JPS62198268U - - Google Patents
Info
- Publication number
- JPS62198268U JPS62198268U JP8682286U JP8682286U JPS62198268U JP S62198268 U JPS62198268 U JP S62198268U JP 8682286 U JP8682286 U JP 8682286U JP 8682286 U JP8682286 U JP 8682286U JP S62198268 U JPS62198268 U JP S62198268U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- deposited
- evaporated
- evaporation
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000010891 electric arc Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986086822U JPH0519328Y2 (https=) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986086822U JPH0519328Y2 (https=) | 1986-06-06 | 1986-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62198268U true JPS62198268U (https=) | 1987-12-17 |
| JPH0519328Y2 JPH0519328Y2 (https=) | 1993-05-21 |
Family
ID=30943480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986086822U Expired - Lifetime JPH0519328Y2 (https=) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519328Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58100675A (ja) * | 1981-12-11 | 1983-06-15 | Mitsubishi Heavy Ind Ltd | 連続蒸着方法及びその装置 |
| JPS6134173A (ja) * | 1984-07-24 | 1986-02-18 | Agency Of Ind Science & Technol | 高硬度窒化ホウ素膜の製造方法 |
-
1986
- 1986-06-06 JP JP1986086822U patent/JPH0519328Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58100675A (ja) * | 1981-12-11 | 1983-06-15 | Mitsubishi Heavy Ind Ltd | 連続蒸着方法及びその装置 |
| JPS6134173A (ja) * | 1984-07-24 | 1986-02-18 | Agency Of Ind Science & Technol | 高硬度窒化ホウ素膜の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519328Y2 (https=) | 1993-05-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO1992003841A3 (de) | Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren | |
| JPS62198268U (https=) | ||
| JPS62287068A (ja) | イオンビ−ム蒸着装置 | |
| JPH0322063U (https=) | ||
| JPS62157968U (https=) | ||
| JPH0444359U (https=) | ||
| JPH0214357U (https=) | ||
| JPS61187373U (https=) | ||
| JPH0363569U (https=) | ||
| JPS62136564U (https=) | ||
| JPS6373357U (https=) | ||
| JPH0174261U (https=) | ||
| JPH02106457U (https=) | ||
| JPH0314146U (https=) | ||
| JPH0238463U (https=) | ||
| JPS6414159U (https=) | ||
| JPS62114057U (https=) | ||
| SU907085A1 (ru) | Устройство дл нанесени покрытий в вакууме | |
| JPS63109321U (https=) | ||
| JPH01147253U (https=) | ||
| JPS63114020U (https=) | ||
| JPS6329928U (https=) | ||
| JPS6394957U (https=) | ||
| JPH01147273U (https=) | ||
| JPS6251735U (https=) |