JPS62193662U - - Google Patents
Info
- Publication number
- JPS62193662U JPS62193662U JP8097486U JP8097486U JPS62193662U JP S62193662 U JPS62193662 U JP S62193662U JP 8097486 U JP8097486 U JP 8097486U JP 8097486 U JP8097486 U JP 8097486U JP S62193662 U JPS62193662 U JP S62193662U
- Authority
- JP
- Japan
- Prior art keywords
- power source
- high frequency
- ion source
- source
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 4
- 230000015556 catabolic process Effects 0.000 claims 2
- 239000000284 extract Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8097486U JPS62193662U (th) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8097486U JPS62193662U (th) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193662U true JPS62193662U (th) | 1987-12-09 |
Family
ID=30932279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8097486U Pending JPS62193662U (th) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193662U (th) |
-
1986
- 1986-05-30 JP JP8097486U patent/JPS62193662U/ja active Pending
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