JPS62199951U - - Google Patents
Info
- Publication number
- JPS62199951U JPS62199951U JP8721786U JP8721786U JPS62199951U JP S62199951 U JPS62199951 U JP S62199951U JP 8721786 U JP8721786 U JP 8721786U JP 8721786 U JP8721786 U JP 8721786U JP S62199951 U JPS62199951 U JP S62199951U
- Authority
- JP
- Japan
- Prior art keywords
- wafer storage
- view
- jig
- transporting
- supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8721786U JPS62199951U (me) | 1986-06-10 | 1986-06-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8721786U JPS62199951U (me) | 1986-06-10 | 1986-06-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62199951U true JPS62199951U (me) | 1987-12-19 |
Family
ID=30944237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8721786U Pending JPS62199951U (me) | 1986-06-10 | 1986-06-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62199951U (me) |
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1986
- 1986-06-10 JP JP8721786U patent/JPS62199951U/ja active Pending