solving the Problems) The present invention provides a material for the electrode needle body made of a wear-resistant and highly hard insulating material, and an ff! made of an insulating material. a step of polishing the material-side portion of the electrode needle main body in the material of the electrode needle to which the electrode needle support member is bonded and fixed, into a predetermined outer peripheral surface shape required for the electrode needle main body; A step of forming conductive electrodes each having a predetermined pattern at a plurality of specific locations spaced apart from each other on the outer peripheral surface formed at the tip of the electrode needle material by polishing; a step of depositing and forming a thin film of a conductive substance on a portion other than the electrode needle main body on which the plurality of conductive electrodes as described above are formed;

Manufacturing an electrode needle comprising the step of removing a predetermined portion of the conductive thin film to form a conductive connection to each of the plurality of electrodes using the conductive G film. This method solves the problems mentioned above.

(Example) Hereinafter, the content of the method for manufacturing an electrode needle of the present invention will be specifically explained in detail with reference to the accompanying drawings. FIG. 1 is a diagram illustrating the outline of the sequential steps in manufacturing an electrode needle according to the method of manufacturing an electrode needle of the present invention, and (a) in FIG. This is an example of an electrode needle material M formed by bonding and fixing an electrode needle main body material Ms made of an insulator lti and an electrode needle support member Me made of an insulator, and having the above-mentioned wear resistance. As the material Ms of the electrode needle main body made of a highly hard insulating material, for example, a prismatic column made of diamond crystal may be used, and as the electrode needle support member Mc made of the above-mentioned insulating material, for example, a ceramic material may be used. A cylindrical body made of aluminum may be used.

The above-mentioned material Ms of the w1 pole needle main body portion and the electrode needle support member Mc are firmly fixed with an insulating adhesive. The manner in which the electrode needle main body material Ms and the electrode needle support member Me are fixed is such that a part of the electrode needle main body material Ms is fitted into a hole drilled in the electrode needle support member Mc. It is preferable to use a type S in which the two are firmly fixed using an insulating adhesive.

The material M of the 18-electrode needle shown in FIG. 0), from the electrode needle main body material Ms to the electrode needle support member Me.
In this case, the electrode needle body has a predetermined outer peripheral surface shape required for the electrode needle main body. In the example shown in FIG. 1, the outer peripheral surface is shaped like a pyramid with six side surfaces, and FIG. 1(b) is a side view.

Further, (Q) in FIG. 1 is a bottom view.

Next, the above-mentioned polishing process is performed to form the image shown in FIG. 1(b).

As illustrated in (c), the material Ms of the electrode needle body part
to the electrode needle support member Mc, a plurality of specific points separated from each other on the outer circumferential surface of the electrode needle main body, which have a predetermined outer circumferential shape required for the electrode needle main body. When conductive electrodes a and b each having a predetermined pattern are formed on the parts A s g B s of 1(d) is a side view, and FIG. 1(e) is a bottom view.

In order to form the conductive electrodes a and b in the above-described process, it is necessary to apply approximately 300 mm from the surface to the area where the electrodes are to be formed.
For example, boron ions may be implanted to a depth of 0 angstroms. Note that the boron implanted portions other than the electrode portions can be easily removed by polishing.

Next, when a thin film T made of a conductive substance is deposited on the electrode needle material M except for the electrode needle main body where the conductive electrodes a and b are formed, the result is as shown in (f) in FIG.
(g) is obtained, but (f) in Fig. 1 is a side view, and (g) in Fig. 1 is obtained.
) is a bottom view.

The adhesion and formation of the thin film T using the conductive substance in the above-described process is carried out by applying a masking agent to the electrode needle main body on which the conductive electrodes a and b of the electrode needle material M are formed.
This can be easily done by applying a vapor deposition method or a sputtering method to deposit a thin g'r of a predetermined thickness using a conductive material, and then removing the above-mentioned masking agent.

Next, the above-mentioned conductive thin It! By removing a predetermined portion of the XT, for example by polishing or cutting, the conductive thin film [T is a conductive connection T to each of the plurality of electrodes described above.
The state shown in FIG. 1 (h) and (i) in which a and Tb are formed is obtained, but FIG. 1 (h) is a side view, and FIG. 1(i) is a bottom view.

(k) of FIG. 1 is a longitudinal sectional front view of the portion indicated by the dotted line frame shown in (h) of FIG.
As is clear from (k) in FIG. 1, the fttt4a (same for electric [b]) and the conductive connection part Ta (same for conductive connection part Tb) formed in the itt pole needle main body are , the overlapping portion provides good electrical connection between the two.

(j) in Fig. 1 is a state in which the tip of the object as illustrated in (h) and (i) of Fig. 1 above has been polished to form a sliding surface f. FIG. The sliding contact surface f of the electrode needle made in this way
The length of the diagonal line is, for example, about 10 to 20 microns.

As shown in FIG. 3, the electrode needle made in the above manner is fitted with the end of the electrode needle support part into the hole provided at the tip of the synthetic resin holder 1. After that, the hole 11 at the tip of the fly lead 8 made of a flexible printed wiring board configured as shown in FIG. Then, the connecting end 12 of the fly lead 8 described above and the conductive connecting part Ta of the electrode needle are bonded together with a conductive adhesive 16, and the connecting end 13 of the fly lead 8 and the electrode needle Conductive connection T at
b and are bonded together using a conductive adhesive 17.

The fly lead 8 described above, as illustrated in FIG. 2, has a thin film of a predetermined pattern made of a conductive material adhered to a flexible synthetic resin substrate 9. In the example shown in the second figure, the film of the predetermined pattern made of the conductive material described above is attached to the connection end 12.
, 13, terminal 14° 15. It is configured to include a lead wire portion 10 and the like. The terminals 14 and 15 described above are respectively connected to the recording circuit and the reproduction circuit in the recording and reproduction apparatus.

(°Effect) As is clear from the above detailed explanation, the method for manufacturing the electrode needle of the present invention is as follows: a step of polishing the material-side portion of the electrode needle main body in the material of the electrode needle to which the electrode needle support member is bonded and fixed, into a predetermined outer peripheral surface shape required for the electrode needle main body; forming conductive electrodes each having a predetermined pattern at a plurality of specific locations spaced apart from each other on the outer peripheral surface formed at the tip of the material of the electrode needle by polishing;
A step of adhering and forming an fl film made of a conductive substance on a portion of the electrode needle material described above except for the electrode needle main body portion on which a plurality of conductive electrodes as described above are formed, and This method of manufacturing an electrode needle includes the step of forming a conductive connection portion to each of the plurality of electrodes using the conductive thin film by removing a predetermined portion. According to the manufacturing method of the electrode needle, it is possible to easily form a plurality of electrodes on the electrode needle body, and also to easily conduct electrical wiring to each of the plurality of electrodes described above. According to the present invention, the above-mentioned problems with conventional equipment can be satisfactorily solved.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of the manufacturing process of an electrode needle according to the method of manufacturing an electrode needle of the present invention, FIG. 2 is a plan view showing an example configuration of a fly lead, and FIG. FIG. 4 is a perspective view showing a configuration example of a conventional regenerated needle; FIG. 5 is an enlarged perspective view of a part of a conventional regenerated needle; FIG. 6 is a perspective view illustrating a state in which a conventional regenerated needle is assembled into a holder. Ms...Material of the electrode needle body made of a highly hard insulating material having wear resistance, Me...Electrode needle support member made of insulator 1M...Material of the electrode needle, S...Recycled needle , a, b...
・Electrode, T... Conductive thin film, Ta, Tb... Conductive connection portion for each of a plurality of electrodes, 1... Synthetic resin holder, 8... Flexible printed wiring Fly lead by substrate, 12, 13... Connecting end of fly lead 8, 16, 17... Conductive adhesive, patent applicant: Victor Japan Co., Ltd. <D Figure 2

Claims (1)

[Claims] The material side of the electrode needle body described above in the material of the electrode needle which is formed by bonding and fixing the material of the electrode needle body made of a highly hard insulating material having wear resistance and the electrode needle support member made of an insulating material. a step of polishing the portion into a predetermined outer circumferential shape required by the electrode needle main body, and a plurality of specific locations separated from each other on the outer circumferential surface formed at the tip of the material of the electrode needle by the polishing process. a step of forming conductive electrodes each having a predetermined pattern on each of the electrode needles, and a step of forming conductive electrodes on the material of the electrode needle described above except for the electrode needle main body on which the plurality of conductive electrodes as described above are formed. depositing a thin film and removing predetermined portions of the conductive thin film to form conductive connections to individual ones of the plurality of electrodes with the conductive thin film; A method for manufacturing an electrode needle consisting of.