JPS6219760U - - Google Patents
Info
- Publication number
- JPS6219760U JPS6219760U JP11116785U JP11116785U JPS6219760U JP S6219760 U JPS6219760 U JP S6219760U JP 11116785 U JP11116785 U JP 11116785U JP 11116785 U JP11116785 U JP 11116785U JP S6219760 U JPS6219760 U JP S6219760U
- Authority
- JP
- Japan
- Prior art keywords
- resistor section
- diaphragm portion
- substrate
- pressure sensor
- microelectrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116785U JPS6219760U (US20110009641A1-20110113-C00185.png) | 1985-07-20 | 1985-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116785U JPS6219760U (US20110009641A1-20110113-C00185.png) | 1985-07-20 | 1985-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6219760U true JPS6219760U (US20110009641A1-20110113-C00185.png) | 1987-02-05 |
Family
ID=30990837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11116785U Pending JPS6219760U (US20110009641A1-20110113-C00185.png) | 1985-07-20 | 1985-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6219760U (US20110009641A1-20110113-C00185.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01244325A (ja) * | 1988-03-26 | 1989-09-28 | Citizen Watch Co Ltd | 圧力センサユニット |
| WO2017077954A1 (ja) * | 2015-11-04 | 2017-05-11 | 株式会社フジクラ | 差圧検出素子 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5399785A (en) * | 1977-02-11 | 1978-08-31 | Nippon Denso Co Ltd | Multi-contact resistor |
| JPS5624164B2 (US20110009641A1-20110113-C00185.png) * | 1973-04-25 | 1981-06-04 |
-
1985
- 1985-07-20 JP JP11116785U patent/JPS6219760U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5624164B2 (US20110009641A1-20110113-C00185.png) * | 1973-04-25 | 1981-06-04 | ||
| JPS5399785A (en) * | 1977-02-11 | 1978-08-31 | Nippon Denso Co Ltd | Multi-contact resistor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01244325A (ja) * | 1988-03-26 | 1989-09-28 | Citizen Watch Co Ltd | 圧力センサユニット |
| WO2017077954A1 (ja) * | 2015-11-04 | 2017-05-11 | 株式会社フジクラ | 差圧検出素子 |
| JP2017090096A (ja) * | 2015-11-04 | 2017-05-25 | 株式会社フジクラ | 差圧検出素子 |
