JPS62196335U - - Google Patents
Info
- Publication number
- JPS62196335U JPS62196335U JP8245786U JP8245786U JPS62196335U JP S62196335 U JPS62196335 U JP S62196335U JP 8245786 U JP8245786 U JP 8245786U JP 8245786 U JP8245786 U JP 8245786U JP S62196335 U JPS62196335 U JP S62196335U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- heat treatment
- core tube
- treatment apparatus
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8245786U JPS62196335U (enExample) | 1986-06-02 | 1986-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8245786U JPS62196335U (enExample) | 1986-06-02 | 1986-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62196335U true JPS62196335U (enExample) | 1987-12-14 |
Family
ID=30935133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8245786U Pending JPS62196335U (enExample) | 1986-06-02 | 1986-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62196335U (enExample) |
-
1986
- 1986-06-02 JP JP8245786U patent/JPS62196335U/ja active Pending