JPH02246177A - Discharge electrode of gas laser apparatus - Google Patents
Discharge electrode of gas laser apparatusInfo
- Publication number
- JPH02246177A JPH02246177A JP6585889A JP6585889A JPH02246177A JP H02246177 A JPH02246177 A JP H02246177A JP 6585889 A JP6585889 A JP 6585889A JP 6585889 A JP6585889 A JP 6585889A JP H02246177 A JPH02246177 A JP H02246177A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- base part
- metal
- discharge electrode
- thermal conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 11
- 239000007769 metal material Substances 0.000 claims abstract description 8
- 239000002253 acid Substances 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 21
- 239000010949 copper Substances 0.000 abstract description 12
- 229910052759 nickel Inorganic materials 0.000 abstract description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052782 aluminium Inorganic materials 0.000 abstract description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052802 copper Inorganic materials 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 5
- 238000005260 corrosion Methods 0.000 abstract description 4
- 230000007797 corrosion Effects 0.000 abstract description 4
- 238000005219 brazing Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 239000002344 surface layer Substances 0.000 description 16
- 239000007789 gas Substances 0.000 description 11
- 238000007747 plating Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0388—Compositions, materials or coatings
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
この発明はレーザ媒質ガスを放電エネルギで励起するた
めのガスレーザ装置の放ｆｅｉ電極に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a radiation emitting electrode of a gas laser device for exciting a laser medium gas with discharge energy.
（従来の技術）
一般に、ＴＥＡＣＯ２レーザやエキシマレーザなどのガ
スレーザ装置はレーザ媒質ガスが収容されたレーザ管内
に一対の放電電極として陰極と陽極とが離間対向して配
置され、これら放電電極間に主放電を発生させることに
よって上記レーザ媒質ガスを励起してレーザ光を放出さ
せるようになっている。(Prior Art) Generally, in a gas laser device such as a TEACO2 laser or an excimer laser, a cathode and an anode are arranged as a pair of discharge electrodes, spaced apart and facing each other, in a laser tube containing a laser medium gas. By generating a discharge, the laser medium gas is excited to emit laser light.
ところで、上記放電電極は、これら放電電極間に生じる
放電を均一にするため、表面を鏡面に仕上げ加工したり
、また放電の一部が偏ってアーク放電とならない形状に
形成することが重要である。By the way, in order to make the discharge generated between these discharge electrodes uniform, it is important to finish the surface of the discharge electrode to a mirror surface, or to form it in a shape that prevents a part of the discharge from becoming uneven and arc discharge. .
従来、上記放電電極は比較的加工性に優れるとともに、
熱伝導率の高い金属材料であるアルミニュウムＡ１や銅
Ｃｕなどで形成されていた。しかしながら、一対の放電
電極間にパルス放電を繰返して発生させると、アルミニ
ュウムＡ１や銅Ｃｕで作られた放電電極は耐酸性が高く
ないため、放電プラズマに接触する表面の部分が早期に
劣化し、均一なパルス放電を発生させることができなく
なるということが生じる。Conventionally, the above-mentioned discharge electrodes have relatively good workability, and
It was made of metal materials with high thermal conductivity, such as aluminum A1 and copper Cu. However, when a pulse discharge is repeatedly generated between a pair of discharge electrodes, the surface area that comes into contact with the discharge plasma deteriorates early because discharge electrodes made of aluminum A1 or copper Cu do not have high acid resistance. This results in the inability to generate a uniform pulse discharge.
そこで、上記放電電極を耐酸性に優れた金属材料である
ニッケル旧で形成することが行われている。しかしなが
ら、放電電極をニッケルＮ１で形成すると、耐酸性には
優れるものの、熱伝導率がよくないので、パルス放電を
繰返すと、熱的に不安定になる。しかも、ニッケルＮｉ
はアルミニュウムＡＩや銅Ｃｕに比べて機械加工性が悪
いから、加工に手間が掛かるということもある。Therefore, the discharge electrode is formed of nickel metal, which is a metal material with excellent acid resistance. However, when the discharge electrode is made of nickel N1, although it has excellent acid resistance, it has poor thermal conductivity, and therefore becomes thermally unstable when pulse discharge is repeated. Moreover, nickel Ni
Since it has poor machinability compared to aluminum AI and copper Cu, it may take more time to process.
このような両方の欠点を除去するために、アルミニュウ
ムＡＩや銅Ｃｕで形成した放電電極にニッケル旧をメツ
キすることが行われている。しかしながら、ニッケルＮ
１のメツキ層は薄くて弱いため、比較的早期に損傷して
しまうことが避けられなかった。In order to eliminate both of these drawbacks, a discharge electrode made of aluminum AI or copper Cu is plated with nickel. However, nickel N
Since the plating layer of No. 1 was thin and weak, it was inevitable that it would be damaged relatively early.
（発明が解決しようとする３題）
このように、従来の放電電極は耐蝕性と熱的安定性とを
兼ね備えていなかったので、レーザ光を安定した状態で
長期間にわたって出力させることができなかった。(Three problems to be solved by the invention) As described above, since conventional discharge electrodes did not have both corrosion resistance and thermal stability, they were unable to output laser light in a stable state for a long period of time. Ta.
この発明は上記事情にもとずきなされたもので、その目
的とすることろは、耐酸性と熱的安定性とを兼ね備えた
ガスレーザ装置の放電電極を提供することにある。The present invention was made based on the above circumstances, and its purpose is to provide a discharge electrode for a gas laser device that has both acid resistance and thermal stability.
【発明の構成］
（課題を解決するための手段及び作用）上記課題を解決
するためにこの発明は、熱伝導率の高い金属材料で形成
されたベース部と、耐酸性金属からなり上記ベース部に
固着されて放電プラズマに接する部分となる板状の表層
部とから放電電極を構成する。[Structure of the Invention] (Means and Effects for Solving the Problems) In order to solve the above problems, the present invention includes a base portion made of a metal material with high thermal conductivity, and a base portion made of an acid-resistant metal. A discharge electrode is constituted by a plate-shaped surface layer portion which is fixed to the surface layer and comes into contact with the discharge plasma.
このような構成とすることで、ベース部によって熱的安
定性を持たせ、表層部によって化学的安定性を長期間に
わたって維持できるようにした。With this configuration, the base portion provides thermal stability, and the surface layer maintains chemical stability over a long period of time.
（実施例） 以下、この発明の一実施例を図面を参照して説明する。(Example) An embodiment of the present invention will be described below with reference to the drawings.
第３図はＴ Ｅ Ａ ＣＯ２レーザやエキシマレーザな
どのガスレーザ装置を示し、このガスレーザ装置はＣＯ
２、Ｎ ２ 、Ｈｅなどのガスを混合したレーザ媒質ガ
スが収容されたレーザ管１を備えている。このレーザ管
１内には一対の放電電極２が離間対向して配置されてい
る。これらの放電電極２はパルス放電回路３を介して高
圧電源４に接続されている。上記パルス放電回路３は図
示しないコンデンサやスイッチ素子からなり、上記高圧
電源４からの高圧電圧を上記一対の放電電極２にパルス
状に印加する。それによって、一対の放電電極２間には
パルス放電が発生し、そのパルス放電によってレーザ媒
質ガスが励起されてレーザ光が放出されるようになって
いる。Figure 3 shows a gas laser device such as a TEA CO2 laser or an excimer laser.
The laser tube 1 is provided with a laser medium gas containing a mixture of gases such as 2, N 2 and He. Inside the laser tube 1, a pair of discharge electrodes 2 are arranged facing each other and separated from each other. These discharge electrodes 2 are connected to a high voltage power source 4 via a pulse discharge circuit 3. The pulse discharge circuit 3 includes a capacitor and a switch element (not shown), and applies a high voltage from the high voltage power supply 4 to the pair of discharge electrodes 2 in a pulsed manner. As a result, a pulse discharge is generated between the pair of discharge electrodes 2, and the pulse discharge excites the laser medium gas to emit laser light.
上記レーザ管１の一端面には共振器を構成する出力ミラ
ー５が設けられ、他端面には全反射ミラー６が設けられ
ている。そして、放電によって放出された光がミラー５
．６間を往復することにより増幅されて上記出力ミラー
５側から発振出力されるようになっている。An output mirror 5 constituting a resonator is provided on one end surface of the laser tube 1, and a total reflection mirror 6 is provided on the other end surface. Then, the light emitted by the discharge is transmitted to the mirror 5.
．． By reciprocating between 6 and 6, the signal is amplified and oscillated from the output mirror 5 side.
上記放電電極２は第１図と第２図に示すようにベース部
７と表層部８とから構成されている。上記ベース部７は
、熱、伝導率の高い金属材料である銅Ｃｕやアルミニュ
ウムＡ１によって断面略円弧状で、平面形状が細長い長
方形に形成されているとともに、円弧の頂部付近は平坦
面９に形成されている。The discharge electrode 2 is composed of a base portion 7 and a surface layer portion 8, as shown in FIGS. 1 and 2. The base portion 7 is made of copper Cu or aluminum A1, which are metal materials with high heat and conductivity, and has a substantially arc-shaped cross section and an elongated rectangular planar shape, and a flat surface 9 near the top of the arc. has been done.
この平坦面９には、ベース部７の円弧の一部をなす断面
形状である三日月状に形成された上記表層部８が、たと
えばロー付けなどの手段によって接合固定されている。The surface layer portion 8, which is formed in a crescent shape having a cross-sectional shape that is a part of the circular arc of the base portion 7, is bonded and fixed to the flat surface 9 by means such as brazing.
表層部８は耐蝕性に優れた（化学的に安定した）金属で
ある板状のニッケルＮ１が用いられ、その寸法は、厚さ
が１鰭程度であるとともに、幅は一対の放電電極２間で
生じる放電の幅寸法とほぼ同じ寸法に設定されている。The surface layer 8 is made of plate-shaped nickel N1, which is a metal with excellent corrosion resistance (chemically stable), and has a thickness of about one fin and a width between the pair of discharge electrodes 2. The width dimension is set to be approximately the same as the width dimension of the discharge that occurs.
それにより、放電で生じるプラズマは、放電電極２の表
層部８の部分にだけ接するようになっている。Thereby, the plasma generated by the discharge comes into contact only with the surface layer portion 8 of the discharge electrode 2.
なお、表層部８の各寸法は、放電電極２の形状や放電幅
などによって異なってくる。Note that each dimension of the surface layer portion 8 varies depending on the shape of the discharge electrode 2, the discharge width, and the like.
このような構成の放電電極２によれば、ベース部７を熱
伝導率の高い金属で作るようにしたため、パルス放電を
繰返して行なうような場合でも、上記ベース部７によつ
て放熱が効果的に行われ、熱的安定性が損われるような
ことがない。また、放電プラズマに接する表層部８は耐
蝕性に優れた金属で作られているから、放電プラズマ中
の化学的活性粒子によって化学変化を生じるようなこと
がない。しかも、上記表層部８はメツキに比べて十分に
厚い板状の部材が用いられているから、その表層部８が
早期に劣化するようなこともない。According to the discharge electrode 2 having such a configuration, since the base portion 7 is made of a metal with high thermal conductivity, even when pulse discharge is repeatedly performed, the base portion 7 can effectively dissipate heat. It is carried out at a high temperature without compromising thermal stability. Furthermore, since the surface layer 8 in contact with the discharge plasma is made of a metal with excellent corrosion resistance, chemical changes will not occur due to chemically active particles in the discharge plasma. Furthermore, since the surface layer 8 is made of a plate-like member that is sufficiently thicker than plating, the surface layer 8 will not deteriorate prematurely.
なお、この発明は上記一実施例に限定されず、たとえば
表層部はニッケルＮ１に代わり銀Ａｇを用いるようにし
てもよく、またベース部に表層部を固着したのち、これ
ら全体の表面をニッケル旧でメツキして化学的安定性の
向上を計るようにしてもよい。Note that the present invention is not limited to the above-mentioned embodiment; for example, silver Ag may be used instead of nickel N1 for the surface layer portion, or after the surface layer portion is fixed to the base portion, the entire surface thereof may be coated with nickel or nickel. It is also possible to improve chemical stability by plating with gold.
「発明の効果］
以上述べたようにこの発明は、放電電極を、熱伝導率の
高い金属材料からなるベース部に、耐酸性金属からなる
板状の表層部を固着して形成した。したがって、このよ
うな構成の放電電極によれば、熱的安定性と化学的安定
性とを兼ね伺えることができるとともに、表層部を板状
にしたことにより、メツキに比べて長寿命化を計ること
ができる。"Effects of the Invention" As described above, in the present invention, a discharge electrode is formed by fixing a plate-shaped surface layer made of an acid-resistant metal to a base made of a metal material with high thermal conductivity. A discharge electrode with such a configuration can achieve both thermal stability and chemical stability, and by making the surface layer into a plate shape, it can have a longer lifespan than a metal plate. can.
図面はこの発明の一実施例を示し、第１図は放電電極の
側面図、第２図は′！ｓ１図の■−■線に沿う拡大断面
図、第３図はガスレーザ装置の概略的構成図である。
２・・・放電電極、７・・・ベース部、８・・・表層部
。The drawings show an embodiment of the present invention, and FIG. 1 is a side view of a discharge electrode, and FIG. 2 is a side view of a discharge electrode. FIG. 3 is an enlarged sectional view taken along the line ■-■ in FIG. s1, and is a schematic configuration diagram of the gas laser device. 2... Discharge electrode, 7... Base part, 8... Surface layer part.
Claims (1)
酸性金属からなり上記ベース部に固着されて放電プラズ
マに接する部分となる板状の表層部とから構成されてい
ることを特徴とするガスレーザ装置の放電電極。It is characterized by being composed of a base part made of a metal material with high thermal conductivity, and a plate-shaped surface part made of an acid-resistant metal, which is fixed to the base part and comes into contact with the discharge plasma. Discharge electrode of gas laser equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6585889A JPH02246177A (en) | 1989-03-20 | 1989-03-20 | Discharge electrode of gas laser apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6585889A JPH02246177A (en) | 1989-03-20 | 1989-03-20 | Discharge electrode of gas laser apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02246177A true JPH02246177A (en) | 1990-10-01 |
Family
ID=13299131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6585889A Pending JPH02246177A (en) | 1989-03-20 | 1989-03-20 | Discharge electrode of gas laser apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02246177A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0529682A (en) * | 1991-07-22 | 1993-02-05 | Komatsu Ltd | Discharge electrode for excimer laser |
-
1989
- 1989-03-20 JP JP6585889A patent/JPH02246177A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0529682A (en) * | 1991-07-22 | 1993-02-05 | Komatsu Ltd | Discharge electrode for excimer laser |
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