JPS62199079A - Gas laser oscillator device - Google Patents
Gas laser oscillator deviceInfo
- Publication number
- JPS62199079A JPS62199079A JP4027086A JP4027086A JPS62199079A JP S62199079 A JPS62199079 A JP S62199079A JP 4027086 A JP4027086 A JP 4027086A JP 4027086 A JP4027086 A JP 4027086A JP S62199079 A JPS62199079 A JP S62199079A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- laser
- halogen
- tube
- gas laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007797 corrosion Effects 0.000 claims abstract description 18
- 238000005260 corrosion Methods 0.000 claims abstract description 18
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 16
- 150000002367 halogens Chemical class 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 12
- 229920005989 resin Polymers 0.000 claims abstract description 11
- 239000011347 resin Substances 0.000 claims abstract description 11
- 230000010355 oscillation Effects 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 4
- 239000010935 stainless steel Substances 0.000 abstract description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052731 fluorine Inorganic materials 0.000 abstract description 3
- 239000011737 fluorine Substances 0.000 abstract description 3
- 230000009257 reactivity Effects 0.000 abstract description 2
- 229920003002 synthetic resin Polymers 0.000 abstract description 2
- 239000000057 synthetic resin Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 24
- 239000002033 PVDF binder Substances 0.000 description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- VJTAXXUIRYOXBT-KUBHLMPHSA-N [(2r,3r,4s,5s)-3,4-dihydroxy-5-(4-oxo-1,5-dihydropyrrolo[3,2-d]pyrimidin-7-yl)pyrrolidin-2-yl]methyl dihydrogen phosphate Chemical compound O[C@@H]1[C@H](O)[C@@H](COP(O)(O)=O)N[C@H]1C1=CNC2=C1NC=NC2=O VJTAXXUIRYOXBT-KUBHLMPHSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 125000000391 vinyl group Chemical class [H]C([*])=C([H])[H] 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は寿命を向上させたガスレーザ・発振装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a gas laser oscillation device with improved lifespan.
（従来の技術）
一般に紫外光領域のレーザ光を発振する希ガスハライド
エキシマレーザ発振装置はレーザガス媒質としてＦ２
、 ＨＣｌなどのハロゲンガスを用いる。例えば波長が
３０８ｎｍのＸｅＣｌエキシマレーザ罠用いるガスは、
ＨＣＩ、Ｘｅ、Ｈｅガスを混合したものである。これ
らのハロゲンガスは反応性が強いためレーザ管の内壁と
反応し、Ｉ−ロゲンガスの組成が低くなるとか、不純物
を発生し、レーザ出力の低下、さらに発振停止をもたら
すなどの不都合が発生した。またエキシマレーザの場合
は封入ガス圧が大気圧以上、通常２気圧〜６気圧と高い
ためレーザ管の材質、構造は耐圧性をも要し、耐食性を
もった樹脂材例えばフッ素系のもので構成すると、肉厚
は１５〜３０朋となり、非常に高価になる不都合があっ
た。従って従来は一般にステンレス鋼を用いるが、これ
でも寿命が短かく、高価となる不都合があった。(Prior art) In general, a rare gas halide excimer laser oscillator that oscillates laser light in the ultraviolet region uses F2 as a laser gas medium.
, using halogen gas such as HCl. For example, the gas used in the XeCl excimer laser trap with a wavelength of 308 nm is
It is a mixture of HCI, Xe, and He gas. Since these halogen gases have strong reactivity, they react with the inner wall of the laser tube, causing problems such as lowering the composition of the I-halogen gas and generating impurities, resulting in a decrease in laser output and oscillation stoppage. In addition, in the case of excimer lasers, the pressure of the filled gas is higher than atmospheric pressure, usually 2 to 6 atmospheres, so the material and structure of the laser tube must be pressure resistant, and it is made of corrosion-resistant resin, such as a fluorine-based material. As a result, the wall thickness becomes 15 to 30 mm, which is disadvantageous in that it becomes very expensive. Therefore, in the past, stainless steel was generally used, but even this had the disadvantages of short life and high cost.
（発明が解決しようとする問題点）
上述したように、ガスレーザ発振装置はレーザガス媒質
によりレーザ管が腐食され、特に・・ロゲンガスをレー
ザガス媒質としたものは腐食のため短寿命であり、しか
も封入ガス圧も高いので、耐食性の樹脂材をレーザ管に
用いると非常に高価となる不都合があった。(Problems to be Solved by the Invention) As mentioned above, in gas laser oscillation devices, the laser tube is corroded by the laser gas medium, and in particular, those using rogen gas as the laser gas medium have a short lifespan due to corrosion, and Since the pressure is also high, using a corrosion-resistant resin material for the laser tube has the disadvantage of being extremely expensive.
本発明は、上述の不都合を除去するもので、安価で長寿
命のガスレーザ発振装置を提供することを目的とする。The present invention eliminates the above-mentioned disadvantages, and aims to provide a gas laser oscillation device that is inexpensive and has a long life.
（問題点を解決するための手段と作用）本発明はガスレ
ーザ発振装置のレーザ管を金属部材からなる本体部と、
これの内面に接着したにより腐食を防止したものである
。なおハロゲン耐食性樹脂材とは、フッ素系樹脂および
これと同等以上の耐食性を有する高分子部材のことであ
る、（実施例）
以下１本発明の詳細を図示の実施例を参照して説明する
。なお本実施例は本発明を希ガスハライドエキシマレー
ザ発振装置に適用したものである。第１図は本実施例の
要部を断面したもので、１；
（１）はレーザ管で、詳細は後述するが、内部諷金属製
の一対の保持板（２） 、 Ｆ３）がレーザ管（１）に
取付けられている。一方の保持板（２）には絶縁部材（
４１、（４）を介して、金属製の取付は板（５）が設け
られている。(Means and effects for solving the problems) The present invention provides a laser tube of a gas laser oscillation device with a main body made of a metal member,
This is adhered to the inner surface to prevent corrosion. Note that the halogen corrosion-resistant resin material refers to a fluororesin and a polymer member having corrosion resistance equal to or higher than that of the fluorine-based resin. (Example) The details of the present invention will be explained below with reference to the illustrated example. In this embodiment, the present invention is applied to a rare gas halide excimer laser oscillation device. FIG. 1 is a cross-sectional view of the main parts of this embodiment. 1; (1) is the laser tube; details will be described later, but a pair of retaining plates (2) and F3) made of internal metal are the laser tube. It is attached to (1). One retaining plate (2) has an insulating member (
41, via (4) a metal mounting plate (5) is provided.
取付板（５）にはレーザ管（１）ＫＢって延びる高電圧
の陽極（６）が取付けられていて、これに対向して陰極
（７）が保持板（３） １３）に取付けられていて、こ
の陰極（７）は接地されている。また取付は板（５）お
よび保持板（３）には予備放電のためのピン電極（９）
、・・・、 ａｎ 、・・・がそれぞれ対になって陽極
（６）、陰極（力に浴って多数設けられている。これら
ビン電極（９）、・・・にはピーキングコンデンサαυ
が接続されている。０は高圧パルス電源で、一端は接地
され、他端は陽極（６）Ｋ接続されている。またレーザ
管（１）は１（ＣＪ ６るいはＦ２などのハロゲンガス
を含んだガスレーザ媒質が封入されている。A high voltage anode (6) extending from the laser tube (1) KB is attached to the mounting plate (5), and a cathode (7) opposite to this is attached to the holding plate (3) 13). This cathode (7) is grounded. In addition, there is a pin electrode (9) for preliminary discharge on the plate (5) and holding plate (3).
, .
is connected. 0 is a high voltage pulse power supply, one end of which is grounded and the other end connected to an anode (6) K. The laser tube (1) is filled with a gas laser medium containing a halogen gas such as CJ6 or F2.
さてレーザ管（１）は本体部（１ａ）と耐食部（１ｂ）
とからなっている。本体部（１ａ）はＩＲＰ、アクリル
などの合成樹脂材あるいは金、鴫などで構成されるが本
実施例においてはステンレス鋼管（１ｃ）で構成した。Now, the laser tube (1) has a main body part (1a) and a corrosion-resistant part (1b).
It consists of The main body part (1a) is made of a synthetic resin material such as IRP or acrylic, or gold or black, but in this embodiment, it is made of a stainless steel pipe (1c).
耐食部（１１））はハロゲンガス（対して反応性の少な
いフッ素系樹脂などで構成式れるが、本実施例において
は板状のポリフッ化ビニリデン板（１ｄ）を使用し、そ
の厚さは数ｎ程度がよい、このポリフッ化ビニＩＪデン
板（１ｄ）は、その−面に化学繊維の一部を溶かし込ん
で接着面（１ｅ）を形成し、例えばエポキシ系接着剤で
接着する。また両端突き合わせ部は第２図に示すように
ポリフッ化ビニリデンからなる当て板（１ｆ）をポリフ
ッ化ビニリデン板（１ｄ）の端部と端部に橋渡しして、
その周囲を完全気密となるように溶接する。さらにまた
ポリフッ化ビニリデン板（１ｄ）とステンレス鋼管（１
ｃ）内壁面との接着は両者の間に接着剤を塗った後、そ
の間を真空で引きながら接着剤を固化させる。従って本
体部（１ａ）と耐食部（１ｂ）との間には大気が残留す
ることなく密着している。The corrosion-resistant part (11)) can be made of fluororesin, which is less reactive to halogen gas, but in this example, a plate-shaped polyvinylidene fluoride plate (1d) is used, and its thickness is several minutes. This polyfluorinated vinyl IJ Den board (1d), which has a good thickness of about As shown in Fig. 2, the abutting portion is made by bridging a backing plate (1f) made of polyvinylidene fluoride between the ends of the polyvinylidene fluoride plates (1d).
Weld the area around it to make it completely airtight. Furthermore, polyvinylidene fluoride plate (1d) and stainless steel pipe (1d)
c) For adhesion to the inner wall surface, apply adhesive between the two and then apply vacuum between the two to solidify the adhesive. Therefore, the main body portion (1a) and the corrosion-resistant portion (1b) are in close contact with each other without any air remaining between them.
次に他の実施例につき述べる。この実施例は、第３図に
示すようにポリフッ化ビニリデン板（１ｄ）の両端部（
１ｇ）、（ｔｇ）を直接突合わせて溶接したものである
。その他は前述の実施例と同様なので説明を省略する。Next, other embodiments will be described. In this embodiment, as shown in Fig. 3, both ends (
1g) and (tg) are directly butted and welded. The rest is the same as the previous embodiment, so the explanation will be omitted.
以上詳述し友ように、本発明のガスレーザ発振装置は、
レーザ管内壁にハロゲン耐食性樹脂材を接着して構成し
たので、従来のようにレーザガス媒質によシレーザ管内
壁が腐食されることが少ないから寿命が大となる。特に
レーザガス媒質としてハロゲンを含む場合にはその寿命
は著しく増大する。また不純物の生成が、きわめて少な
くなるため、放電の安定性も増加し、アーク発生などに
よる出力変動も少なくなる。さらにまた接着によシ耐食
部を構成したので、極めて軽量、安価でしかも容易に構
成できる。As detailed above, the gas laser oscillation device of the present invention includes:
Since the halogen corrosion-resistant resin material is bonded to the inner wall of the laser tube, the inner wall of the laser tube is less likely to be corroded by the laser gas medium as in the conventional case, so the service life is extended. In particular, when the laser gas medium contains halogen, its lifetime increases significantly. Furthermore, since the generation of impurities is extremely reduced, the stability of discharge is increased, and output fluctuations due to arcing and the like are also reduced. Furthermore, since the corrosion-resistant portion is constructed by adhesion, it is extremely lightweight, inexpensive, and easy to construct.
なお、本実施例としてニロゲンを含むガスレーザ発振装
置につき記載したが、これに限定されず他のガスレーザ
発振装置でもよい。Although a gas laser oscillation device containing nirogen has been described in this embodiment, the present invention is not limited to this, and other gas laser oscillation devices may be used.
第１図は本発明の実施例の要部ＩＩｆＴ面図、第２図は
同じく要部拡大＠回図、第３図は本発明の他の実施例の
要部拡大断面図である。
（１）・・・レーザ管体、
（１ｄ）・・・ハロゲン耐食性樹脂材、（６） 、 （
７）・・・一対の主電極。
代理人 弁理士 則 近 憲 重
囲 竹 花 喜久男
第 ２１！！
第３図FIG. 1 is an IIfT sectional view of the main part of an embodiment of the present invention, FIG. 2 is an enlarged @circle view of the main part, and FIG. 3 is an enlarged sectional view of the main part of another embodiment of the invention. (1)...Laser tube, (1d)...Halogen corrosion resistant resin material, (6), (
7)...A pair of main electrodes. Agent Patent Attorney Nori Chika Shigeaki Kikuo Takehana 21st! ! Figure 3
Claims (3)
レーザ媒質を充填したガスレーザ発振装置において、上
記レーザ管はほぼ管内壁全面にハロゲン耐食性樹脂材が
接着されていることを特徴とするガスレーザ発振装置。(1) A gas laser oscillation device in which a pair of main electrodes are provided in a laser tube and filled with a gas laser medium, characterized in that the laser tube has a halogen corrosion-resistant resin material adhered to almost the entire inner wall of the tube.
ゲン耐食性樹脂材はフッ素樹脂材であることを特徴とす
る特許請求の範囲第１項記載のガスレーザ発振装置。(2) The gas laser oscillation device according to claim 1, wherein the gas laser medium contains halogen gas, and the halogen corrosion-resistant resin material is a fluororesin material.
あることを特徴とする特許請求の範囲第２項記載のガス
レーザ発振装置。(3) The gas laser oscillation device according to claim 2, wherein the fluororesin material has chemical fibers welded to its adhesive surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4027086A JPS62199079A (en) | 1986-02-27 | 1986-02-27 | Gas laser oscillator device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4027086A JPS62199079A (en) | 1986-02-27 | 1986-02-27 | Gas laser oscillator device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62199079A true JPS62199079A (en) | 1987-09-02 |
Family
ID=12575946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4027086A Pending JPS62199079A (en) | 1986-02-27 | 1986-02-27 | Gas laser oscillator device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62199079A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8234887B2 (en) | 2005-03-25 | 2012-08-07 | Lg Electronics Inc. | Washing machine having steam generator |
| US8522578B2 (en) | 2005-03-25 | 2013-09-03 | Lg Electronics Inc. | Steam generator , and laundry device and method thereof |
| US9982380B2 (en) | 2005-03-25 | 2018-05-29 | Lg Electronics Inc. | Laundry machine |
-
1986
- 1986-02-27 JP JP4027086A patent/JPS62199079A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8234887B2 (en) | 2005-03-25 | 2012-08-07 | Lg Electronics Inc. | Washing machine having steam generator |
| US8522578B2 (en) | 2005-03-25 | 2013-09-03 | Lg Electronics Inc. | Steam generator , and laundry device and method thereof |
| US9982380B2 (en) | 2005-03-25 | 2018-05-29 | Lg Electronics Inc. | Laundry machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62199079A (en) | Gas laser oscillator device | |
| JP4275853B2 (en) | Gas discharge tube | |
| JPS63232255A (en) | Plane-type fluorescent lamp | |
| JP2659730B2 (en) | Metal vapor laser device | |
| WO1999034406A1 (en) | Gas discharge tube | |
| JP2964212B2 (en) | Laser excitation lamp holder | |
| JP3377620B2 (en) | Method for manufacturing chamber frame of bipolar electrolyzer | |
| JP2800503B2 (en) | Diode-pumped solid-state laser | |
| JPS57141981A (en) | Sealed type carbon dioxide gas laser oscillator | |
| JPS6025913Y2 (en) | Laser excitation lamp | |
| JPH01194482A (en) | Gas laser oscillating apparatus | |
| JPS6312183A (en) | Retaining structure for fixing an optical material of laser | |
| JPH02246177A (en) | Discharge electrode of gas laser apparatus | |
| JPS6022620Y2 (en) | Seal structure of gas laser tube | |
| JP2786934B2 (en) | Metal vapor laser device | |
| JP2666149B2 (en) | Ultraviolet preionization electrode for discharge-excited gas laser device. | |
| JPH037967Y2 (en) | ||
| JPS61168975A (en) | Rare gas laser tube | |
| JPS6022621Y2 (en) | gas laser discharge tube | |
| JPH066524Y2 (en) | Gas laser equipment | |
| JPS6028282A (en) | Air-cooled ion laser tube | |
| JPS57169287A (en) | Gas laser oscillating tube device | |
| JPS5585087A (en) | He-ne gas laser tube | |
| JPS6261378A (en) | Gas laser tube | |
| JPS60189151A (en) | High pressure sodium lamp |