JPS62198649U - - Google Patents
Info
- Publication number
- JPS62198649U JPS62198649U JP8676586U JP8676586U JPS62198649U JP S62198649 U JPS62198649 U JP S62198649U JP 8676586 U JP8676586 U JP 8676586U JP 8676586 U JP8676586 U JP 8676586U JP S62198649 U JPS62198649 U JP S62198649U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- source housing
- mounting structure
- positioning pin
- support leg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000013011 mating Effects 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るイオン源
ハウジングの取付け構造を示す側面図である。第
２図は、第１図の矢印Ｐ方向に見た正面図である
。第３図は、従来のイオン源ハウジングの取付け
構造を示す側面図である。第４図は、第３図の矢
印Ｐ方向に見た正面図である。
２……イオン源、４……イオン源本体、６……
イオン源ハウジング、１０……相手側機器、１２
……取付ねじ、１８……位置決めピン、２０……
支持脚、２２……車輪、２４……移動ガイド、２
６……固定ガイド。
FIG. 1 is a side view showing a mounting structure of an ion source housing according to an embodiment of the invention. FIG. 2 is a front view seen in the direction of arrow P in FIG. 1. FIG. 3 is a side view showing a conventional ion source housing mounting structure. 4 is a front view seen in the direction of arrow P in FIG. 3. FIG. 2...Ion source, 4...Ion source body, 6...
Ion source housing, 10...Mate equipment, 12
...Mounting screw, 18...Positioning pin, 20...
Support leg, 22...Wheel, 24...Movement guide, 2
6...Fixed guide.
Claims (1)
着脱可能に取り付けるものにおいて、イオン源ハ
ウジングの位置決めを行う位置決めピンと、イオ
ン源ハウジングを支持する車輪付の支持脚と、イ
オン源ハウジングの移動を案内する案内手段とを
備えることを特徴とするイオン源ハウジングの取
付け構造。 In a device that removably attaches the ion source housing to a mating device using a mounting screw, a positioning pin that positions the ion source housing, a support leg with wheels that supports the ion source housing, and a guide that guides the movement of the ion source housing. An ion source housing mounting structure comprising means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8676586U JPS62198649U (en) | 1986-06-07 | 1986-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8676586U JPS62198649U (en) | 1986-06-07 | 1986-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62198649U true JPS62198649U (en) | 1987-12-17 |
Family
ID=30943379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8676586U Pending JPS62198649U (en) | 1986-06-07 | 1986-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62198649U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160068637A (en) * | 2014-12-05 | 2016-06-15 | 닛신 이온기기 가부시기가이샤 | Ion source, support member, suspension mechanism, ion source transfer system and ion source transfer method |
-
1986
- 1986-06-07 JP JP8676586U patent/JPS62198649U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160068637A (en) * | 2014-12-05 | 2016-06-15 | 닛신 이온기기 가부시기가이샤 | Ion source, support member, suspension mechanism, ion source transfer system and ion source transfer method |
| JP2016110827A (en) * | 2014-12-05 | 2016-06-20 | 日新イオン機器株式会社 | Ion source, susceptor, suspension mechanism, ion source conveyance system and ion source conveyance method |