JPS62198649U - - Google Patents
Info
- Publication number
- JPS62198649U JPS62198649U JP8676586U JP8676586U JPS62198649U JP S62198649 U JPS62198649 U JP S62198649U JP 8676586 U JP8676586 U JP 8676586U JP 8676586 U JP8676586 U JP 8676586U JP S62198649 U JPS62198649 U JP S62198649U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- source housing
- mounting structure
- positioning pin
- support leg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000013011 mating Effects 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8676586U JPS62198649U (xx) | 1986-06-07 | 1986-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8676586U JPS62198649U (xx) | 1986-06-07 | 1986-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62198649U true JPS62198649U (xx) | 1987-12-17 |
Family
ID=30943379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8676586U Pending JPS62198649U (xx) | 1986-06-07 | 1986-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62198649U (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160068637A (ko) * | 2014-12-05 | 2016-06-15 | 닛신 이온기기 가부시기가이샤 | 이온원, 지지대, 현수 기구, 이온원 반송 시스템 및 이온원 반송 방법 |
-
1986
- 1986-06-07 JP JP8676586U patent/JPS62198649U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160068637A (ko) * | 2014-12-05 | 2016-06-15 | 닛신 이온기기 가부시기가이샤 | 이온원, 지지대, 현수 기구, 이온원 반송 시스템 및 이온원 반송 방법 |
| JP2016110827A (ja) * | 2014-12-05 | 2016-06-20 | 日新イオン機器株式会社 | イオン源、支持台、吊下機構、イオン源搬送システム及びイオン源搬送方法 |