JPS62198277U - - Google Patents

Info

Publication number
JPS62198277U
JPS62198277U JP8734886U JP8734886U JPS62198277U JP S62198277 U JPS62198277 U JP S62198277U JP 8734886 U JP8734886 U JP 8734886U JP 8734886 U JP8734886 U JP 8734886U JP S62198277 U JPS62198277 U JP S62198277U
Authority
JP
Japan
Prior art keywords
reaction tube
activating
microwave
microwave plasma
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8734886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH043007Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986087348U priority Critical patent/JPH043007Y2/ja
Publication of JPS62198277U publication Critical patent/JPS62198277U/ja
Application granted granted Critical
Publication of JPH043007Y2 publication Critical patent/JPH043007Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1986087348U 1986-06-09 1986-06-09 Expired JPH043007Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986087348U JPH043007Y2 (enrdf_load_stackoverflow) 1986-06-09 1986-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986087348U JPH043007Y2 (enrdf_load_stackoverflow) 1986-06-09 1986-06-09

Publications (2)

Publication Number Publication Date
JPS62198277U true JPS62198277U (enrdf_load_stackoverflow) 1987-12-17
JPH043007Y2 JPH043007Y2 (enrdf_load_stackoverflow) 1992-01-31

Family

ID=30944471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986087348U Expired JPH043007Y2 (enrdf_load_stackoverflow) 1986-06-09 1986-06-09

Country Status (1)

Country Link
JP (1) JPH043007Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054995A (ja) * 1983-09-07 1985-03-29 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法
JPS6054996A (ja) * 1983-09-07 1985-03-29 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054995A (ja) * 1983-09-07 1985-03-29 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法
JPS6054996A (ja) * 1983-09-07 1985-03-29 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法

Also Published As

Publication number Publication date
JPH043007Y2 (enrdf_load_stackoverflow) 1992-01-31

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