JPS62199714U - - Google Patents

Info

Publication number
JPS62199714U
JPS62199714U JP8710686U JP8710686U JPS62199714U JP S62199714 U JPS62199714 U JP S62199714U JP 8710686 U JP8710686 U JP 8710686U JP 8710686 U JP8710686 U JP 8710686U JP S62199714 U JPS62199714 U JP S62199714U
Authority
JP
Japan
Prior art keywords
dimensional array
fly
element lenses
optical axis
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8710686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8710686U priority Critical patent/JPS62199714U/ja
Publication of JPS62199714U publication Critical patent/JPS62199714U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
JP8710686U 1986-06-06 1986-06-06 Pending JPS62199714U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8710686U JPS62199714U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8710686U JPS62199714U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Publications (1)

Publication Number Publication Date
JPS62199714U true JPS62199714U (enrdf_load_stackoverflow) 1987-12-19

Family

ID=30944027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8710686U Pending JPS62199714U (enrdf_load_stackoverflow) 1986-06-06 1986-06-06

Country Status (1)

Country Link
JP (1) JPS62199714U (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0233914A (ja) * 1988-07-25 1990-02-05 Ushio Inc 照明光学装置
JPH0296703A (ja) * 1988-10-03 1990-04-09 Daiko Seisakusho:Kk 複合レンズ及びその製造方法
WO1999025010A1 (fr) * 1997-11-12 1999-05-20 Nikon Corporation Appareil d'exposition, appareil de fabrication de composants, et procede de fabrication d'appareils d'exposition
JP2011009611A (ja) * 2009-06-29 2011-01-13 Ushio Inc インテグレータおよびそのインテグレータを用いた光照射装置
JP2021067814A (ja) * 2019-10-23 2021-04-30 キヤノン株式会社 照明光学系、露光装置および物品製造方法
CN115857071A (zh) * 2021-12-03 2023-03-28 凤凰电机公司 复眼透镜、具备其的光照射装置以及复眼透镜的制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543557A (en) * 1977-06-09 1979-01-11 Ricoh Co Ltd Production of lens body array
JPS59226317A (ja) * 1983-06-06 1984-12-19 Nippon Kogaku Kk <Nikon> 照明装置
JPS6046517B2 (ja) * 1978-12-29 1985-10-16 石川島播磨重工業株式会社 粒子荷電装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543557A (en) * 1977-06-09 1979-01-11 Ricoh Co Ltd Production of lens body array
JPS6046517B2 (ja) * 1978-12-29 1985-10-16 石川島播磨重工業株式会社 粒子荷電装置
JPS59226317A (ja) * 1983-06-06 1984-12-19 Nippon Kogaku Kk <Nikon> 照明装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0233914A (ja) * 1988-07-25 1990-02-05 Ushio Inc 照明光学装置
JPH0296703A (ja) * 1988-10-03 1990-04-09 Daiko Seisakusho:Kk 複合レンズ及びその製造方法
WO1999025010A1 (fr) * 1997-11-12 1999-05-20 Nikon Corporation Appareil d'exposition, appareil de fabrication de composants, et procede de fabrication d'appareils d'exposition
JP2011009611A (ja) * 2009-06-29 2011-01-13 Ushio Inc インテグレータおよびそのインテグレータを用いた光照射装置
JP2021067814A (ja) * 2019-10-23 2021-04-30 キヤノン株式会社 照明光学系、露光装置および物品製造方法
CN115857071A (zh) * 2021-12-03 2023-03-28 凤凰电机公司 复眼透镜、具备其的光照射装置以及复眼透镜的制造方法
JP2023083095A (ja) * 2021-12-03 2023-06-15 フェニックス電機株式会社 フライアイレンズ、それを備える光照射装置、およびフライアイレンズの製造方法
CN115857071B (zh) * 2021-12-03 2025-08-15 凤凰电机公司 复眼透镜、具备其的光照射装置以及复眼透镜的制造方法

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