JPS62197850U - - Google Patents

Info

Publication number
JPS62197850U
JPS62197850U JP8654686U JP8654686U JPS62197850U JP S62197850 U JPS62197850 U JP S62197850U JP 8654686 U JP8654686 U JP 8654686U JP 8654686 U JP8654686 U JP 8654686U JP S62197850 U JPS62197850 U JP S62197850U
Authority
JP
Japan
Prior art keywords
reaction gas
electrodes
pair
reservoirs
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8654686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8654686U priority Critical patent/JPS62197850U/ja
Publication of JPS62197850U publication Critical patent/JPS62197850U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP8654686U 1986-06-09 1986-06-09 Pending JPS62197850U (US07847105-20101207-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8654686U JPS62197850U (US07847105-20101207-C00016.png) 1986-06-09 1986-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8654686U JPS62197850U (US07847105-20101207-C00016.png) 1986-06-09 1986-06-09

Publications (1)

Publication Number Publication Date
JPS62197850U true JPS62197850U (US07847105-20101207-C00016.png) 1987-12-16

Family

ID=30942946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8654686U Pending JPS62197850U (US07847105-20101207-C00016.png) 1986-06-09 1986-06-09

Country Status (1)

Country Link
JP (1) JPS62197850U (US07847105-20101207-C00016.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02111887A (ja) * 1988-10-19 1990-04-24 Ulvac Corp 真空処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02111887A (ja) * 1988-10-19 1990-04-24 Ulvac Corp 真空処理装置

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