JPS62103257U - - Google Patents
Info
- Publication number
- JPS62103257U JPS62103257U JP19664685U JP19664685U JPS62103257U JP S62103257 U JPS62103257 U JP S62103257U JP 19664685 U JP19664685 U JP 19664685U JP 19664685 U JP19664685 U JP 19664685U JP S62103257 U JPS62103257 U JP S62103257U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- holder base
- base
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19664685U JPS62103257U (sl) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19664685U JPS62103257U (sl) | 1985-12-19 | 1985-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62103257U true JPS62103257U (sl) | 1987-07-01 |
Family
ID=31155656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19664685U Pending JPS62103257U (sl) | 1985-12-19 | 1985-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62103257U (sl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0250954U (sl) * | 1988-09-30 | 1990-04-10 |
-
1985
- 1985-12-19 JP JP19664685U patent/JPS62103257U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0250954U (sl) * | 1988-09-30 | 1990-04-10 |