JPS62193732U - - Google Patents
Info
- Publication number
- JPS62193732U JPS62193732U JP8301086U JP8301086U JPS62193732U JP S62193732 U JPS62193732 U JP S62193732U JP 8301086 U JP8301086 U JP 8301086U JP 8301086 U JP8301086 U JP 8301086U JP S62193732 U JPS62193732 U JP S62193732U
- Authority
- JP
- Japan
- Prior art keywords
- carriers
- wafer
- wafer transfer
- transfer device
- mounting table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000000969 carrier Substances 0.000 claims 4
Landscapes
- Pile Receivers (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8301086U JPS62193732U (sl) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8301086U JPS62193732U (sl) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193732U true JPS62193732U (sl) | 1987-12-09 |
Family
ID=30936197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8301086U Pending JPS62193732U (sl) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193732U (sl) |
-
1986
- 1986-05-30 JP JP8301086U patent/JPS62193732U/ja active Pending