JPS62197639U - - Google Patents
Info
- Publication number
- JPS62197639U JPS62197639U JP8553886U JP8553886U JPS62197639U JP S62197639 U JPS62197639 U JP S62197639U JP 8553886 U JP8553886 U JP 8553886U JP 8553886 U JP8553886 U JP 8553886U JP S62197639 U JPS62197639 U JP S62197639U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer holder
- semiconductor wafer
- storage recess
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 210000000078 claw Anatomy 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Special Conveying (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8553886U JPH0530023Y2 (https=) | 1986-06-05 | 1986-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8553886U JPH0530023Y2 (https=) | 1986-06-05 | 1986-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62197639U true JPS62197639U (https=) | 1987-12-16 |
| JPH0530023Y2 JPH0530023Y2 (https=) | 1993-07-30 |
Family
ID=30941035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8553886U Expired - Lifetime JPH0530023Y2 (https=) | 1986-06-05 | 1986-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530023Y2 (https=) |
-
1986
- 1986-06-05 JP JP8553886U patent/JPH0530023Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530023Y2 (https=) | 1993-07-30 |