JPS62195623A - Sticking method for spacer material - Google Patents

Sticking method for spacer material

Info

Publication number
JPS62195623A
JPS62195623A JP3695186A JP3695186A JPS62195623A JP S62195623 A JPS62195623 A JP S62195623A JP 3695186 A JP3695186 A JP 3695186A JP 3695186 A JP3695186 A JP 3695186A JP S62195623 A JPS62195623 A JP S62195623A
Authority
JP
Japan
Prior art keywords
spacer material
mixed solution
board
substrate
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3695186A
Other languages
Japanese (ja)
Inventor
Tamahiko Nishiki
玲彦 西木
Susumu Shibata
進 柴田
Masao Ikehata
池端 昌夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP3695186A priority Critical patent/JPS62195623A/en
Publication of JPS62195623A publication Critical patent/JPS62195623A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To manage the sticking of a spacer material with uniform spraying density without leaving dirt on a board by irradiating ultrasonic waves to the mixed solution of the spacer material, boiling the mixed solution and dipping the board into the mixed solution. CONSTITUTION:An electrode is formed on the board 15 and an orientation film is formed on the electrode to obtain a dispersion tank 11 for forming a liquid crystal cell. Then, the spacer material is mixed to obtain the mixed solution 13 and the solution 13 is agitated and irradiated by ultrasonic waves so that the spacer material is uniformly dispersed in the mixed solution 13. Subsequently, the mixed solution 13 stored in the dispersion tank 11 is boiled by a heater 21 to maintain the uniform dispersion status of the spacer material. Then, the board 15 is dipped into the boiled mixed solution 13 by a lift 19 through a suspending means 17 so that the spacer material spraying surface is vertical to the liquid surface of the mixed solution 13. After the temperature of the board 11 has reached the boiling temperature of the mixed solution 13, the board 15 is lifted up from the mixed solution by the lift 19. At that time, only the spacer material is left on the surface of the board 11 and uniformly dispersed and stuck to the surface of the board 11 and isopropyl alcohol prevents the board 11 being dirtied.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は1機能素子特に液晶セルの基板間隔を一定に
保つために用いるスペーサ材を基板に被着する方法に関
する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of attaching a spacer material to a substrate, which is used to maintain a constant distance between the substrates of a single-function device, particularly a liquid crystal cell.

(従来の技術) 一定のI’l+隔で二枚の基板を対向配置して構成する
種々の機能素子がある。−・例として対向配置した二枚
の基板間に液晶を対人することによって構成された液晶
セルがある。この液晶セルの基板間隔は、その表示特性
にvE接に関与しており、基板間隔の不均一は、液晶セ
ルの画素間において応答速度や、コントラストその他の
特性がばらつく原因となったり、光の干渉稿が発生する
原因となったりする。従って、良好な表示特性を得るた
めには、液晶セルの基板間隔を精度良く、しかも均一に
保つ必要があった。
(Prior Art) There are various functional elements that are constructed by arranging two substrates facing each other with a constant distance of I'l+. - For example, there is a liquid crystal cell constructed by placing a liquid crystal between two substrates placed opposite each other. The spacing between the substrates of this liquid crystal cell is closely related to vE in its display characteristics, and uneven substrate spacing can cause variations in response speed, contrast, and other characteristics between pixels of the liquid crystal cell, and may cause variations in light This may cause interference drafts to occur. Therefore, in order to obtain good display characteristics, it is necessary to keep the spacing between the substrates of the liquid crystal cell accurate and uniform.

このような理由から、′a機材料或は有機材料から成る
球状粒子1円筒形状を有するガラスファイバ等の−・定
寸法のスペーサ材を基板間に散在させて基板間隔を一定
に保った構造の液晶セルが提案されている。
For this reason, we have developed a structure in which spacer materials of fixed dimensions, such as spherical particles made of mechanical or organic materials and glass fibers having a cylindrical shape, are scattered between the substrates to maintain a constant substrate spacing. Liquid crystal cells have been proposed.

従来より、この種の液晶セルの製造に関してスペーサ材
を万遍なく均一に散布して被着するために種々の方法が
提案されている。その第一の方法としてスペーサを分散
した液体の噴霧液を基板を方からスプレーによってふり
まいてスペーサ材を散布し、被着する方法(例えば特開
昭58−194015号)がある、又、第二の方法とし
てスペーサ混入の分散液を気化させた雰囲気中或はスペ
ーサを一様に分散させた気体中に、基板を配置し第一の
方法とは異なってスペーサ材のみを基板上へ散布して被
着する方法(例えば特開昭54−85580号、特開昭
58−156920号)、或は第三の方法として電気的
に同一極性のスペーサ材を、帯電した基板に電気的に吸
着させスペーサ材同志の電気的反発力によって分散を図
り被着する方法(例えば特開昭59−172628号)
がある。
Conventionally, various methods have been proposed for manufacturing this type of liquid crystal cell in order to evenly spread and adhere the spacer material. The first method is to spray a liquid in which spacers are dispersed onto the substrate, thereby dispersing and adhering the spacer material (for example, JP-A-58-194015). As a method, the substrate is placed in an atmosphere in which a dispersion liquid containing spacers is vaporized or in a gas in which spacers are uniformly dispersed, and unlike the first method, only the spacer material is sprinkled onto the substrate. (e.g., JP-A-54-85580, JP-A-58-156,920), or as a third method, spacer materials with the same electrical polarity are electrically attracted to a charged substrate. A method of dispersion and adhesion using electrical repulsion between materials (for example, JP-A-59-172628)
There is.

(発明が解決しようとする問題点) しかしながら、一般にスペーサ材は表面エネルギーの影
響によって凝集し易く特に有機材料から成るミクロバー
ル(商品名)のようなスペーサ材では凝集性が非常に高
く、このためスペーサ材をIM集させずに均一な散布密
度を得ることが難しかった。
(Problem to be solved by the invention) However, in general, spacer materials tend to aggregate due to the influence of surface energy, and especially spacer materials such as Microvar (trade name) made of organic materials have extremely high cohesiveness. It was difficult to obtain a uniform distribution density without IM gathering the spacer material.

第一の方法では、有機溶剤にスペーサを分散させた液体
を用いると有機溶剤が基板表面から揮発する際にスペー
サ材が凝集して均一な散布が得られす、さらに基板表面
にじみのような汚れを残しこれが原因と思われる配向不
良を発生していた。
In the first method, by using a liquid in which spacers are dispersed in an organic solvent, the spacer material aggregates when the organic solvent evaporates from the substrate surface, resulting in uniform dispersion. This is thought to be the cause of poor orientation.

また、有機溶剤に代えてフレオンを用いればこのような
欠点はなくなるがフレオンは高価であり、さらにフレオ
ンの作業環境、人体に亭える影響も黒視し得なかった。
Further, if Freon is used instead of the organic solvent, these drawbacks can be eliminated, but Freon is expensive, and furthermore, the effects of Freon on the working environment and the human body cannot be overlooked.

また、第−及び第二の方法では、温度及び湿度の′!#
響を受けて分散茂原の管理が困難であった。
In addition, in the first and second methods, temperature and humidity '! #
Due to the impact, it was difficult to manage the dispersed mobara.

第三の方法では、帯電電極を基板に接触させてスペーサ
材の吸着を行う際に帯電電極に高電圧を印力口するため
、スペーサ材のみならず塵埃をも吸着しやすく、また湿
度等の環境条件の影響によって散布密度が不均一になり
やすい。
In the third method, a high voltage is applied to the charged electrode when the charged electrode is brought into contact with the substrate to adsorb the spacer material, which makes it easy to attract not only the spacer material but also dust. The distribution density tends to be uneven due to the influence of environmental conditions.

ざらに、第一、第二及び第三の方法では、いずれも装ご
が大損りとなり設備費がかかるという問題点があった。
Generally speaking, the first, second and third methods all had the problem of large losses in packaging and increased equipment costs.

この発明の目的は、上述した従来方法の問題点に鑑み、
基板に汚れを残さずにかつ均一な散布密度の管理が容易
に行え、しかも、従来のように大損りな装置を必要とせ
ずに、簡易な方法でスペーサ材の被着を行うことができ
るスペーサ材の被着方法を提供することにある。
In view of the problems of the conventional method mentioned above, the purpose of this invention is to
A spacer material that does not leave any dirt on the substrate, allows for easy control of uniform distribution density, and allows for the deposition of spacer materials using a simple method without the need for costly equipment as in the past. The object of the present invention is to provide a method for applying the same.

(問題点を解決するための手段) この目的の達成を図るため、この発明のスペーサ材の被
着方法によれば、スペーサ材の混入液に超音波照射する
工程と、この混入液を沸膿させる工程と、この佛腸した
混入液中にIa、能素子例えば液晶セル形成用の基板を
浸漬させる工程と、この基板温度が混入液温度に達した
後基板を混入液から引き上げる工程とを含むことを特徴
とする。
(Means for Solving the Problems) In order to achieve this object, the method for adhering a spacer material of the present invention includes a step of irradiating ultrasonic waves to a liquid mixed with a spacer material, and a step of irradiating this mixed liquid with boiling water. a step of immersing a substrate for forming an Ia, an active element, such as a liquid crystal cell, into the mixed liquid, and a step of lifting the substrate from the mixed liquid after the temperature of the substrate reaches the temperature of the mixed liquid. It is characterized by

スペーサ材を混入する液体の選択に当っては、スペーサ
材を分散しやすい性質を有すること、液晶セルの場合に
は沸点(或は揮発温度)が基板に設けられた配向膜の液
晶配向性(液晶分子を配向制御する性質〕を損なわない
温度であること、比重がスペーサ材と同等かもしくは同
等よりわずかに小さいこと、配向膜とのぬれ性が艮く配
向膜にはじかれないこと、基板面上に付着する水分とと
:!!換わる置換効果を有すること等を考慮して決定す
るのが良い。
When selecting a liquid to mix the spacer material, it is important that the liquid has the property of easily dispersing the spacer material, and in the case of a liquid crystal cell, the boiling point (or volatilization temperature) of the liquid crystal orientation of the alignment film provided on the substrate ( The temperature should not impair the property of controlling the alignment of liquid crystal molecules; the specific gravity should be equal to or slightly lower than that of the spacer material; the wettability with the alignment film should be high and the material should not be repelled by the alignment film; and the substrate surface. It is best to determine this by taking into account that it has a substitution effect that replaces the moisture that adheres to the top.

これらの聞点を考慮すると、アルコール系の液体がスペ
ーサ材の混入液として好ましい。
Considering these points, alcohol-based liquid is preferable as the liquid to be mixed with the spacer material.

(作用) このような構成によれば、スペーサ材の混入液に超音波
照射するので混入液が撹拌されスペーサ材が混入液中に
一様に分散する。この混入液を梯騰させることによって
スペーサの一様な分散状態を維持する。次いで混入液中
に基板を浸漬させ、この基板温度が混入液の沸点まで達
した後基板を引5上げるので、スペーサ材が一様に分散
している状態にある混入液でぬれた基板面とにはスペー
サ材が一様に分散して付着する。これと共に、スペーサ
材を混入した液体及び基板の温度はそれぞれ混入液の沸
点まで達しているので、例えば配向不良の原因となるし
み状の汚れを配向膜に残すことなく基板より揮発する。
(Function) According to such a configuration, since the liquid mixed with the spacer material is irradiated with ultrasonic waves, the liquid mixed with the spacer material is agitated and the spacer material is uniformly dispersed in the liquid mixed with the spacer material. By elevating this mixed liquid, a uniformly dispersed state of the spacers is maintained. Next, the substrate is immersed in the mixed liquid, and after the substrate temperature reaches the boiling point of the mixed liquid, the substrate is pulled up, so that the substrate surface wet with the mixed liquid and the spacer material is evenly dispersed. The spacer material is uniformly distributed and adhered to. At the same time, since the temperature of the liquid mixed with the spacer material and the substrate have reached the boiling point of the mixed liquid, the liquid evaporates from the substrate without leaving, for example, stain-like dirt on the alignment film, which may cause poor alignment.

この結果、温度、湿度の影響を受けることなくスペーサ
材が基板面とに、一様に分散して均一に散布され(均一
な1攻布彬度が得られ)かつ配向膜に汚れを残すことな
く散布され被着する。
As a result, the spacer material is uniformly dispersed and sprayed on the substrate surface without being affected by temperature or humidity (uniform 1-patterning density is obtained), and no stains are left on the alignment film. It spreads and adheres without any problem.

−万、スペーサの散布密度は、スペーサと液体との混合
比と基板の引き上げ速度とによって決定する。基板の引
きEげ速度は、通いほどスペーサの散布密度が高くなり
、遅いほど散布密度が低くなる。
- The density of spacer dispersion is determined by the mixing ratio of spacers and liquid and the pulling speed of the substrate. Regarding the pulling speed of the substrate, the higher the pulling speed of the substrate, the higher the density of spacer scattering becomes, and the slower the pulling speed of the substrate, the lower the spreading density of spacers becomes.

(実施例) 以下、この発明を液晶セルに適用した場合の実施例につ
き図面を参照して説明する。尚1図はこの発明が理解用
Xる程度に各構成成分を概略的に示しであるにすぎず、
各構成成分の寸法、形状及び配器関係は図示例に限定さ
れるものではない。
(Example) Hereinafter, an example in which the present invention is applied to a liquid crystal cell will be described with reference to the drawings. It should be noted that Figure 1 only schematically shows each component to the extent that this invention can be understood.
The dimensions, shapes, and arrangement relationships of each component are not limited to the illustrated example.

第1図は、この実施例によるスペーサ材の被1方法の説
明図である。
FIG. 1 is an explanatory diagram of a method for applying a spacer material according to this embodiment.

第1図において、11はスペーサ材の混入液13が貯え
られた分散槽(例えばガラスビーカー)を示し、混入液
13はスペーサ材を所定の混合比で混入した有a#媒例
えばイソプロピルアルコールから成る。
In FIG. 1, reference numeral 11 indicates a dispersion tank (for example, a glass beaker) in which a liquid 13 containing a spacer material is stored, and the liquid 13 is made of an aqueous medium such as isopropyl alcohol mixed with a spacer material at a predetermined mixing ratio. .

15は、イソプロピルアルコール中に浸漬される液晶セ
ル形成用の基板を示し、この基板11には透IjlJt
極丑に配向処理が施されている。
15 indicates a substrate for forming a liquid crystal cell which is immersed in isopropyl alcohol, and this substrate 11 has transparent IjlJt.
Orientation treatment has been applied to the polar ox.

!7は、基板11の吊下げ手段を示し、基板11は吊下
げ手段17の端部において係止されている。
! Reference numeral 7 indicates a means for hanging the substrate 11, and the substrate 11 is locked at an end of the hanging means 17.

19は基板昇降機を示し、基板11は吊下げ手段17を
介し昇降機19によって混入液13中に浸漬され、また
混入液13より引き上げられる。
Reference numeral 19 denotes a substrate elevator, and the substrate 11 is immersed in the mixed liquid 13 by the elevator 19 via the hanging means 17, and is lifted out of the mixed liquid 13.

また21は、混入液を加熱して沸騰させるための加8f
一段例えばヒータを示している。
In addition, 21 is a heating 8f for heating and boiling the mixed liquid.
One stage shows, for example, a heater.

まず、ガラス基板とにITO電極を設け、この電極上に
配向膜(日立化製HL −1100)を形成しラビング
を行って液晶セル形成用の基板11を得る。
First, an ITO electrode is provided on a glass substrate, and an alignment film (HL-1100 manufactured by Hitachi Chemical) is formed on this electrode and rubbed to obtain a substrate 11 for forming a liquid crystal cell.

次に、イソプロピルアルコール1fLにつきスペーサ材
(三井東圧製 商品名ミクロバール)を20m lを混
入して混入液13を得る。
Next, 20 ml of a spacer material (product name: Microbar, manufactured by Mitsui Toatsu) is mixed into 1 fL of isopropyl alcohol to obtain mixed liquid 13.

次に、混入液13を撹拌かつ超音波照射し、スペーサ材
を混入液13中で一様に分散させる。この超音波照射は
凝集性の高いスペーサを効果的に一様に分散させるため
に必要である。
Next, the mixed liquid 13 is stirred and irradiated with ultrasonic waves to uniformly disperse the spacer material in the mixed liquid 13. This ultrasonic irradiation is necessary to effectively and uniformly disperse highly cohesive spacers.

次いで、分散槽11に貯えられている混入液13をヒー
タ21にて沸騰させる。この沸騰によってスペーサ材の
一様な分散状悪を維持することができる。
Next, the mixed liquid 13 stored in the dispersion tank 11 is boiled by the heater 21. This boiling makes it possible to maintain uniform dispersion of the spacer material.

次に、吊下げ手段17を介して昇降機19で沸騰した混
入液13中に基板を、混入液13の液面に対してスペー
サ材散布面が垂直となるような状態で、浸漬する。基板
11の温度が混入液13の沸aim度まで達した後、昇
降機18で基板を、混入液13から一定の速度2Cm/
Secで引き上げる。この時、イソプロピルアルコール
とスペーサ材が基板11の表面に付着するが、イソプロ
ピルアルコールは即座に蒸発し、基板11の表面にはス
ペーサ材のみが歿される。スペーサ材は基板・11面上
に一様に分散して付着し、またイソプロピルアルコール
は基板11の配向膜にしみ状の汚れを残すことがない。
Next, the substrate is immersed in the mixed liquid 13 boiled by the elevator 19 via the hanging means 17 in such a manner that the surface on which the spacer material is spread is perpendicular to the liquid level of the mixed liquid 13. After the temperature of the substrate 11 reaches the boiling point of the mixed liquid 13, the substrate is lifted from the mixed liquid 13 by an elevator 18 at a constant speed of 2 cm/cm.
Raise it in Sec. At this time, the isopropyl alcohol and the spacer material adhere to the surface of the substrate 11, but the isopropyl alcohol immediately evaporates, leaving only the spacer material on the surface of the substrate 11. The spacer material is uniformly dispersed and adhered to the surface of the substrate 11, and the isopropyl alcohol does not leave stains in the form of stains on the alignment film of the substrate 11.

この後、通常の如く液晶セルの製造を行うが、基板11
の表面全面に被着したスペーサ材は、後工程の支障とな
るものではなく、液晶セルの完成の後水洗いして被着し
ているスペーサ材を容易に除去出来る。
After this, the liquid crystal cell is manufactured as usual, but the substrate 11
The spacer material adhered to the entire surface of the liquid crystal cell does not interfere with subsequent processes, and the adhered spacer material can be easily removed by washing with water after the liquid crystal cell is completed.

この実施例では、目視可能なスペーサ材の凝集を発生す
ることなく、散布密度約30個/ m m l で一様
に分散したスペーサ材の散布が行え、かつ配向不良の原
因と考えられるしみ状の汚れを基板11とに残すことが
なかった。
In this example, the spacer material could be uniformly dispersed at a scattering density of approximately 30 particles/ml without causing any visible agglomeration of the spacer material, and the appearance of stains, which may be the cause of poor orientation, was achieved. No dirt was left on the substrate 11.

し述した実施例では特定の数値的条件、材料を用いて説
明を行ったが、この発明はこれに限定されるものではな
く、数値的条件は所望の散布密度に応じて任意に設定で
き、またスペーサ材の混入液もインプロピルアルコール
のみならずアルコール系の液体その他の液体を用いて艮
く、またスペーサ材もミクロバール(W1品名)に限定
されず、ガラスファイバ、無機材料或は有機材料から成
る粒子その他の好適材料から成るスペーサ材を用いて良
い。
Although the embodiments described above are explained using specific numerical conditions and materials, the present invention is not limited thereto, and the numerical conditions can be arbitrarily set according to the desired dispersion density. In addition, the mixed liquid for the spacer material is not limited to inpropyl alcohol, but also alcohol-based liquids and other liquids.The spacer material is not limited to Microvar (product name W1), but may also be glass fiber, inorganic materials, or organic materials. A spacer material comprising particles of or other suitable material may be used.

(発明の効果) J:述した説明から明らかなように、この発明のスペー
サ材の8着方法によれば、基板面Eに汚れを残すことな
く、スペーサ材の散布が行え例えば液晶セルの場合の配
向不良を招くことがない。
(Effects of the Invention) J: As is clear from the above explanation, according to the method of applying spacer material of the present invention, the spacer material can be spread without leaving any dirt on the substrate surface E, for example, in the case of a liquid crystal cell. This does not result in poor orientation.

これと共に、温度、湿度の影響を受けることな〈従来よ
りも容易にスペーサ材の散布密度の管理が行えかつ従来
よりも均一なスペーサ材の散布密度を得ることが出来る
In addition, the spacer material distribution density can be controlled more easily than before without being affected by temperature and humidity, and the spacer material distribution density can be more uniform than before.

この結果、従来のように大損りな装置を必要としなくな
り、従来より設4IR費を削減できる。
As a result, there is no longer a need for expensive equipment as in the past, and the installation cost can be reduced compared to the past.

また、この発明の方法は混入液に浸漬した基板を引きt
げることによって行う非常に簡便な方法であり、基板を
吊下げるためのカートリッジ等の治具を用いて、多数の
基板へのスペーサ材散布が一括処理で容易に行える。
In addition, the method of this invention pulls the substrate immersed in the mixed liquid.
This is a very simple method that is carried out by hanging the substrates, and by using a jig such as a cartridge for suspending the substrates, the spacer material can be easily distributed to a large number of substrates in a batch process.

また、この発明は、ミクロバール(商品名)のように凝
集性の高いスペーサ材に適用して特に効果的である。
Furthermore, the present invention is particularly effective when applied to spacer materials with high cohesiveness, such as Microvar (trade name).

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この発明の詳細な説明図である。 11・・・分散槽、     13・・・スペーサ材の
混入液15・・・基板、      17・・・吊下げ
手段19・・・基板昇降装置、  21・・・加熱手段
。 /f’亦」枚重 13: 又ハξ−゛す′オオgP>  5昆、λ婢L1
5:基琢 17:吊千1丁゛乎tχ tq’yl−氷X纜装置 2f:加@、斗校 1−14かI Rt null a 第1図 手続補正書 昭和62年1月20日
FIG. 1 is a detailed explanatory diagram of the present invention. DESCRIPTION OF SYMBOLS 11... Dispersion tank, 13... Spacer material mixed liquid 15... Substrate, 17... Hanging means 19... Substrate lifting device, 21... Heating means. /f'亦'' sheet weight 13: Mataha ξ-゛su'oogP> 5kon, λ婢L1
5: Base 17: Suspension 1,100゛乎tχ tq'yl - ice

Claims (1)

【特許請求の範囲】[Claims] (1)互いにスペーサ材を介して基板を対向させて形成
される機能素子の当該基板にスペーサ材を被着するに当
り、 スペーサ材混入液に超音波照射する工程と、該混入液を
沸騰させる工程と、 沸騰した混入液中に基板を浸漬させる工程と、基板温度
が混入液温度に達した後、該基板を前記混入液から引き
上げる工程と を含むことを特徴とするスペーサ材の被着方法。
(1) When attaching a spacer material to the substrate of a functional element formed by facing each other with a spacer material interposed between the substrates, a step of irradiating the spacer material mixed liquid with ultrasonic waves and boiling the mixed liquid A method for depositing a spacer material, the method comprising the steps of: immersing a substrate in a boiling mixed liquid; and lifting the substrate from the mixed liquid after the substrate temperature reaches the temperature of the mixed liquid. .
JP3695186A 1986-02-21 1986-02-21 Sticking method for spacer material Pending JPS62195623A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3695186A JPS62195623A (en) 1986-02-21 1986-02-21 Sticking method for spacer material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3695186A JPS62195623A (en) 1986-02-21 1986-02-21 Sticking method for spacer material

Publications (1)

Publication Number Publication Date
JPS62195623A true JPS62195623A (en) 1987-08-28

Family

ID=12484051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3695186A Pending JPS62195623A (en) 1986-02-21 1986-02-21 Sticking method for spacer material

Country Status (1)

Country Link
JP (1) JPS62195623A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153068A (en) * 1989-06-29 1992-10-06 Sekisui Fine Chemical Co., Ltd. Coated particle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153068A (en) * 1989-06-29 1992-10-06 Sekisui Fine Chemical Co., Ltd. Coated particle

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