JPS62193724U - - Google Patents
Info
- Publication number
- JPS62193724U JPS62193724U JP1986081054U JP8105486U JPS62193724U JP S62193724 U JPS62193724 U JP S62193724U JP 1986081054 U JP1986081054 U JP 1986081054U JP 8105486 U JP8105486 U JP 8105486U JP S62193724 U JPS62193724 U JP S62193724U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- storage recesses
- tray
- same direction
- respective corners
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986081054U JPS62193724U (enExample) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986081054U JPS62193724U (enExample) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193724U true JPS62193724U (enExample) | 1987-12-09 |
Family
ID=30932436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986081054U Pending JPS62193724U (enExample) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193724U (enExample) |
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1986
- 1986-05-30 JP JP1986081054U patent/JPS62193724U/ja active Pending